JPH0499269U - - Google Patents

Info

Publication number
JPH0499269U
JPH0499269U JP9363591U JP9363591U JPH0499269U JP H0499269 U JPH0499269 U JP H0499269U JP 9363591 U JP9363591 U JP 9363591U JP 9363591 U JP9363591 U JP 9363591U JP H0499269 U JPH0499269 U JP H0499269U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9363591U
Other languages
Japanese (ja)
Other versions
JPH0742530Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9363591U priority Critical patent/JPH0742530Y2/ja
Publication of JPH0499269U publication Critical patent/JPH0499269U/ja
Application granted granted Critical
Publication of JPH0742530Y2 publication Critical patent/JPH0742530Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Weting (AREA)
JP9363591U 1990-10-19 1991-10-18 浸漬型基板処理装置 Expired - Lifetime JPH0742530Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9363591U JPH0742530Y2 (ja) 1990-10-19 1991-10-18 浸漬型基板処理装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10982390 1990-10-19
JP2-109823 1990-10-19
JP9363591U JPH0742530Y2 (ja) 1990-10-19 1991-10-18 浸漬型基板処理装置

Publications (2)

Publication Number Publication Date
JPH0499269U true JPH0499269U (enExample) 1992-08-27
JPH0742530Y2 JPH0742530Y2 (ja) 1995-10-04

Family

ID=31948776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9363591U Expired - Lifetime JPH0742530Y2 (ja) 1990-10-19 1991-10-18 浸漬型基板処理装置

Country Status (1)

Country Link
JP (1) JPH0742530Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006153677A (ja) * 2004-11-30 2006-06-15 Dainippon Screen Mfg Co Ltd 差圧式流量計、流量制御装置および基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006153677A (ja) * 2004-11-30 2006-06-15 Dainippon Screen Mfg Co Ltd 差圧式流量計、流量制御装置および基板処理装置

Also Published As

Publication number Publication date
JPH0742530Y2 (ja) 1995-10-04

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term