JPH0498166A - Burn-in test device and burn-in test method - Google Patents
Burn-in test device and burn-in test methodInfo
- Publication number
- JPH0498166A JPH0498166A JP2216797A JP21679790A JPH0498166A JP H0498166 A JPH0498166 A JP H0498166A JP 2216797 A JP2216797 A JP 2216797A JP 21679790 A JP21679790 A JP 21679790A JP H0498166 A JPH0498166 A JP H0498166A
- Authority
- JP
- Japan
- Prior art keywords
- burn
- temperature
- test
- board
- oven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 46
- 238000010998 test method Methods 0.000 title claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はICのバーンイン・テスl〜装置及びバーンイ
ン・テスト方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an IC burn-in test device and a burn-in test method.
従来、ICのバーンイン・テストを行うときは、バーン
イン・テスト装置の恒温槽の中に複数枚のバーンイン・
ボードを実装し、高音あるいは低温下にて試験を行なっ
ていた。そして一定時間経過後に恒温槽から目的のバー
ンイン・ボードを取り出し、バーンイン・ボード上のI
Cを個々にICテスタで特性を測定していた。Conventionally, when performing IC burn-in tests, multiple burn-in chips are placed in a constant temperature chamber of burn-in test equipment.
The board was mounted and tested under high-temperature or low-temperature conditions. Then, after a certain period of time has elapsed, remove the target burn-in board from the thermostatic chamber and
The characteristics of C were measured individually using an IC tester.
上述した従来のバーンイン・テスト装置は、1台の恒温
槽の中に複数枚のバーンイン・ボードを実装して試験し
ているので、複数枚のバーンイン・ボード中から1枚あ
るいは1部のバーンイン・ボードを取り出しボードに実
装されているICの特性を測定する際、恒温槽内の温度
を常温に戻してからバーンイン・ボードを取り出さなけ
ればならず、バーンイン・テストの効率が悪くなるとい
う欠点がある。The above-mentioned conventional burn-in test equipment tests multiple burn-in boards mounted in one constant temperature chamber, so one burn-in board or part of the burn-in boards is tested. When taking out the board and measuring the characteristics of the IC mounted on the board, it is necessary to return the temperature in the thermostatic chamber to room temperature before taking out the burn-in board, which has the disadvantage of reducing the efficiency of the burn-in test. .
恒温槽内の温度を常温にしてからバーンインボードを取
り出す事の意味について以下に記す。The meaning of removing the burn-in board after bringing the temperature inside the constant temperature oven to room temperature is described below.
例えばイオン汚染の不良モードは、高温動作時に不良現
象が現れ、高温保管(不動作)で回復してしまう。この
種の不良モードの回復を抑えるため、高温保管にならな
いように、ICを動作させながらICの温度を常温に戻
した後、恒温槽から取り出す必要がある。For example, in the failure mode of ion contamination, failure phenomena appear during high-temperature operation and are recovered by high-temperature storage (non-operation). In order to suppress recovery from this type of failure mode, it is necessary to return the temperature of the IC to room temperature while operating the IC, and then take it out from the thermostat to prevent it from being stored at high temperatures.
本発明のバーンイン・テスト装置は、被試験ICを搭載
したバーンイン・ボードを実装し所定温度に加熱または
冷却する恒温槽と、前記恒温槽の外′部に設けられ前記
バーンイン・ボードを常温さらし状態で実装する常温ユ
ニットと、前記恒温槽及び前記常温ユニットに実装され
た前記バーンイン・ボード上の被試験ICの電気的試験
を行うテスト回路とを備えている。The burn-in test device of the present invention includes a constant temperature bath in which a burn-in board carrying an IC under test is mounted and heated or cooled to a predetermined temperature, and a constant temperature bath provided outside the constant temperature bath to expose the burn-in board to room temperature. and a test circuit for electrically testing the IC under test on the burn-in board mounted on the constant temperature oven and the room temperature unit.
本発明のバーンイン・テスト装置は、上記バーンイン・
テスト装置の恒温槽に被試験ICを搭載したバーンイン
・ボードを実装し、所定温度にて前記被試験ICの電気
的試験を行い、障害が検出された被試験ICを搭載する
バーンイン・ボードのみを前記恒温槽から前記常温ユニ
ットに移し、前記恒温槽内のバーンイン・ボードは所定
温度に維持したままで、前記常温ユニットに実装された
バーンイン・ボードのみを常温に戻しながら電気的試験
を続行し、前記障害が検出された被試験ICを動作させ
ながら常温に戻すことを特徴とする。The burn-in test device of the present invention includes the burn-in test device described above.
A burn-in board with an IC under test mounted on it is mounted in a constant temperature chamber of a test equipment, and an electrical test is performed on the IC under test at a predetermined temperature. Transferred from the constant temperature oven to the room temperature unit, and continuing the electrical test while returning only the burn-in board mounted in the room temperature unit to room temperature while maintaining the burn-in board in the constant temperature oven at a predetermined temperature, The method is characterized in that the IC under test in which the fault has been detected is returned to room temperature while being operated.
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第1図は本発明のバーンイン・テスト装置の一実施例の
模式的構成図である。バーンイン・テスト装置1は、恒
温槽2と常温ユニット4とを有し、それらに被試験IC
を搭載したバーンイン・ボード3を装着して、テスト回
路(図示せず)により試験を行う。FIG. 1 is a schematic diagram of an embodiment of the burn-in test apparatus of the present invention. The burn-in test device 1 has a constant temperature bath 2 and a room temperature unit 4, and the IC under test is attached to them.
The burn-in board 3 equipped with this is installed, and a test is performed using a test circuit (not shown).
恒温槽2内で通常の高温または低温のバーンイン・テス
トを行い、ICテスタにて特性を測定する際には、恒温
槽2より目的のバーンイン・ボード3を取り出し、常温
ユニット4へ装着し、しばらく常温さらしの状態で被試
験ICを動作させ、ICが常温になった後に、常温ユニ
ット4から取り出し、ICテスタにて特性を測定する。When performing a normal high or low temperature burn-in test in the constant temperature chamber 2 and measuring the characteristics with an IC tester, take out the target burn-in board 3 from the constant temperature chamber 2, attach it to the room temperature unit 4, and leave it for a while. The IC to be tested is operated while exposed to room temperature, and after the IC reaches room temperature, it is taken out from the room temperature unit 4 and its characteristics are measured with an IC tester.
以上説明したように本発明は、恒温槽の外に常温状態で
バーンイン・ボード上のICを動作させる事ができる常
温ユニットを設けることにより、恒温槽から取り出した
バーンイン・ボードを常温ユニットで動作させながら被
試験ICを常温にすることができる。これにより、恒温
槽内の温度を常温に戻すことなく、目的のバーンイン・
ボード(被試験IC)のみを動作させた状態で常温に戻
すことができる効果がある。As explained above, the present invention provides a room-temperature unit that can operate the ICs on the burn-in board at room temperature outside the constant-temperature oven. However, the IC under test can be brought to room temperature. This allows you to achieve the desired burn-in without returning the temperature inside the thermostat to room temperature.
This has the effect of allowing the board (IC under test) to return to room temperature while only operating.
第1図は本発明のバーンイン・テスト装置の模式的構成
図である。
1・・・バーンイン・テスト装置、2・・・恒温槽、3
・・・バーンイン・ボード、4・・・常温ユニット。FIG. 1 is a schematic diagram of a burn-in test device according to the present invention. 1... Burn-in test device, 2... Constant temperature chamber, 3
...Burn-in board, 4...Normal temperature unit.
Claims (1)
所定温度に加熱または冷却する恒温槽と、前記恒温槽の
外部に設けられ前記バーンイン・ボードを常温さらし状
態で実装する常温ユニットと、前記恒温槽及び前記常温
ユニットに実装された前記バーンイン・ボード上の被試
験ICの電気的試験を行うテスト回路とを備えたことを
特徴とするバーンイン・テスト装置。 2、請求項1記載のバーンイン・テスト装置の恒温槽に
被試験ICを搭載したバーンイン・ボードを実装し、所
定温度にて前記被試験ICの電気的試験を行い、障害が
検出された被試験ICを搭載するバーンイン・ボードの
みを前記恒温槽から前記常温ユニットに移し、前記恒温
槽内のバーンイン・ボードは所定温度に維持したままで
、前記常温ユニットに実装されたバーンイン・ボードの
みを常温に戻しながら電気的試験を続行し、前記障害が
検出された被試験ICを動作させながら常温に戻すこと
を特徴とするバーンイン・テスト方法。[Claims] 1. A constant temperature bath in which a burn-in board carrying an IC under test is mounted and heated or cooled to a predetermined temperature, and a constant temperature bath provided outside the constant temperature bath to mount the burn-in board in a state where it is exposed to room temperature. A burn-in test device comprising: a room temperature unit; and a test circuit for electrically testing an IC under test on the burn-in board mounted on the constant temperature oven and the room temperature unit. 2. A burn-in board carrying an IC under test is mounted in a constant temperature chamber of the burn-in test apparatus according to claim 1, and an electrical test is performed on the IC under test at a predetermined temperature, and a failure is detected. Only the burn-in board on which the IC is mounted is transferred from the constant temperature oven to the room temperature unit, and while the burn-in board in the oven is maintained at a predetermined temperature, only the burn-in board mounted on the room temperature unit is brought to room temperature. A burn-in test method characterized by continuing an electrical test while returning the IC to normal temperature while operating the IC under test in which the fault has been detected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2216797A JPH0498166A (en) | 1990-08-17 | 1990-08-17 | Burn-in test device and burn-in test method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2216797A JPH0498166A (en) | 1990-08-17 | 1990-08-17 | Burn-in test device and burn-in test method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0498166A true JPH0498166A (en) | 1992-03-30 |
Family
ID=16694032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2216797A Pending JPH0498166A (en) | 1990-08-17 | 1990-08-17 | Burn-in test device and burn-in test method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0498166A (en) |
-
1990
- 1990-08-17 JP JP2216797A patent/JPH0498166A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7183784B2 (en) | Integrated circuit burn-in test system and associated methods | |
US4374317A (en) | Burn-in chamber | |
EP0649031A2 (en) | Apparatus for and method of testing of semiconductor components | |
GB1523060A (en) | Printed circuit board tester | |
JPH0552903A (en) | Device for testing semiconductor integrated circuit | |
JPH0498166A (en) | Burn-in test device and burn-in test method | |
JP4970640B2 (en) | Screening method, screening apparatus and recording medium | |
JPH0774218A (en) | Test method of ic and its probe card | |
KR101336345B1 (en) | A device for controlling event signal of module unit test in the semiconductor test systems | |
US2464213A (en) | Apparatus for testing materials | |
SU1596288A1 (en) | Method of checking reliability of integrated circuits | |
Chien et al. | Strategy for automatic testing by circuit understanding | |
JPH0328779A (en) | Reliability testing method for semiconductor device | |
JP4062424B2 (en) | Memory test system and memory test method | |
JPS63204176A (en) | Reliability evaluation tester for semiconductor | |
JPS5842917Y2 (en) | Test input circuit for resistance temperature detector input loop | |
KR100629366B1 (en) | Alarm apparatus of heating equipment for semiconductor device and the alarm method using the same | |
JPH0150872B2 (en) | ||
JPS63156331A (en) | Reliability evaluation element for thin film wiring and reliability evaluation of thin film wiring | |
JPH05157820A (en) | Semiconductor device failure diagnostic method | |
JPH0452580A (en) | Burn-in device | |
JP2005101387A (en) | Wafer burn-in apparatus | |
TW201616147A (en) | Detect hot switch method for a semiconductor integrated circuit tester | |
JPH01263569A (en) | Apparatus for inspecting semiconductor integrated circuit element | |
JPH04194679A (en) | Method for measuring characteristics of semiconductor device |