JPH05114167A - Optical information recording medium - Google Patents

Optical information recording medium

Info

Publication number
JPH05114167A
JPH05114167A JP3186818A JP18681891A JPH05114167A JP H05114167 A JPH05114167 A JP H05114167A JP 3186818 A JP3186818 A JP 3186818A JP 18681891 A JP18681891 A JP 18681891A JP H05114167 A JPH05114167 A JP H05114167A
Authority
JP
Japan
Prior art keywords
film
antistatic
recording medium
transparent conductive
optical information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3186818A
Other languages
Japanese (ja)
Inventor
Isao Miyamoto
功 宮本
Wasaburo Ota
和三郎 太田
Hitoshi Nakamura
均 中村
Yujiro Kaneko
裕治郎 金子
Michiaki Shinozuka
道明 篠塚
Masashi Nakazawa
政志 中沢
Toshihiko Yoshio
利彦 吉尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP3186818A priority Critical patent/JPH05114167A/en
Publication of JPH05114167A publication Critical patent/JPH05114167A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To eliminate the trouble by the adhesion of dust and dirt on a substrate surface by electrification and the trouble by the generation of flaws. CONSTITUTION:A 1st protective film 2, a magnetic film 3, a 2nd protective film 4, a reflection film 5, an org. protective film 6, and an inorg. antistatic film 7 are formed on one surface of the substrate 1 and an inorg. antireflection film 8 is formed on the surface on the opposite side. The antireflection film 8 is formed to include >=1 layer of transparent conductive films and has an antistatic property as well. The transparent conductive films and inorg. antistatic film are constituted of the transparent conductive films mainly consisting of In2O3, ITO, SnO2, ZnO, CdO, and ZnS. The antistatic function and antireflection function are simultaneously imparted to the recording medium in this way and the surface hardness of the recording surface is increased, by which the above-mentioned purposes are attained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はレーザー光により情報の
記録及び再生を行う光情報記録媒体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical information recording medium for recording and reproducing information with a laser beam.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】光情報
記録媒体において記録層を支持する基板はポリカーボネ
ートやガラス、2P(フォトポリマー)樹脂等、一般に
誘電性の材料で形成されている為、帯電しやすい。光情
報記録媒体が帯電すると微小な塵やゴミなどが静電気に
より記録層の形成されていない基板面(以下、外表面と
記す。)に付着して情報の読出し及び書込みの妨げにな
り、又、帯電電荷が電子回路の誤動作を誘発させる原因
となる。この帯電の問題は基板の記録層が形成されてい
る側の面(以下、記録面と記す)でも同様である。
2. Description of the Related Art Since a substrate for supporting a recording layer in an optical information recording medium is generally formed of a dielectric material such as polycarbonate, glass, 2P (photopolymer) resin, etc. It's easy to do. When the optical information recording medium is charged, minute dust or dirt adheres to the surface of the substrate (hereinafter referred to as the outer surface) where the recording layer is not formed due to static electricity, which hinders reading and writing of information. The electrostatic charge causes a malfunction of the electronic circuit. This problem of charging is also the same on the surface of the substrate on which the recording layer is formed (hereinafter referred to as the recording surface).

【0003】又、近年盛んに研究が行われている浮上型
磁気ヘッドを用いた磁界変調方式によるオーバーライト
(重ね書き)についても上記帯電は影響を及ぼすが、さ
らにオーバーライトの検討を行う際、磁気ヘッドが基板
表面に接触した場合、記録面の表面硬度が重要となる。
例えば、磁気ヘッドは光磁気ディスクが回転を始める際
及び停止時において記録面に接触しているが、この記録
面の硬度、すなわち、ディスク最上層に形成されている
保護層の硬度が低い場合、上記接触部位にてキズが生じ
記録層が腐食され、光磁気ディスクが使用不能となる危
険性が大きくなる。以上の様に、光情報記録媒体の外表
面部分は反射防止機能と帯電防止機能を持ち、又、オー
バーライトを行う際は、記録面は帯電防止機能及び高い
表面硬度をそれぞれ合わせ持つことが望ましい。
Further, the above charging has an influence on the overwrite (overwriting) by the magnetic field modulation method using the floating magnetic head, which has been actively researched in recent years, but when the overwrite is further examined, When the magnetic head contacts the surface of the substrate, the surface hardness of the recording surface becomes important.
For example, the magnetic head is in contact with the recording surface when the magneto-optical disk starts and stops rotating, but when the hardness of this recording surface, that is, the hardness of the protective layer formed on the disk top layer is low, There is a high risk that the magneto-optical disk will become unusable due to scratches at the contact area and corrosion of the recording layer. As described above, it is desirable that the outer surface portion of the optical information recording medium has an antireflection function and an antistatic function, and that when overwriting, the recording surface has both an antistatic function and a high surface hardness. ..

【0004】本発明は上記のような従来技術の問題点を
解決するためになされたもので、静電気の発生及びキズ
の発生を防止した信頼性の高い光情報記録媒体を提供す
ることを目的とする。
The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide a highly reliable optical information recording medium in which static electricity and scratches are prevented. To do.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するた
め、本発明によれば、少なくとも基板と記録層から成
り、レーザ光を用いて記録再生を行う光情報記録媒体に
おいて、その読み取り側表面に透明導電膜を1層以上含
む帯電防止機能を備えた無機反射防止膜を設けるととも
に、読み取り側とは反対の表面に無機帯電防止膜を設け
たことを特徴とする光情報記録媒体が提供される。
In order to achieve the above object, according to the present invention, an optical information recording medium which is composed of at least a substrate and a recording layer and which records and reproduces by using a laser beam has a read side surface thereof. An optical information recording medium is provided, which comprises an inorganic antireflection film having one or more transparent conductive films and having an antistatic function, and an inorganic antistatic film provided on a surface opposite to a reading side. ..

【0006】以下本発明の光情報記録媒体について詳述
する。図1は本発明による光情報記録媒体の構成例を示
す断面図であり、透明基板1の一方の面(記録面)上に
は第1保護膜2、磁性膜3、第2保護膜4、反射膜5、
有機保護膜6及び無機帯電防止膜7が形成され、他方の
面(外表面)には透明導電膜を1層以上含む無機反射防
止膜8が形成されている。
The optical information recording medium of the present invention will be described in detail below. FIG. 1 is a cross-sectional view showing a configuration example of an optical information recording medium according to the present invention, in which a first protective film 2, a magnetic film 3, a second protective film 4 are formed on one surface (recording surface) of a transparent substrate 1. Reflective film 5,
An organic protective film 6 and an inorganic antistatic film 7 are formed, and an inorganic antireflection film 8 including one or more transparent conductive films is formed on the other surface (outer surface).

【0007】透明基板1にはポリカーボネート、アクリ
ル、エポキシ、PMMA(ポリメチルメタクリレート)
等の合成樹脂、ガラス又は2P基板などが使用される。
Polycarbonate, acrylic, epoxy, PMMA (polymethylmethacrylate) is used for the transparent substrate 1.
A synthetic resin such as glass, a 2P substrate, or the like is used.

【0008】第1保護膜2及び第2保護膜4は、磁性膜
3をH2O、O2などによる腐食から防止するパッシベー
ション効果を持たせるために設けられ、材料としてはS
iNxなどの窒化物やIn23、SiOxなどの酸化物
が用いられる。
The first protective film 2 and the second protective film 4 are provided in order to have a passivation effect for preventing the magnetic film 3 from being corroded by H 2 O, O 2, etc.
A nitride such as iNx or an oxide such as In 2 O 3 or SiOx is used.

【0009】磁性膜3としてはTb−Dy−Fe−Co
等の垂直磁気異方性を有する希土類金属−遷移金属アモ
ルファス合金膜を用いることが好ましいが、これに限定
されるものではない。この磁性膜3は単層であってもよ
く、多層であってもよい。
The magnetic film 3 is Tb-Dy-Fe-Co.
It is preferable to use a rare earth metal-transition metal amorphous alloy film having perpendicular magnetic anisotropy such as, but not limited to this. The magnetic film 3 may be a single layer or a multilayer.

【0010】反射膜5は磁気光学効果をエンハンスメン
トすためのもので、Al、Auなどの反射率の大きい材
料が用いられる。
The reflective film 5 is for enhancing the magneto-optical effect, and is made of a material having a high reflectance such as Al or Au.

【0011】有機保護膜6は反射膜5以下の膜の腐食防
止を行うもので、紫外線硬化樹脂、熱可塑性樹脂、ホッ
トメルトレジン等が用いられる。
The organic protective film 6 is for preventing the corrosion of the films below the reflective film 5, and is made of ultraviolet curable resin, thermoplastic resin, hot melt resin or the like.

【0012】無機帯電防止膜7にはIn23、ITO、
SnO2、ZnO、ZnS等の無機材料を主材料とする
透明導電膜を使用する。膜厚は100〜2000Å程度
が適当である。また、反射防止層8と同等の構成(透明
絶縁性材料と透明導電膜)も可能である。
The inorganic antistatic film 7 is made of In 2 O 3 , ITO,
A transparent conductive film whose main material is an inorganic material such as SnO 2 , ZnO or ZnS is used. A suitable film thickness is about 100 to 2000Å. Further, the same structure as the antireflection layer 8 (transparent insulating material and transparent conductive film) is also possible.

【0013】反射防止膜8は、保護膜2,4や基板1の
屈折率をもとに、従来、光学部品等において広く行われ
ている反射防止層の設計理論に則り、それぞれ独自の屈
折率を持つフッ化マグネシウム、一酸化珪素、二酸化珪
素、酸化チタン、酸化セリウム、酸化アルミニウム等、
従来の光学部品の反射防止層として用いられている透明
絶縁性材料による膜と、n=2前後の屈折率をもつIn
23、ITO、SnO2、ZnO、ZnS等の無機材料
を主材料とする透明導電膜とを組合せて構成する。図2
に反射防止膜8の構成例を示す。反射防止膜8は透明絶
縁性膜B,B’と透明導電膜Aを積層してなり、各膜厚
は透明絶縁性膜B,B’がλ/4、透明導電膜Aがλ/
2で、屈折率が異なっている。ここでλは書き込み/読
み出しレーザーの波長であり、ここでいう膜厚とはこの
光学的膜厚(nd)[nは屈折率、dは実際の膜厚を表
わす]を示す。このような反射防止層構造においては層
構造を構成する各膜の厚さが薄いため、透明導電膜がた
とえ外部に直接露呈しなくても、十分な帯電防止効果を
実現できる。
The antireflection film 8 has its own refractive index based on the refractive indices of the protective films 2 and 4 and the substrate 1 according to the design theory of the antireflection layer that has been widely used in the conventional optical parts. With magnesium fluoride, silicon monoxide, silicon dioxide, titanium oxide, cerium oxide, aluminum oxide, etc.,
A film made of a transparent insulating material used as an antireflection layer of a conventional optical component and In having a refractive index of about n = 2
2 O 3 , ITO, SnO 2 , ZnO, ZnS and the like are combined with a transparent conductive film whose main material is a transparent conductive film. Figure 2
An example of the structure of the antireflection film 8 is shown in FIG. The antireflection film 8 is formed by laminating the transparent insulating films B and B ′ and the transparent conductive film A, and the respective thicknesses of the transparent insulating films B and B ′ are λ / 4 and the transparent conductive film A is λ /.
In No. 2, the refractive index is different. Here, λ is the wavelength of the writing / reading laser, and the film thickness referred to here is the optical film thickness (nd) [n is the refractive index and d is the actual film thickness]. In such an antireflection layer structure, since each film constituting the layer structure is thin, a sufficient antistatic effect can be realized even if the transparent conductive film is not directly exposed to the outside.

【0014】以上本発明を一構成例の光磁気記録媒体を
例に説明してきたが、本発明はこれに限定されるもので
はなく、種の変形、変更が可能で、例えば反射膜5上の
有機保護膜6は省略しても構わない。また、光磁気記録
媒体以外にも帯電防止機能を合わせ持つことが望まれる
ビデオディスク、CD−ROM、CD−V、CD−I、
CD−XA、相変化型書換え可能光ディスク等、その他
種々の光情報記録媒体に適用することが可能である。
The present invention has been described above by taking the magneto-optical recording medium of one constitutional example as an example, but the present invention is not limited to this, and various kinds of modifications and changes are possible, for example, on the reflection film 5. The organic protective film 6 may be omitted. In addition to the magneto-optical recording medium, a video disc, a CD-ROM, a CD-V, a CD-I, which is desired to have an antistatic function together,
It can be applied to various other optical information recording media such as a CD-XA and a phase change type rewritable optical disk.

【0015】[0015]

【実施例】次に本発明の実施例を説明する。EXAMPLES Next, examples of the present invention will be described.

【0016】実施例1 直径130mmφ、厚さ1.2mmのポリカーボネート
(PC)基板の一方の面第1保護膜としてSiN膜、磁
性膜としてTbDyFeCo膜、第2保護膜としてSi
N膜、反射膜としてAl膜を設け、さらにその上に帯電
防止膜としてIn23膜を設けるとともに、その反対側
の面にSiO膜、In23膜及びSiO膜の3層から成
る反射防止膜を設け、本発明による記録媒体とした。帯
電防止膜の膜厚は350Å、反射防止膜の膜厚はSiO
膜がλ/4、In23膜がλ/2、SiO膜がλ/4と
した。各構成材料を表1に示す。ここでλは書き込み/
読み出しレーザーの波長であり、ここでいう膜厚とは光
学的膜厚(nd)[nは屈折率、dは実際の膜厚を表わ
す]を示す。
Example 1 One side of a polycarbonate (PC) substrate having a diameter of 130 mmφ and a thickness of 1.2 mm A SiN film as a first protective film, a TbDyFeCo film as a magnetic film, and a Si as a second protective film.
An N film, an Al film as a reflection film, an In 2 O 3 film as an antistatic film are further provided on the N film, and an SiO 2 film, an In 2 O 3 film and a SiO film are provided on the opposite surface. An antireflection film was provided to obtain a recording medium according to the present invention. The thickness of the antistatic film is 350Å, and the thickness of the antireflection film is SiO.
The film was λ / 4, the In 2 O 3 film was λ / 2, and the SiO film was λ / 4. Table 1 shows each constituent material. Where λ is write /
It is the wavelength of the reading laser, and the film thickness referred to here is the optical film thickness (nd) [n is the refractive index, and d is the actual film thickness].

【表1】 [Table 1]

【0017】実施例2 実施例1において、反射防止膜をSiO(λ/4厚)/
ITO(λ/2厚)/SiO2(λ/4厚)とした以外は
同様にして本発明による記録媒体を得た。
Example 2 In Example 1, the antireflection film was formed of SiO (λ / 4 thickness) /
A recording medium according to the present invention was obtained in the same manner except that ITO (λ / 2 thickness) / SiO 2 (λ / 4 thickness) was used.

【0018】実施例3 実施例1において、帯電防止膜をITO(350Å厚)
としかつ反射防止膜をSiO(λ/4厚)/In2
3(λ/2厚)/SiO2(λ/4厚)とした以外は同様
にした本発明による記録媒体を得た。
Example 3 In Example 1, the antistatic film was made of ITO (350 Å thickness).
And the antireflection film is SiO (λ / 4 thickness) / In 2 O
A similar recording medium according to the present invention was obtained except that the thickness was 3 (λ / 2 thickness) / SiO 2 (λ / 4 thickness).

【0019】実施例4 実施例1において、基板をガラスとし、反射防止膜をI
TO(λ/2厚)/SiO2(λ/4厚)とした以外は
同様にして本発明による記録媒体を得た。
Example 4 In Example 1, the substrate was glass and the antireflection film was I.
A recording medium according to the present invention was obtained in the same manner except that TO (λ / 2 thickness) / SiO 2 (λ / 4 thickness) was used.

【0020】比較例1 実施例1において、帯電防止膜を(5μm厚)(有機帯
電防止膜)としかつ反射防止膜を(5μm厚)(有機反
射防止膜)としたもの。
Comparative Example 1 In Example 1, the antistatic film was (5 μm thick) (organic antistatic film) and the antireflection film was (5 μm thick) (organic antireflection film).

【0021】比較例2 実施例1において、帯電防止膜を(5μm厚)(有機反
射防止膜)とし帯電防止膜を設けないもの。
Comparative Example 2 The same as Example 1, except that the antistatic film (thickness of 5 μm) (organic antireflection film) is not provided.

【0022】以上のようにして作製した各記録媒体につ
いて反射率、カー回転角、表面抵抗及び表面硬度の測
定、並びに塵埃試験(記録媒体を駆動装置に装着し、回
転させた状態で約10年相当の塵埃を塵埃試験機に吸着
させ、試験前後のBER(ビットエラー率)を評価)を
行った。その結果を表2に示す。
The reflectance, Kerr rotation angle, surface resistance and surface hardness of each recording medium produced as described above, and dust test (about 10 years with the recording medium mounted in a driving device and rotated) A considerable amount of dust was adsorbed on the dust tester, and BER (bit error rate) before and after the test was evaluated). The results are shown in Table 2.

【0023】[0023]

【表2】 [Table 2]

【0024】[0024]

【発明の効果】本発明によれば、前記構成としたので以
下のような効果が得られる。
According to the present invention, since it has the above-mentioned structure, the following effects can be obtained.

【0025】無機反射防止膜を形成することで反射率
が増加し、かつ、磁気光学効果のエンハンスメントが大
きくなりカー回転角が増加する。 無機反射防止膜及び無機帯電防止膜に1層以上の透明
導電膜を含む事で帯電防止効果が生じ、媒体表面への塵
埃付着を防止することができる。 無機帯電防止膜を記録面に形成することで記録面の表
面硬度をあげることができ、オーバーライト用に使用し
ても記録層を損傷する可能性が低減できる。
By forming the inorganic antireflection film, the reflectance is increased, the enhancement of the magneto-optical effect is increased, and the Kerr rotation angle is increased. By including one or more transparent conductive films in the inorganic antireflection film and the inorganic antistatic film, an antistatic effect is produced, and it is possible to prevent dust from adhering to the surface of the medium. By forming the inorganic antistatic film on the recording surface, the surface hardness of the recording surface can be increased, and the possibility of damaging the recording layer even when used for overwriting can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による光情報記録媒体の一構成例を模式
的に示す断面図である。
FIG. 1 is a cross-sectional view schematically showing a configuration example of an optical information recording medium according to the present invention.

【符号の説明】[Explanation of symbols]

1 基板 2 第1保護膜 3 磁性膜 4 第2保護膜 5 反射膜 6 有機保護膜 7 無機帯電防止膜 8 無機反射防止膜 1 Substrate 2 First Protective Film 3 Magnetic Film 4 Second Protective Film 5 Reflective Film 6 Organic Protective Film 7 Inorganic Antistatic Film 8 Inorganic Antireflective Film

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成4年10月27日[Submission date] October 27, 1992

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief description of the drawing

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による光情報記録媒体の一構成例を模式
的に示す断面図である。
FIG. 1 is a cross-sectional view schematically showing a configuration example of an optical information recording medium according to the present invention.

【図2】反射防止膜の構成例を示す断面図である。FIG. 2 is a cross-sectional view showing a configuration example of an antireflection film.

【符号の説明】 1 基板 2 第1保護膜 3 磁性膜 4 第2保護膜 5 反射膜 6 有機保護膜 7 無機帯電防止膜 8 無機反射防止膜[Explanation of reference numerals] 1 substrate 2 first protective film 3 magnetic film 4 second protective film 5 reflective film 6 organic protective film 7 inorganic antistatic film 8 inorganic antireflective film

───────────────────────────────────────────────────── フロントページの続き (72)発明者 金子 裕治郎 東京都大田区中馬込1丁目3番6号 株式 会社リコー内 (72)発明者 篠塚 道明 東京都大田区中馬込1丁目3番6号 株式 会社リコー内 (72)発明者 中沢 政志 東京都大田区中馬込1丁目3番6号 株式 会社リコー内 (72)発明者 吉尾 利彦 鳥取県鳥取市北村10−3 リコーマイクロ エレクトロニクス株式会社内 ─────────────────────────────────────────────────── --- Continuation of the front page (72) Inventor Yujiro Kaneko 1-3-6 Nakamagome, Ota-ku, Tokyo Inside Ricoh Co., Ltd. (72) Inventor Michiaki Shinozuka 1-3-6 Nakamagome, Ota-ku, Tokyo In stock company Ricoh (72) Inventor Masashi Nakazawa 1-3-6 Nakamagome, Ota-ku, Tokyo Inside Ricoh company (72) Inventor Toshihiko Yoshio 10-3 Kitamura, Tottori-shi, Tottori Ricoh Micro Electronics Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 少なくとも基板と記録層から成り、レー
ザ光を用いて記録再生を行う光情報記録媒体において、
その読み取り側表面に透明導電膜を1層以上含む帯電防
止機能を備えた無機反射防止膜を設けるとともに、読み
取り側とは反対の表面に無機帯電防止膜を設けたことを
特徴とする光情報記録媒体。
1. An optical information recording medium comprising at least a substrate and a recording layer, for recording and reproducing using laser light,
Optical information recording characterized in that an inorganic antireflection film having an antistatic function including one or more transparent conductive films is provided on the reading side surface, and an inorganic antistatic film is provided on the surface opposite to the reading side. Medium.
【請求項2】 上記透明導電膜及び上記無機帯電防止膜
が、In23、ITO、SnO2、ZnO、CdO又は
ZnSを主材料とした透明導電膜で形成されていること
を特徴とする請求項1に記載の光情報記録媒体。
2. The transparent conductive film and the inorganic antistatic film are formed of a transparent conductive film containing In 2 O 3 , ITO, SnO 2 , ZnO, CdO or ZnS as a main material. The optical information recording medium according to claim 1.
JP3186818A 1991-07-01 1991-07-01 Optical information recording medium Pending JPH05114167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3186818A JPH05114167A (en) 1991-07-01 1991-07-01 Optical information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3186818A JPH05114167A (en) 1991-07-01 1991-07-01 Optical information recording medium

Publications (1)

Publication Number Publication Date
JPH05114167A true JPH05114167A (en) 1993-05-07

Family

ID=16195138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3186818A Pending JPH05114167A (en) 1991-07-01 1991-07-01 Optical information recording medium

Country Status (1)

Country Link
JP (1) JPH05114167A (en)

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