JPH05104383A - Linking type reciprocation mechanism for machine tool - Google Patents

Linking type reciprocation mechanism for machine tool

Info

Publication number
JPH05104383A
JPH05104383A JP4430691A JP4430691A JPH05104383A JP H05104383 A JPH05104383 A JP H05104383A JP 4430691 A JP4430691 A JP 4430691A JP 4430691 A JP4430691 A JP 4430691A JP H05104383 A JPH05104383 A JP H05104383A
Authority
JP
Japan
Prior art keywords
moving
pin
link
linear
links
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4430691A
Other languages
Japanese (ja)
Inventor
Hideaki Yanagawa
秀昭 柳川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daisho Seiki Corp
Original Assignee
Daisho Seiki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daisho Seiki Corp filed Critical Daisho Seiki Corp
Priority to JP4430691A priority Critical patent/JPH05104383A/en
Publication of JPH05104383A publication Critical patent/JPH05104383A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To omit a long linear sliding guide surface and a direct acting bearing by providing at least a pair of linking mechanisms comprising Pauslier type strict linear movement mechanism, by connecting the moving pins of both of the linking mechanisms to a linear moving board of a machine tool, and by connecting a driving mechanism of the linear moving board to the linear moving board. CONSTITUTION:At least a pair of linking mechanisms X1 comprising Pauslier type strict linear movement mechanism are provided. The front ends of fourth and sixth links 4, 6 protruded in the reverse direction to the side in which a first fixed pin O1 exists from first and second moving pins B, D, in both linking mechanism X2, are connected to a fourth moving pin A moving on a line. The fourth moving pin A is connected to linear moving boards 23, 40 of a working machine, while a moving mechanism 30 of the linear moving board is connected to the linear moving boards 23, 40 or to the linking mechanism X1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は内面研削盤の砥石に往復
直線運動を与えるホイ−ルヘッドや、工作物(ワ−ク)
に切込み直線運動を与える主軸ヘッド等に適用するのに
適した工作機械のリンク式往復機構に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wheel head for giving a reciprocating linear motion to a grindstone of an inner surface grinding machine, and a work (work).
TECHNICAL FIELD The present invention relates to a link type reciprocating mechanism of a machine tool suitable for application to a spindle head or the like that gives a linear cutting motion to a machine.

【0002】[0002]

【従来の技術】従来の工作機械における往復直線運動案
内機構としては、滑り案内面や直動ベアリングを用いた
物が一般的である。ところが滑り案内面では、滑り部品
が摩耗した場合、長い滑り面及びその上を滑る部品の双
方を再研磨するか或いは新しい部品と交換する必要があ
り、コスト高になりやすい。又摺動面への切削液、切粉
等の浸入を防止するために、テレスコピックカバ−等で
対処してきたが、完全とは言えない。これは直動ベアリ
ングを用いた案内機構の場合も同様である。
2. Description of the Related Art As a reciprocating linear motion guide mechanism in a conventional machine tool, a slide guide surface or a linear motion bearing is generally used. However, in the case of the sliding guide surface, when the sliding component is worn, it is necessary to re-polish both the long sliding face and the component sliding on it, or to replace it with a new component, which is likely to be costly. Also, in order to prevent cutting fluid, chips, etc. from entering the sliding surface, a telescopic cover or the like has been used, but it cannot be said to be perfect. This also applies to a guide mechanism using a linear motion bearing.

【0003】[0003]

【発明の目的】本発明は、長い直線状の滑り案内面や直
動ベアリングを必要としない工作機械のリンク式往復機
構を提供することを目的としている。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a link type reciprocating mechanism for a machine tool which does not require a long linear slide guide surface or a linear motion bearing.

【0004】[0004]

【発明の構成】本発明は、等しい長さの第1、第2リン
ク1、2の基端部を第1固定ピンO1に接続し各先端の
第1、第2移動ピンB、Dにそれぞれ1対の等しい長さ
の第3、第4リンク3、4及び第5、第6リンク5、6
の基端部を接続し、第1、第2移動ピンB、Dより第1
固定ピンO1のある側へ突出した第3、第5リンク3、
5の先端を第3移動ピンCを介して接続しかつそこに第
7リンク7の基端部を接続し、第7リンク7の先端を第
1固定ピンO1と第3移動ピンCの中央の第2固定ピン
O2に接続し、第1、第2移動ピンB、Dより第1固定
ピンO1のある側と反対方向へ突出した第4、第6リン
ク4、6の先端を第4移動ピンAに接続して第4移動ピ
ンAが一直線上を移動するようにしたリンク機構の少な
くとも1対を設けると共に両リンク機構の第4移動ピン
Aを工作機械の直線移動台に接続し、直線移動台又はリ
ンク機構に直線移動台の駆動機構を接続した工作機械の
リンク式往復機構である。
According to the present invention, the base end portions of the first and second links 1 and 2 having the same length are connected to the first fixed pin O1, and the first and second movable pins B and D at the respective tips are respectively connected. A pair of equal length third, fourth links 3, 4 and fifth, sixth links 5, 6
Connect the base ends of the first and second moving pins B and D
The third and fifth links 3, which protrude to the side where the fixing pin O1 is,
5 is connected via the third moving pin C and the base end portion of the seventh link 7 is connected thereto, and the leading end of the seventh link 7 is located at the center of the first fixed pin O1 and the third moving pin C. The tips of the fourth and sixth links 4 and 6 which are connected to the second fixed pin O2 and project in the direction opposite to the side where the first fixed pin O1 is located from the first and second movable pins B and D are the fourth movable pins. At least one pair of link mechanisms connected to A so that the fourth moving pin A moves along a straight line is provided, and the fourth moving pin A of both link mechanisms is connected to the linear moving base of the machine tool to move linearly. It is a link type reciprocating mechanism of a machine tool in which a drive mechanism of a linear moving table is connected to a table or a link mechanism.

【0005】[0005]

【実施例】図3、図4は本発明において使用されるリン
ク機構X1、X2の略図で、このリンク機構はポ−スリ
エ−式厳正直線運動機構として既に周知である。図3に
おいてO1、O2は平行な(紙面と直角な)第1、第2
固定ピンで、位置は不変である。1、2は等しい長さの
第1、第2リンクで、基端部(図の下端部)は第1固定
ピンO1に接続し、それぞれの先端はピンO1と平行な
第1、第2移動ピンB、Dに接続している。第1移動ピ
ンBには長さの等しい第3、第4リンク3、4の基端部
(図の左端部)が接続し、第2移動ピンDにはリンク
3、4と長さの等しい第5、第6リンク5、6の基端部
(図の右端部)がそれぞれ接続している。第3、第5リ
ンク3、5は第1、第2移動ピンB、Dから斜め下方へ
(第1固定ピンO1のある側へ)突出し、ピンO1と平
行な第3移動ピンCを介して第7リンク7の基端部に接
続している。第7リンク7の先端(図の下端)は第1固
定ピンO1と第3移動ピンCの中央の第2固定ピンO2
に接続している。第4、第6リンク4、6は第1、第2
移動ピンB、Dより斜め上方へ突出し、先端はピンO
1、O2と平行な第4移動ピンAに接続している。各ピ
ンの位置関係はO1B=O1D、AB=BC=CD=D
A、O2C=1/2・O1Cとなっている。このリンク
機構に横から力が加わると、第4移動ピンAは直線10
の上を移動する。図4についても同様である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIGS. 3 and 4 are schematic views of the link mechanisms X1 and X2 used in the present invention, which are already known as a poisserie-type strict linear motion mechanism. In FIG. 3, O1 and O2 are first and second parallel (perpendicular to the paper surface)
Fixed pin, position unchanged. Reference numerals 1 and 2 are first and second links having the same length, and the base end portion (the lower end portion in the figure) is connected to the first fixing pin O1 and the respective tip ends are the first and second movements parallel to the pin O1. It is connected to pins B and D. The base ends (left ends in the drawing) of the third and fourth links 3 and 4 having the same length are connected to the first moving pin B, and the second moving pin D has the same length as the links 3 and 4. The base ends of the fifth and sixth links 5 and 6 (the right end in the figure) are connected to each other. The third and fifth links 3 and 5 project obliquely downward (to the side where the first fixed pin O1 is located) from the first and second moving pins B and D, and via the third moving pin C parallel to the pin O1. It is connected to the base end of the seventh link 7. The tip (lower end in the figure) of the seventh link 7 has a first fixing pin O1 and a second fixing pin O2 at the center of the third moving pin C.
Connected to. The fourth and sixth links 4, 6 are the first and second
It projects diagonally upward from the moving pins B and D, and the tip is pin O
1, 4 is connected to the fourth moving pin A parallel to O2. The positional relationship of each pin is O1B = O1D, AB = BC = CD = D
A and O2C = 1/2 · O1C. When force is applied to the link mechanism from the side, the fourth moving pin A moves straight
Move on. The same applies to FIG.

【0006】図1、図2は図3のリンク機構X1を内面
研削盤11に適用した場合を示しており、図3の中の符
号と同一の符号は対応部分である。図1の右半分は、砥
石12を直線10と平行な直線10a上において往復運
動させるための砥石往復機構13に、図3のリンク機構
X1が4個採用され、その内の手前の2個が見えてい
る。図1の左半分は工作物14を紙面と直角方向に(図
2の直線10b上で)往復運動させるための工作物往復
機構15であり、図3のリンク機構X1が4個、共通の
ベッド16上のブラケット17に取り付けてある。図1
右半分の砥石往復機構13のブラケット18もブラケッ
ト17と同様な形状を備え、ベッド16上に固定され、
1対の垂直壁19に両持支持された第1固定ピンO1の
両端部にボ−ルベアリング20を介して第1、第2リン
ク1、2が支持されている。21はリップ付きのオイル
シ−ルである。第2固定ピンO2は両端部が1対の垂直
壁19に支持され、中間部にベアリング20を介して共
通の第7リンク7が支持され、第7リンク7の上端には
第3移動ピンCの中間部がベアリング20を介して支持
され、第3移動ピンCの両端部にはベアリング20を介
して第3、第5リンク3、5が支持されている。第1、
第3リンク1、3の上端は共通の第1移動ピンBの一方
の端部に支持され、第1、第3リンク1、3の間におい
て第1移動ピンB上に第4リンク4の下端部が支持され
ている。第2、第5リンク2、5の上端も共通の第2移
動ピンDの一方の端部に支持され、第2、第5リンク
2、5の間において第2移動ピンD上に第6リンク6の
下端部が支持されている。第4、第6リンク4、6の上
端は共通の第4移動ピンAの一方の端部に支持され、第
4移動ピンAの中間部は砥石台23より下方へ突出した
突起24の孔に嵌合固定されている。図1で見て(第1
固定ピンO1の方向に見て)砥石往復機構13の2個の
第4移動ピンAの移動する直線は直線10上に整列して
いる。しかし両第4移動ピンAの移動する直線は平行で
あってもよい。又充分な剛性が得られるならばリンク機
構X1は1対であってもよい。
FIGS. 1 and 2 show a case where the link mechanism X1 of FIG. 3 is applied to the inner surface grinding machine 11, and the same reference numerals as those in FIG. 3 are corresponding parts. In the right half of FIG. 1, four link mechanisms X1 of FIG. 3 are adopted as the grindstone reciprocating mechanism 13 for reciprocating the grindstone 12 on the straight line 10a parallel to the straight line 10, and two of them are the front two. I can see it. The left half of FIG. 1 is a work reciprocating mechanism 15 for reciprocating the work 14 in a direction perpendicular to the plane of the drawing (on the straight line 10b of FIG. 2), and has four link mechanisms X1 of FIG. 3 and a common bed. It is attached to a bracket 17 on 16. Figure 1
The bracket 18 of the grindstone reciprocating mechanism 13 on the right half has the same shape as the bracket 17, and is fixed on the bed 16.
The first and second links 1 and 2 are supported by ball bearings 20 at both ends of a first fixing pin O1 supported by a pair of vertical walls 19. 21 is an oil seal with a lip. Both ends of the second fixed pin O2 are supported by a pair of vertical walls 19, a common seventh link 7 is supported in the middle by a bearing 20, and a third moving pin C is provided at the upper end of the seventh link 7. Is supported via bearings 20, and the third and fifth links 3 and 5 are supported on both ends of the third moving pin C via bearings 20. First,
The upper ends of the third links 1 and 3 are supported by one end of the common first moving pin B, and the lower end of the fourth link 4 is located on the first moving pin B between the first and third links 1 and 3. The section is supported. The upper ends of the second and fifth links 2 and 5 are also supported by one end of the common second moving pin D, and the sixth link is located on the second moving pin D between the second and fifth links 2 and 5. The lower end of 6 is supported. The upper ends of the fourth and sixth links 4 and 6 are supported by one end of the common fourth moving pin A, and the intermediate portion of the fourth moving pin A is formed in the hole of the protrusion 24 protruding downward from the grindstone base 23. Fitted and fixed. See Figure 1 (first
The moving straight lines of the two fourth moving pins A of the grindstone reciprocating mechanism 13 are aligned with the straight line 10 (as viewed in the direction of the fixed pin O1). However, the moving straight lines of both the fourth moving pins A may be parallel. The link mechanism X1 may be a pair as long as sufficient rigidity is obtained.

【0007】砥石台23は4個のリンク機構X1と干渉
しない側方(図1左半分の工作機往復機構15の左端の
ナット25と同じ位置)にボ−ル循環式のナット25を
備え、このナット25に螺合したボ−ルねじ26の両端
部は軸受箱27内の軸受28に支持され、軸受箱27は
ベッド16と一体の部分に固定されている。ボ−ルねじ
26の一端はカップリング29を介してサ−ボモ−タ−
30に接続し、サ−ボモ−タ−30はベッド16と一体
の部分に取付けてある。砥石台23上にはホイ−ルヘッ
ド31とモ−タ−32が装着され、ホイ−ルヘッド31
の砥石台33に固定されたプ−リ−34とモ−タ−32
のプ−リ−35がベルト36により接続している。37
はカバ−で、砥石12により工作物14を研削する際に
かける研削液の飛沫がリンク機構X1に掛からないよう
に、砥石台23にボルト38により固定されている。
The wheel head 23 is provided with a ball circulation type nut 25 on the side (the same position as the nut 25 at the left end of the machine tool reciprocating mechanism 15 in the left half of FIG. 1) which does not interfere with the four link mechanisms X1. Both ends of the ball screw 26 screwed to the nut 25 are supported by bearings 28 in a bearing box 27, and the bearing box 27 is fixed to a portion integrated with the bed 16. One end of the ball screw 26 is provided with a servo motor through a coupling 29.
The servo motor 30 is attached to the bed 16 and an integral part of the bed 16. A wheel head 31 and a motor 32 are mounted on the grindstone base 23, and the wheel head 31
Pulley 34 and motor 32 fixed to the whetstone base 33
The pulley 35 is connected by a belt 36. 37
Is a cover, which is fixed to the grindstone base 23 by bolts 38 so that the spray of the grinding fluid applied when grinding the workpiece 14 with the grindstone 12 does not splash on the link mechanism X1.

【0008】工作物往復機構15は主軸台40の下方に
図1の右半分と同様なリンク機構X1の4個とその駆動
機構として切込み用のサ−ボモ−タ−41(図2)等を
備え、対応部品は同一の符号を付して示した。主軸台4
0上には主軸ヘッド42とモ−タ−43が装着され、主
軸ヘッド42のプ−リ−44とモ−タ−43のプ−リ−
45はベルト46で接続している。47はチャック、4
8は飛沫よけのカバ−である。
The work reciprocating mechanism 15 has four link mechanisms X1 similar to the right half of FIG. 1 below the headstock 40 and a driving servomotor 41 (FIG. 2) for cutting. The corresponding parts are shown with the same reference numerals. Headstock 4
A spindle head 42 and a motor 43 are mounted on the shaft 0, and a pulley 44 of the spindle head 42 and a pulley 43 of the motor 43 are attached.
45 is connected by a belt 46. 47 is a chuck, 4
8 is a cover to prevent splashes.

【0009】工作物14を砥石12で研削する場合は、
モ−タ−43により工作物14に所定の低い回転(例え
ば500rpm)を与え、同時にモ−タ−32により砥
石12に高速回転(例えば15000rpm)を与え、
サ−ボモ−タ−30により砥石台23に早送りを与えて
砥石12を工作物14に近付け、引き続きそこから砥石
12を緩やかに往復動させ、その状態でサ−ボモ−タ−
41により工作物14に図2の矢印Y方向の切込みを与
え、内面を研削する。所定量の研削が終了すると、砥石
12を後退させる。上記の操作は、図示されていないコ
ントロ−ラによりモ−タ−32、43、サ−ボモ−タ−
30、41を自動制御することにより行われる。作業中
に、砥石12は図1の直線10と平行な直線10a上
を、又工作物14は図2の直線10と平行な直線10b
上を移動する。研削液の飛沫はカバ−37、48の表面
に付着して流れ落ちる。
When the workpiece 14 is ground by the grindstone 12,
The motor 43 imparts a predetermined low rotation (for example, 500 rpm) to the workpiece 14, and at the same time, the motor 32 imparts a high speed rotation (for example, 15000 rpm) to the grindstone 12.
A rapid feed is applied to the grindstone base 23 by the servomotor 30 to bring the grindstone 12 closer to the workpiece 14, and then the grindstone 12 is gently reciprocated from there, and in that state, the servomotor.
The workpiece 14 is cut by 41 in the direction of the arrow Y in FIG. 2 to grind the inner surface. When a predetermined amount of grinding is completed, the grindstone 12 is retracted. The above operation is performed by a controller (not shown) for the motors 32 and 43 and the servo motor.
This is performed by automatically controlling 30, 41. During work, the grindstone 12 is on a straight line 10a parallel to the straight line 10 of FIG. 1, and the workpiece 14 is a straight line 10b parallel to the straight line 10 of FIG.
Move up. The splash of grinding fluid adheres to the surfaces of the covers 37 and 48 and flows down.

【0010】[0010]

【発明の効果】以上説明したように、本発明ではポ−ス
リエ−式厳正直線運動機構を工作機械の砥石台23、主
軸台40のような直線移動台に組合せて適用したので、
長期間の使用によりリンクの揺動部(ピンとの回動接続
部)が摩耗した場合でも、ボ−ルベアリング20のよう
な安価な軸受を交換するだけで、初期の運動精度を回復
することができる。又オイルシ−ル21を組合せること
により、切削液、切粉等の浸入に対しても、容易にかつ
完全に防御することが可能となり、従って大量の切削液
をかけることができる。製造コストについても、研磨、
摺り合わせを必要とせず、かつリンク部品の同時加工も
可能であり、大幅なコストダウンが期待できる。第2固
定ピンO2の部分で例えば第7リンク7にサ−ボモ−タ
− 接続して回転力を与えるようにすれば、サ−ボモ−
タ−30を省略することもできる。
As described above, in the present invention, the poislier type strict linear motion mechanism is applied in combination with the linear moving base such as the grindstone head 23 and the headstock 40 of the machine tool.
Even if the rocking part (rotating connection part with the pin) of the link is worn due to long-term use, the initial motion accuracy can be restored by simply replacing an inexpensive bearing such as the ball bearing 20. .. Also, by combining the oil seal 21, it is possible to easily and completely protect against intrusion of cutting fluid, cutting chips, etc., and therefore a large amount of cutting fluid can be applied. As for manufacturing cost, polishing,
Since it is possible to process link parts at the same time without the need for rubbing, a significant cost reduction can be expected. For example, if the second fixing pin O2 is connected to the seventh link 7 by a servo motor so as to give a rotational force, the servo motor can be operated.
It is also possible to omit the counter 30.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明を内面研削盤に適用した場合の一部縦断
側面図である。
FIG. 1 is a partial vertical cross-sectional side view when the present invention is applied to an internal grinding machine.

【図2】図1のII−II矢視図である。FIG. 2 is a view taken along the line II-II in FIG.

【図3】ポ−スリエ−式厳正直線運動機構の一例を示す
略図である。
FIG. 3 is a schematic view showing an example of a Poslier-type strictly linear motion mechanism.

【図4】ポ−スリエ−式厳正直線運動機構の別の一例を
示す略図である。
FIG. 4 is a schematic view showing another example of a Poslier-type strictly linear motion mechanism.

【符号の説明】[Explanation of symbols]

1 第1リンク 2 第2リンク 3 第3リンク 4 第4リンク 5 第5リンク 6 第6リンク 7 第7リンク 10 直線 23 砥石台(直線移動台) 30 サ−ボモ−タ−(駆動機構) 40 主軸台(直線移動台) 41 サ−ボモ−タ−(駆動機構) A 第4移動ピン B 第1移動ピン C 第3移動ピン D 第2移動ピン 1 1st link 2 2nd link 3 3rd link 4 4th link 5 5th link 6 6th link 7 7th link 10 Straight line 23 Grinding stone stand (straight moving stand) 30 Servo motor (driving mechanism) 40 Headstock (straight moving table) 41 Servo motor (driving mechanism) A 4th moving pin B 1st moving pin C 3rd moving pin D 2nd moving pin

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】等しい長さの第1、第2リンク1、2の基
端部を第1固定ピンO1に接続し各先端の第1、第2移
動ピンB、Dにそれぞれ1対の等しい長さの第3、第4
リンク3、4及び第5、第6リンク5、6の基端部を接
続し、第1、第2移動ピンB、Dより第1固定ピンO1
のある側へ突出した第3、第5リンク3、5の先端を第
3移動ピンCを介して接続しかつそこに第7リンク7の
基端部を接続し、第7リンク7の先端を第1固定ピンO
1と第3移動ピンCの中央の第2固定ピンO2に接続
し、第1、第2移動ピンB、Dより第1固定ピンO1の
ある側と反対方向へ突出した第4、第6リンク4、6の
先端を第4移動ピンAに接続して第4移動ピンAが一直
線上を移動するようにしたリンク機構の少なくとも1対
を設けると共に両リンク機構の第4移動ピンAを工作機
械の直線移動台に接続し、直線移動台又はリンク機構に
直線移動台の駆動機構を接続した工作機械のリンク式往
復機構。
1. A pair of equal ends of the first and second links 1 and 2 are connected to the first fixed pin O1 and are connected to the first and second movable pins B and D respectively. Third and fourth of length
The base ends of the links 3 and 4 and the fifth and sixth links 5 and 6 are connected to each other, and the first fixed pin O1 is connected to the first and second moving pins B and D.
The third and fifth links 3 and 5 projecting toward the side of the third link 7 are connected to each other via the third moving pin C, and the base end of the seventh link 7 is connected thereto. First fixing pin O
4th and 6th links which are connected to the second fixed pin O2 at the center of the 1st and 3rd moving pins C, and which project in the direction opposite to the side where the 1st fixed pin O1 is located from the 1st and 2nd moving pins B and D At least one pair of link mechanisms in which the tip ends of 4 and 6 are connected to the fourth moving pin A so that the fourth moving pin A moves in a straight line are provided, and the fourth moving pin A of both link mechanisms is machine tool. Link type reciprocating mechanism of a machine tool, which is connected to the linear moving base and the driving mechanism of the linear moving base is connected to the linear moving base or the link mechanism.
JP4430691A 1991-02-15 1991-02-15 Linking type reciprocation mechanism for machine tool Pending JPH05104383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4430691A JPH05104383A (en) 1991-02-15 1991-02-15 Linking type reciprocation mechanism for machine tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4430691A JPH05104383A (en) 1991-02-15 1991-02-15 Linking type reciprocation mechanism for machine tool

Publications (1)

Publication Number Publication Date
JPH05104383A true JPH05104383A (en) 1993-04-27

Family

ID=12687811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4430691A Pending JPH05104383A (en) 1991-02-15 1991-02-15 Linking type reciprocation mechanism for machine tool

Country Status (1)

Country Link
JP (1) JPH05104383A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010040956A (en) * 2008-08-08 2010-02-18 Tokyo Electron Ltd Substrate processing apparatus
CN104741987A (en) * 2015-04-20 2015-07-01 绵阳市弘盛磁材设备有限公司 Inner and outer arc type bi-directional automatic chamfering machine for tegular magnet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010040956A (en) * 2008-08-08 2010-02-18 Tokyo Electron Ltd Substrate processing apparatus
CN104741987A (en) * 2015-04-20 2015-07-01 绵阳市弘盛磁材设备有限公司 Inner and outer arc type bi-directional automatic chamfering machine for tegular magnet

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