JPH05115969A - Vacuum arc treating device - Google Patents

Abstract

PURPOSE:To speedily treat de-scaling. CONSTITUTION:In the device which continuously executes a vacuum arc treatment by having a cathode 1 composed of a stock to be treated which moves continuously with the anodes 4a, 4b, 4c connected to the positive electrode of the vacuum arc electric power source 7, generating the direct arc electric discharge between the cathode 1 and the anode 4a, 4b, 4c, and continuously executing the vacuum arc treatment, an ignition auxiliary electrode roll 8 having the brush 8a of the front surface is provided, and a controller 10 controls the rotation number of the ignition auxiliary electrode roll 8 through a motor.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum arc processing apparatus for carrying out processing by generating a DC arc discharge between an anode and a cathode in vacuum.

[0002]

2. Description of the Related Art The vacuum arc technique is a technique widely used for vacuum circuit breakers which are electric circuit components. In recent years, attempts have been made to apply a vacuum arc to a material process.
Application examples include vapor deposition, ion plating, and oxide film removal (descaling).

In the arc descaling method, once the arc is ignited between the vacuum arc electrodes, it is relatively easy to maintain the arc thereafter, but there is a problem that the starting is difficult.

Conventionally, for ignition, a method has been adopted in which an electrode or an auxiliary electrode rod is brought into contact with a vacuum arc electrode and then separated.

[0005]

In the material process, it is desired to continuously supply and process the material in order to improve productivity. In particular, when high-speed processing is required, it is difficult to continuously and repeatedly ignite at high speed according to the above-mentioned conventional method.

Further, in the vacuum arc process, when the object to be processed is used as the cathode, the cathode point moves together with the object to be processed, so that the arc extinguishes when the cathode point moves away from the anode. As a result, since there is a descaling portion and a non-descaling portion on the surface of the object to be processed, there is a problem that high-speed processing cannot be performed continuously.

On the other hand, conventionally, since there is no countermeasure, the processing is limited to the low speed operation.

In order to solve the above problems, it is an object of the present invention to perform high-speed descaling processing.

[0009]

According to the invention of the present application, an anode (4a, 4b, 4) connected to a positive electrode of a vacuum arc power source (7) is used.
c); a cathode (1) made of a material to be continuously moved; a brush (8a, 11a) on the surface, and a roll-shaped ignition means (8, 8) for contacting the cathode (1) to ignite an arc. 11); drive means (M) for rotating the ignition means (8, 11); and drive control means (1) for controlling the rotation speed of the ignition means (8, 11) via the drive means (M).
0);

Symbols in parentheses indicate corresponding elements or corresponding matters in the embodiments shown in the drawings and described later.

[0011]

According to the invention of the present application, the cathode (1) made of the material to be processed which moves continuously with the anode (4a, 4b, 4c) connected to the positive electrode of the vacuum arc power source (7), In a device for continuously performing a vacuum arc treatment by generating a DC arc discharge between (1) and an anode (4a, 4b, 4c), a roll-shaped ignition means (brush (8a, 11a) having a surface ( 8 and 11), and ignition means (8, 1)
By rotating 1), the brushes (8a, 11a) repeat contact and non-contact with the cathode (1) to ignite an arc.
Therefore, it is possible to ignite continuously and repeatedly at high speed. Further, the drive control means (10) is provided with the ignition means (8, 1).
Since the rotation speed of 1) is controlled via the drive means (M),
The ignition timing can be controlled by changing the rotation speed according to the descaling speed of the cathode spot. This enables high-speed descaling processing.

Other objects and features of the present invention will become apparent from the following description of embodiments with reference to the drawings.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a continuous vacuum arc descaler according to an embodiment of the present invention. This apparatus is an apparatus for unwinding a strip-shaped object (material) 1 from an uncoiler 2, performing descaling with a vacuum arc when passing through the lower surface of an arc electrode (anode), and then winding it up on a coiler 3.
In this embodiment, 3 units are set as the arc electrodes, and the first
It is composed of an electrode 4a, a second electrode 4b, and a third electrode 4c. In the figure, a conductor roll 5 is provided for supplying electricity to the object to be processed 1 which is a cathode. The differential pressure seal chamber 6 is provided to maintain a vacuum state. As a result, the vacuum degree of the vacuum arc processing chamber 20 is about 5 Pa. Reference numeral 7 is an arc power supply. First electrode 4a
Of the auxiliary electrode roll 8 for ignition, which is connected to the ignition power source 9 and rotates at an upstream portion (a direction opposite to the conveying direction of the object 1 to be processed).
Is installed. The rotating shaft of the auxiliary electrode roll 8 for ignition is connected to the motor M. Therefore, the rotation of the auxiliary electrode roll 8 for ignition is driven by the motor M, and the number of rotations thereof is controlled by the controller 10 which gives a signal to the motor M.

FIG. 2 shows the appearance of the auxiliary auxiliary electrode roll 8 for ignition. On the surface of the auxiliary electrode roll 8 for ignition, brushes 8a made of metal wires (Mo, Wt) are arranged in a line parallel to the rotation axis of the roll. Therefore, since the brush 8a automatically repeats contact and non-contact with the object to be processed 1 by the rotation of the auxiliary electrode 8 for ignition, the arc is ignited continuously and at high speed.

Further, by controlling the number of revolutions of the auxiliary electrode roll 8 for ignition by the controller 10, the arc ignition repetition interval can be optimized. That is, the ignition timing is controlled by changing the rotation speed of the auxiliary electrode roll 8 for ignition in accordance with the descaling speed of the cathode spot.
Hereinafter, the ignition timing will be specifically described.

When the arc electrode is a multi-electrode as shown in FIG. 1 (first electrode 4a, second electrode 4b, third electrode 4c), the portion of the workpiece 1 which is descaled by each electrode is shown in FIG.
It is divided as shown in. Therefore, in order to process the object 1 at continuous speed, in principle, once the arc started at the first electrode 4a moves to the third electrode 4c with the movement of the cathode point, and immediately before leaving the third electrode 4c. If it is started a second time, the entire surface can be processed without producing unprocessed parts. This is the minimum required (maximum time interval) ignition repetition timing.

However, when the arc is transferred to the second electrode 4b, the arc is not present in the first electrode 4a and the third electrode 4c and is in a rest state. Therefore, in reality, such an operating form is efficient. Instead, it is desirable to have three electrodes active at all times. Therefore, if the re-ignition point is repeated before the arc is removed from the first electrode 4a, the third electrode 4c is always kept in the operating state.

On the other hand, in the method in which the brush 8a is brought into contact with the object 1 to be ignited, the property at the starting point is locally deteriorated, so that it is desirable to reduce the number of starting points. From the above, the ignition repetition timing is determined by the balance between the required surface properties and operating efficiency.

In this embodiment, the multi-electrode is used,
Basically, it is equivalent to increasing the electrode area (length). This is a multi-electrode model because it is more practical to reduce the load on each electrode by using multiple electrodes rather than sending a large current to the unit electrodes.

The vacuum arc in the present embodiment refers to an arc in which the cathode material is vaporized and the space is maintained while filling the space. That is, it is not an ordinary arc in which the amount of residual gas in the space is overwhelmingly larger than the amount of cathode evaporation. An arc that evaporates not only the cathode material but also the anode material and fills the space is also a vacuum arc.

In the apparatus shown in FIG. 1, when a steel plate is used as the object to be processed 1, the conveying speed of the steel plate is 50 m / min, and the rotation speed of the auxiliary auxiliary electrode roll 8 for ignition is 60 rpm, 5 μ
The scale layer was completely removed.

The auxiliary electrode roll 8 for ignition shown in FIG.
Alternatively, as shown in FIG. 4, the auxiliary auxiliary electrode roll 11 for ignition in which the brush 11a is spirally arranged on the surface of the electrode roll may be used.

[0023]

According to the invention of the present application, the brush (8
a, 11a) roll-shaped ignition means (8, 11)
The ignition can be continuously and rapidly repeated.

Also, since the ignition timing can be controlled by changing the rotation speed of the ignition means (8, 11) according to the descaling speed of the cathode spot, high-speed descaling processing can be performed.

[Brief description of drawings]

FIG. 1 is a side view showing the outline of the configuration of a continuous vacuum arc descaler according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an appearance of the ignition auxiliary electrode roll 8 shown in FIG.

3 is a plan view showing a portion that is descaled by each electrode of the object to be processed 1 shown in FIG. 1. FIG.

FIG. 4 is a perspective view showing the appearance of another ignition auxiliary electrode roll 11.

[Explanation of symbols]

1: Object to be treated (cathode) 2: Uncoiler 3: Coiler 4a: First arc electrode (anode) 4b: Second arc electrode (anode) 4c: Third arc electrode (anode) 5: Conduct roll 6: Differential pressure seal Chamber 7: Arc power supply (vacuum arc power supply) 8: Ignition auxiliary electrode roll (ignition means) 8a: Brush (brush) 9: Ignition power supply 10: Controller (control means) 11: Ignition auxiliary electrode roll (ignition means) 11a: Brush (brush) 20: Vacuum arc processing chamber

Claims (1)

[Claims] 1. An anode connected to the positive electrode of a vacuum arc power supply;
A cathode made of a material to be treated which moves continuously; a roll-shaped ignition means having a brush on its surface and igniting an arc by contacting the cathode; a drive means for rotating the ignition means; and the drive means A vacuum arc processing apparatus, comprising: drive control means for controlling the number of revolutions of the ignition means via the drive control means.