JPH05107547A - Liquid crystal display element - Google Patents

Liquid crystal display element

Info

Publication number
JPH05107547A
JPH05107547A JP29188491A JP29188491A JPH05107547A JP H05107547 A JPH05107547 A JP H05107547A JP 29188491 A JP29188491 A JP 29188491A JP 29188491 A JP29188491 A JP 29188491A JP H05107547 A JPH05107547 A JP H05107547A
Authority
JP
Japan
Prior art keywords
liquid crystal
stripe
crystal display
substrates
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29188491A
Other languages
Japanese (ja)
Other versions
JP2869828B2 (en
Inventor
Masaaki Suzuki
正明 鈴木
Toshifumi Yoshioka
利文 吉岡
Yuichi Masaki
裕一 正木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP29188491A priority Critical patent/JP2869828B2/en
Priority to US07/956,299 priority patent/US5285300A/en
Priority to DE69232242T priority patent/DE69232242T2/en
Priority to DE69216348T priority patent/DE69216348T2/en
Priority to EP95113126A priority patent/EP0687936B1/en
Priority to EP92117005A priority patent/EP0536680B1/en
Priority to AT95113126T priority patent/ATE209789T1/en
Priority to AT92117005T priority patent/ATE147169T1/en
Publication of JPH05107547A publication Critical patent/JPH05107547A/en
Priority to US08/145,641 priority patent/US5406398A/en
Application granted granted Critical
Publication of JP2869828B2 publication Critical patent/JP2869828B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To prevent deterioration in display quality by making joints due to divisional exposure hard to visually recognize. CONSTITUTION:On the liquid crystal display element which has a couple of opposite substrates, a couple of striped electrode groups 1 and 1' which are arranged on the opposite surfaces of those substrates while crossing each other when viewed from a display surface, and liquid crystal which is driven with voltages impressed through those striped electrode groups, and also has the striped electrode groups 1 formed on one or both the substrates by performing 42 divisional exposure at right angles to the length direction of the stripes at the time of pattern printing in a photolithographic process, the joints 4 due to the divisional exposure are arranged overlapping with non-display parts including parts 2' between picture elements as two striped electrodes 1' on the opposite substrate surfaces and opaque metallic members for reducing the electric resistance of the striped electrode 1'.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、それぞれがストライプ
状電極群を有する一対の基板間に液晶を挟持してなる液
晶表示素子に関し、特にストライプ状電極群パターン形
成時のストライプに対する垂直方向の継ぎ目をストライ
プ状電極群が相互に交差するように配置された対向基板
側の非表示部に重なり合うように配置することにより、
機械精度上の継ぎ目のズレを人間の目で視認できなくし
た液晶表示素子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display element in which a liquid crystal is sandwiched between a pair of substrates each having a striped electrode group, and more particularly a joint in the direction perpendicular to the stripe when forming a striped electrode group pattern. Is arranged so as to overlap the non-display portion on the counter substrate side where the striped electrode groups are arranged so as to intersect with each other,
The present invention relates to a liquid crystal display element in which a seam deviation due to mechanical precision cannot be visually recognized by human eyes.

【0002】[0002]

【従来の技術】液晶表示素子は、対向する一対の基板
と、これらの基板の対向面上に相互に交差するように形
成された一対のストライプ状電極群により構成されてい
る。このようなストライプ状電極群を形成するためのフ
ォトリソ工程において、特に10インチ程度以上の表示
面積をもちかつ分解能が4[pel]程度以上の高精細
な液晶表示素子では、露光によるパターン焼付け時に、
高解像度と場合によってはストライプ電極の電気抵抗を
低減させるための不透明電極部材の重ね焼き時の重ね精
度が必要であるため、その性能を満たすための、例えば
MPA−1500(キヤノン製)のような露光装置で両
基板上の各々のストライプ状電極群を直交方向でも分割
して継ぎ合わせることによって形成することが行なわれ
る。この際のストライプに対する垂直方向の継ぎ目は、
従来、対向面上に交差するストライプ電極上に重なり合
うように配置されていた。
2. Description of the Related Art A liquid crystal display element is composed of a pair of substrates facing each other and a pair of striped electrodes formed on the facing surfaces of these substrates so as to intersect each other. In the photolithography process for forming such a striped electrode group, particularly in a high-definition liquid crystal display device having a display area of about 10 inches or more and a resolution of about 4 [pel] or more, when a pattern is printed by exposure,
A high resolution and, in some cases, a stacking precision at the time of stacking the opaque electrode members to reduce the electric resistance of the stripe electrode are required. Therefore, in order to satisfy the performance, for example, MPA-1500 (manufactured by Canon) The exposure device is formed by dividing and joining each stripe-shaped electrode group on both substrates in the orthogonal direction. The vertical seam to the stripes at this time is
Conventionally, they are arranged so as to overlap with each other on the stripe electrodes intersecting on the facing surface.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記従
来例では実際に液晶を挟持させ、相互に交差するように
配置したストライプ状電極群を介して印加される電圧に
よって液晶を駆動して表示させた場合、一方または両基
板上の各々のストライプ状電極群の垂直方向の継ぎ目の
機械精度上のストライプに対する垂直方向のズレが大き
いと、それが表示画素上に表われてしまうため人間の目
にも視認されて表示品位を低下させてしまうという欠点
があった。
However, in the above-mentioned conventional example, the liquid crystal is actually sandwiched, and the liquid crystal is driven and displayed by the voltage applied through the stripe-shaped electrode groups arranged so as to intersect each other. In this case, if the vertical seam of the vertical seams of the striped electrode groups on one or both substrates is large with respect to the mechanical precision stripes, it will appear on the display pixel and will be visible to the human eye. It has a drawback that it is visually recognized and deteriorates the display quality.

【0004】本発明は、上述の従来例における問題点に
鑑みてなされたもので、基板上にストライプ電極群を形
成するためのフォトリソ工程におけるパターン焼き付け
を分割露光によって行なう液晶表示素子において、その
分割露光による継ぎ目を視認しにくくして表示品位の低
下を防止することを目的とする。
The present invention has been made in view of the problems in the above-described conventional example, and in a liquid crystal display element in which a pattern printing in a photolithography process for forming a stripe electrode group on a substrate is performed by a division exposure, the division is performed. It is intended to make it difficult to visually recognize a seam due to exposure and prevent deterioration of display quality.

【0005】[0005]

【課題を解決するための手段】上記の目的を達成するた
め、本発明では、対向する一対の基板と、それらの基板
の対向面上に表示面から見て相互に交差するように配置
された一対のストライプ状電極群と、これらストライプ
状電極群を介して印加される電圧によって駆動される液
晶とを有し、前記一方または両基板上の各々のストライ
プ状電極群がフォトリソ工程におけるパターン焼付け時
にストライプの長手方向に対し垂直方向で2つ以上に分
割露光されて形成されたものである液晶表示素子におい
て、前記分割露光による継ぎ目を、対向する基板面上の
ストライプ状電極の2本のストライプ電極間を含む非表
示部に重なり合うように配置したことを特徴とする。
In order to achieve the above object, according to the present invention, a pair of substrates facing each other and arranged on the facing surfaces of the substrates so as to intersect each other when viewed from the display surface. A pair of striped electrode groups and a liquid crystal driven by a voltage applied through these striped electrode groups are provided, and each striped electrode group on the one or both substrates is subjected to pattern printing in a photolithography process. In a liquid crystal display element formed by performing two or more divided exposures in a direction perpendicular to the longitudinal direction of a stripe, a seam formed by the divided exposures has two stripe electrodes, which are stripe electrodes on opposing substrate surfaces. It is characterized in that it is arranged so as to overlap a non-display portion including a space.

【0006】ストライプ電極の電気抵抗を低減させる等
のための不透明金属部材を有する液晶表示素子において
は、前記非表示部として、さらに前記不透明金属部材の
領域を含ませることができる。
In a liquid crystal display element having an opaque metal member for reducing the electric resistance of the stripe electrode, the non-display portion may further include the region of the opaque metal member.

【0007】[0007]

【作用】本発明によれば、一方または両基板上の各々の
ストライプ状電極群パターン形成時のストライプ方向に
対する垂直方向の分割部(すなわち継ぎ目)の機械精度
上のズレを、相互に交差するように配置された対向基板
側の2本のストライプ電極間(以下画素間という)を含
む非表示部に重なり合うように配置させ、これにより、
液晶を駆動して表示させても、継ぎ目の機械精度上のズ
レが表示画素上には表われないようにしている。
According to the present invention, when the stripe-shaped electrode group patterns are formed on one or both substrates, the deviations in the mechanical precision of the divisions (that is, the joints) in the direction perpendicular to the stripe direction cross each other. The two stripe electrodes on the side of the counter substrate (hereinafter referred to as "between pixels") arranged on the counter substrate so as to overlap with the non-display portion.
Even if the liquid crystal is driven and displayed, the mechanical deviation of the joint is prevented from appearing on the display pixel.

【0008】以下、本発明を図面を用いて詳細に説明す
る。
The present invention will be described in detail below with reference to the drawings.

【0009】図1は本発明の一実施例に係る液晶表示素
子の電極部の平面図である。図1において、1は画素電
極である透明電極、2は画素間であり、第1象限と第2
象限との継ぎ目4において継ぎ目ズレ4aが生じてい
る。また、1’および2’は対向する基板の透明電極お
よび画素間であり、前記継ぎ目4は対向基板の画素間
2’に重なり合っている。ここで、第1象限と第2象限
はそれぞれフォトリソ工程において、焼き付けが1回の
露光で行なわれる範囲である。すなわち、本例は、例え
ば1回目で第1象限を露光し、2回目で第2象限を露光
したような場合を示している。
FIG. 1 is a plan view of an electrode portion of a liquid crystal display device according to an embodiment of the present invention. In FIG. 1, 1 is a transparent electrode which is a pixel electrode, 2 is between pixels, and the first quadrant and the second quadrant
A seam shift 4a is generated at the seam 4 with the quadrant. Reference numerals 1'and 2'represent the transparent electrodes and pixels on the opposing substrate, and the seam 4 overlaps the pixel 2'on the opposing substrate. Here, each of the first quadrant and the second quadrant is a range where printing is performed by one exposure in the photolithography process. That is, this example shows a case where, for example, the first quadrant is exposed at the first time and the second quadrant is exposed at the second time.

【0010】図2は図1の表示画素を示す平面図であ
る。図2において、第1象限の画素群と第2象限の画素
群は継ぎ目4において4aでズレているが、継ぎ目4が
非表示部であるためそのズレは視認されない。
FIG. 2 is a plan view showing the display pixel of FIG. In FIG. 2, the pixel group in the first quadrant and the pixel group in the second quadrant are displaced by 4a at the joint 4, but the joint 4 is a non-display portion, and the displacement is not visually recognized.

【0011】図3は従来の液晶表示素子の電極部の一例
であり、第1象限と第2象限の継ぎ目4は対向基板の透
明電極1’に重なりあっている。図4は図3の表示画素
を示す平面図である。図4において継ぎ目4上の画素に
は継ぎ目ズレ4aがそのまま現れるため視認される。
FIG. 3 shows an example of an electrode portion of a conventional liquid crystal display element, in which a joint 4 in the first and second quadrants overlaps a transparent electrode 1'of a counter substrate. FIG. 4 is a plan view showing the display pixel of FIG. In FIG. 4, since the seam shift 4a appears as it is in the pixel on the seam 4, it is visually recognized.

【0012】ここで図1および図2は透明電極のみの構
成で、継ぎ目が対向基板の画素間に重なる例を示してい
るが、透明電極に加えて金属電極を配した場合は、画素
間および対向金属電極上等の非表示部と継ぎ目を重ねる
ことによっても同様の効果がある。
Here, FIGS. 1 and 2 show an example in which only the transparent electrodes are arranged and the seams overlap between the pixels of the opposite substrate. The same effect can be obtained by overlapping the seam with the non-display portion such as on the opposing metal electrode.

【0013】[0013]

【実施例1】以下、本発明の実施例を説明する。Example 1 An example of the present invention will be described below.

【0014】300×320×t1.1(mm)のガラ
ス基板2枚に、それぞれスパッタ法で透明電極(IT
O)1000Åを成膜し、フォトリソグラフィー技術を
用いてストライプ状電極群を形成した。この時の露光は
キヤノン製MPA−1500を用い4分割露光にて行な
った。形成されたストライプ状電極群の形状を図1に示
す。図1において、透明電極1の巾を200μm、画素
間2の巾を20μmとした。継ぎ目ズレ4aは2μmで
あった。
Transparent electrodes (IT) were formed on two glass substrates of 300 × 320 × t1.1 (mm) by sputtering.
O) 1000 Å was deposited, and a striped electrode group was formed by using a photolithography technique. The exposure at this time was performed by 4-division exposure using MPA-1500 manufactured by Canon. The shape of the formed stripe electrode group is shown in FIG. In FIG. 1, the width of the transparent electrode 1 was 200 μm, and the width of the inter-pixel 2 was 20 μm. The seam deviation 4a was 2 μm.

【0015】前記ガラス基板2枚を一方の継ぎ目が他方
の画素間に重なるように貼り合せ液晶を封入し図1およ
び図2に示す液晶表示素子を形成した。該液晶表示素子
を駆動したところ、図2に示すように4分割の継ぎ目は
全く視認されなかった。
The two glass substrates were bonded together so that one seam overlapped between the other pixels, and liquid crystal was sealed therein to form the liquid crystal display device shown in FIGS. 1 and 2. When the liquid crystal display device was driven, the four-divided joint was not visually recognized at all as shown in FIG.

【0016】[0016]

【他の実施例】図5は本発明のもう一つ実施例の液晶表
示素子の電極部の平面図の一例である。
[Other Embodiments] FIG. 5 is an example of a plan view of an electrode portion of a liquid crystal display device according to another embodiment of the present invention.

【0017】図5において、画素となる透明電極1およ
び1’に沿って接して電極抵抗の低い金属電極3および
3’が形成されている。ここで第1象限と第2象限の継
ぎ目4における継ぎ目ズレ4aは対向基板の金属電極
3’(すなわち非表示部)と重なり合っているため視認
されない。
In FIG. 5, metal electrodes 3 and 3'having low electrode resistance are formed in contact with the transparent electrodes 1 and 1'to be pixels. Here, the seam shift 4a in the seam 4 in the first quadrant and the second quadrant is not visible because it overlaps with the metal electrode 3 '(that is, the non-display portion) of the counter substrate.

【0018】図5の液晶表示素子は次のようにして作成
した。すなわち、300×320×t1.1(mm)の
ガラス基板2枚に、それぞれ実施例1と同様の方法で厚
さ1500Åのストライプ状透明電極群を形成し、その
上に同じくスパッタ法で金属電極としてAlを2000
Åを成膜し、透明電極と同様の方法でパターンを形成し
た。この時の透明電極1の巾250μm、金属電極の巾
30μm、画素間2の巾10μmとし、継ぎ目ズレ4a
は1.5μmであった。
The liquid crystal display device shown in FIG. 5 was prepared as follows. That is, a striped transparent electrode group having a thickness of 1500 Å was formed on each of two 300 × 320 × t1.1 (mm) glass substrates by the same method as in Example 1, and a metal electrode was also sputtered thereon. Al as 2000
Å was formed into a film, and a pattern was formed in the same manner as the transparent electrode. At this time, the width of the transparent electrode 1 is 250 μm, the width of the metal electrode is 30 μm, and the width between the pixels 2 is 10 μm.
Was 1.5 μm.

【0019】前記ガラス基板2枚を一方の継ぎ目が他方
の金属電極に重なるように貼り合わせ液晶を封入し、図
5に示す液晶表示素子を形成した。該液晶表示素子を駆
動したところ4分割の継ぎ目は全く視認されなかった。
The two glass substrates were bonded together so that one seam overlaps the other metal electrode, and liquid crystal is sealed therein to form a liquid crystal display device shown in FIG. When the liquid crystal display device was driven, a four-divided joint was not visible at all.

【0020】[0020]

【発明の効果】以上説明したように、本発明によれば、
ストライプ電極群パターン形成時のストライプに対する
垂直方向の継ぎ目を相互に交差するように配置された対
向基板側の非表示部に重なり合うように配置することに
より、継ぎ目のズレの許容範囲を大きくしても、表示品
位の低下の全くない液晶表示素子を提供することができ
る。
As described above, according to the present invention,
By arranging the seams in the vertical direction with respect to the stripes at the time of forming the stripe electrode group pattern so as to overlap the non-display portion on the side of the opposite substrate arranged so as to intersect with each other, even if the allowable range of the seam deviation is increased. Thus, it is possible to provide a liquid crystal display device without any deterioration in display quality.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例に係る液晶表示素子の電極
部の一例を示す平面図である。
FIG. 1 is a plan view showing an example of an electrode portion of a liquid crystal display element according to an embodiment of the present invention.

【図2】 図1の液晶表示素子の表示画素を示す平面図
である。
FIG. 2 is a plan view showing a display pixel of the liquid crystal display element of FIG.

【図3】 従来例の液晶表示素子の電極部の平面図の一
例を示す平面図である。
FIG. 3 is a plan view showing an example of a plan view of an electrode portion of a conventional liquid crystal display element.

【図4】 図3の液晶表示素子の表示画素を示す平面図
である。
4 is a plan view showing a display pixel of the liquid crystal display element of FIG.

【図5】 本発明の別の実施例に係る液晶表示素子の電
極部の平面図である。
FIG. 5 is a plan view of an electrode portion of a liquid crystal display element according to another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1:透明電極、1’:対向基板の透明電極、2:画素
間、2’:対向基板の画素間、3:金属電極、3’:対
向基板の金属電極、4:継ぎ目、4a:継ぎ目ズレ。
1: transparent electrode, 1 ': transparent electrode on the opposite substrate, 2: between pixels, 2': between pixels on the opposite substrate, 3: metal electrode, 3 ': metal electrode on the opposite substrate, 4: seam, 4a: seam deviation ..

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 対向する一対の基板と、それらの基板の
対向面上に表示面から見て相互に交差するように配置さ
れた一対のストライプ状電極群と、これらストライプ状
電極群を介して印加される電圧によって駆動される液晶
とを有し、前記一方または両基板上の各々のストライプ
状電極群がフォトリソ工程におけるパターン焼付け時に
ストライプの長手方向に対し垂直方向で2つ以上に分割
露光されて形成されたものである液晶表示素子におい
て、前記分割露光による継ぎ目を、対向する基板面上の
ストライプ状電極の2本のストライプ電極間を含む非表
示部に重なり合うように配置したことを特徴とする液晶
表示素子。
1. A pair of substrates facing each other, a pair of stripe-shaped electrodes arranged on the facing surfaces of the substrates so as to intersect with each other when viewed from the display surface, and via the stripe-shaped electrode groups. A liquid crystal driven by an applied voltage, and each stripe-shaped electrode group on one or both of the substrates is divided and exposed into two or more in a direction perpendicular to the longitudinal direction of the stripe during pattern printing in the photolithography process. In the liquid crystal display element formed by the above-mentioned method, the joint by the divided exposure is arranged so as to overlap a non-display portion including between two stripe electrodes of the stripe electrodes on the opposite substrate surface. Liquid crystal display device.
【請求項2】 前記非表示部が、さらに前記ストライプ
電極上および/または近傍に形成された不透明金属部材
の領域を含む請求項1記載の液晶表示素子。
2. The liquid crystal display element according to claim 1, wherein the non-display portion further includes a region of an opaque metal member formed on and / or near the stripe electrode.
【請求項3】 前記不透明金属部材が前記ストライプ電
極の電気抵抗を低減させるためのものである請求項2記
載の液晶表示素子。
3. The liquid crystal display element according to claim 2, wherein the opaque metal member is for reducing the electric resistance of the stripe electrode.
JP29188491A 1991-10-07 1991-10-14 Liquid crystal display device Expired - Fee Related JP2869828B2 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP29188491A JP2869828B2 (en) 1991-10-14 1991-10-14 Liquid crystal display device
US07/956,299 US5285300A (en) 1991-10-07 1992-10-05 Liquid crystal device
DE69216348T DE69216348T2 (en) 1991-10-07 1992-10-06 Liquid crystal device and method for filling the liquid crystal
EP95113126A EP0687936B1 (en) 1991-10-07 1992-10-06 Liquid crystal device and liquid crystal injection method
DE69232242T DE69232242T2 (en) 1991-10-07 1992-10-06 Liquid crystal display device and method for injecting the liquid crystal
EP92117005A EP0536680B1 (en) 1991-10-07 1992-10-06 Liquid crystal device and liquid crystal injection method
AT95113126T ATE209789T1 (en) 1991-10-07 1992-10-06 LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR INJECTING THE LIQUID CRYSTAL
AT92117005T ATE147169T1 (en) 1991-10-07 1992-10-06 LIQUID CRYSTAL DEVICE AND METHOD FOR FILLING THE LIQUID CRYSTAL
US08/145,641 US5406398A (en) 1991-10-07 1993-11-04 Liquid crystal injection method using dummy electrodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29188491A JP2869828B2 (en) 1991-10-14 1991-10-14 Liquid crystal display device

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100472174B1 (en) * 1997-06-18 2005-06-07 삼성전자주식회사 Manufacturing Method of Liquid Crystal Display Using Overlapping Exposure
KR100577775B1 (en) * 1998-06-30 2006-08-03 비오이 하이디스 테크놀로지 주식회사 Method for fabricating thin film transistor array substrate
KR100692683B1 (en) * 2003-08-25 2007-03-14 비오이 하이디스 테크놀로지 주식회사 Method for forming pixel electrode of LCD
JP2008008729A (en) * 2006-06-29 2008-01-17 Hitachi Ltd Manufacturing method of semiconductor device, and semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100472174B1 (en) * 1997-06-18 2005-06-07 삼성전자주식회사 Manufacturing Method of Liquid Crystal Display Using Overlapping Exposure
KR100577775B1 (en) * 1998-06-30 2006-08-03 비오이 하이디스 테크놀로지 주식회사 Method for fabricating thin film transistor array substrate
KR100692683B1 (en) * 2003-08-25 2007-03-14 비오이 하이디스 테크놀로지 주식회사 Method for forming pixel electrode of LCD
JP2008008729A (en) * 2006-06-29 2008-01-17 Hitachi Ltd Manufacturing method of semiconductor device, and semiconductor device

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