JPH0498073A - Temperature controller for liquid cooler - Google Patents

Abstract

PURPOSE:To reduce mechanical displacement generated in an operating part and improve working accuracy by a method wherein the title controller is provided with a temperature setter, for setting the temperature of cooling liquid, a liquid temperature detector, detecting the temperature of cooling liquid, a capacity control means, controlling the capacity of a compressor, and a feedback control means, controlling the output of the capacity control means so that a cooling liquid temperature converges to the set value based on the detecting result of the liquid temperature detector. CONSTITUTION:When the operating condition of a machine tool 1 is changed during control effected by a feedback control means 11, a setting valve changing signal is outputted from a set valve changing means 12 based on the output of an operating condition outputting means 9 and a set value, set in a setter 6, is changed. An inverter 10 is controlled based on the changed set value and the capacity control of a compressor 21 is effected. A cooling liquid temperature in a circulating circuit is controlled by effecting the capacity control of the compressor 21 based on the changed set value, changed by the setter 6, in such a manner. The working accuracy of the machine tool can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a temperature control device for a liquid cooling device that uses a refrigeration circuit to control the temperature of a coolant that mainly cools equipment to be cooled such as a machine tool.

(Prior Art) Conventionally, as a liquid cooling device for use in machine tools, etc., the one shown in Japanese Patent Laid-Open No. 2-104994 and shown in FIG. 7 has been proposed. This conventional device uses a refrigeration circuit (2) equipped with a compressor (21), a condenser (22), a pressure reduction mechanism (23), and an evaporator (24), and the evaporator ( A liquid circulation circuit (3) is piped between the cooling device (1) such as the machine tool and the like, and a circulation pump (4) installed in the circulation circuit (3) cools the evaporator (24). ) to the cooling liquid cooled by the equipment to be cooled (
1) to cool the equipment to be cooled (1). Further, the liquid cooling device includes:
It is equipped with a temperature side ariz for controlling the temperature of the coolant, that is, a liquid temperature detector (7) for detecting the temperature of the coolant circulated through the circulation circuit (3), and a liquid temperature detector (7) for detecting the air temperature. an air temperature detector (8) and the cooled equipment (1);
); an inverter (10) for controlling the capacity of the compressor (21); and a load roller (5). The liquid temperature sensor (
Based on the detection results of 7) and the air temperature detector (8),
Feedback control means for controlling the output of the inverter (10) so that the coolant temperature converges to a set value;
A frequency changing means for changing the frequency of the inverter (10) using an external command signal from the operating state detecting means (9o) is provided.

Therefore, the liquid temperature sensor (7) and the air temperature sensor (
8), the frequency of the inverter (10) is controlled so that the coolant circulating through the liquid circulation circuit (3) converges to a set value by the output from the feedback control means based on the detection result of In this way, the capacity of the compressor (21) can be controlled, and during control by the feedback control means as described above, the capacity of the cooled equipment (1) can be controlled.
When the operating state of the inverter (1o) changes and the amount of change exceeds a certain value, based on the output from the operating state detecting means (9o) (based on the output from the frequency changing means) The frequency of the compressor (21) can be changed without causing a control delay due to feedback control or without causing hunting.
As a result, the temperature of the coolant can be controlled with high accuracy.

(Problem H to be Solved by the Invention) When a place controls the temperature of the cooling liquid using the above-described temperature control device, the temperature control can be performed accurately. It has been found that even if the temperature of the coolant is accurately controlled, a large mechanical displacement occurs in the main shaft and other operating parts of the device to be cooled (1).

That is, when working on the cooled equipment (1) side,
Even if the temperature of the coolant circulating through the liquid circulation circuit (3) is accurately and stably controlled, large mechanical thermal displacements occur in the operating parts of the cooled equipment (1).
It has been found that there is a problem in which the machining accuracy decreases.

Therefore, we investigated the phenomenon in which a large thermal displacement occurs in the actuating part even though the temperature of the coolant is stably controlled, and found that it is correlated with the rotational speed of the actuating part.

That is, the rotation speed of the operating section is set to a low speed (for example, 1000 rotations).
Thermal displacement in the two axial directions (axial direction) of the main spindle and the Y-axis direction perpendicular to the moving direction of the workpiece and high-speed rotation (for example, the Z-axis direction and the Y-axis direction when the speed is 6000 rpm>) When we investigated the thermal displacement of
They discovered that when moving from low-speed rotation to high-speed rotation as shown in (e) and (g), the thermal displacement increases, and the thermal displacement is nearly twice as large as the thermal displacement during low-speed rotation.

As described above, the present invention is based on the new knowledge that the thermal displacement of the operating part changes in correlation with the rotation speed thereof, and the present invention enables the thermal displacement to be reduced. A liquid cooling device that can more accurately perform the following steps in accordance with the operating state of the cooling device, reduce mechanical displacement generated in the operating portion of the device to be cooled, and improve machining accuracy. An object of the present invention is to provide a temperature control device.

(Means for Solving the Problems) The present invention includes a liquid circulation circuit (3) that circulates a cooling liquid to a device to be cooled (1), a compressor (21) whose capacity can be controlled, a condenser (22), a decompression In a temperature control device for a liquid cooling device comprising a mechanism (23) and a refrigeration circuit (2) having an evaporator (24) for cooling the cooling liquid of the liquid circulation circuit (3), the temperature of the cooling liquid is controlled. Temperature setting device (
6), and a liquid temperature detector (
7), a capacity control means for controlling the capacity of the compressor (21), and a capacity control means for controlling the coolant temperature to converge to a set value based on the detection result of the liquid temperature detector (7). a feedback control means for controlling the output of the cooled device (1), an operating state output means for outputting the operating state of the cooled equipment (1), and a set value changing means for changing the set value based on the output from the operating state output means. It is characterized by having the following.

As the operating state output means, the cooled equipment (1)
It is desirable to include a rotation speed detection sensor that detects and outputs the rotation speed of the main shaft.

Further, the operating state output means may include a temperature detection sensor that detects and outputs the temperature of the operating section of the cooled device (1).

Further, the operating state output means may include a displacement detection sensor that detects and outputs the mechanical displacement of the operating portion of the cooled device (1).

(Function) When the equipment to be cooled (1) is in operation, the refrigeration circuit (2
) The cooling liquid cooled by the evaporator (24) is supplied to the cooled equipment (1) side through the liquid circulation circuit (3), cools the cooled equipment (1), and raises the temperature. The cooled liquid is returned to the evaporator (24) and cooled again, and the equipment to be cooled (1) is cooled by the circulation of the cooled liquid.

Further, the device to be cooled (1) using the above-mentioned cooling liquid
When cooling, the temperature of the cooling liquid is detected by the liquid temperature detector (7), and this detected value and the temperature setting device (6)
The capacity control means is controlled so that the coolant temperature converges to the set value by an output from the feedback control means based on the comparison result, and the compressor (21) Further, when the operating state of the cooled equipment (1) changes during control by the feedback control means, the set value is adjusted based on the output from the operating state output means. The setting value set by the setting device (6) is changed by the changing means, and the capacity control means is controlled based on the changed setting value, so that the capacity of the compressor (21) is controlled. temperature is then controlled to the new set point. As described above, the set value by the setting device (6) is changed, and the compressor (21) is changed based on this changed set value.
), and by controlling the temperature of the cold liquid in the circulation circuit (3), the cooled equipment (1) is accurately and quickly cooled in accordance with its operating state, and the The mechanical displacement generated in the operating part of the device (1) can be reduced, and the machining accuracy can be improved.

When the operating state output means includes a rotation speed detection sensor that detects and presses the rotation speed of the main shaft of the cooled device (1), it becomes possible to change the set value in synchronization with the change in the rotation speed, and therefore Not only is the configuration of the set value changing means simplified, but the operation of the capacity control means can be controlled without response delay, and mechanical displacement in the operating section can be further reduced.

Further, as the operating state output means, the cooled equipment (
When a temperature detection sensor that detects and outputs the temperature of the actuating part in 1) is provided, the set value can be changed in synchronization with the temperature change of the actuating part, and the controllability of the capacity control means is improved accordingly. It can be done.

Furthermore, as the operating state output means, the cooled equipment (
When a displacement detection sensor that detects and outputs the mechanical displacement of the actuating part in 1) is provided, the set value can be changed to match the mechanical displacement of the actuating part, so that the controllability of the capacity control means is improved. It can be done well.

(Example) Below, the temperature side MJ device of the liquid cooling device according to the present invention is as follows:
This will be explained based on FIGS. 1 and 2. In each figure, the same components as those in FIG. 7 described above will be described with the same reference numerals.

In Figures 1 and 2, (1) is a machine tool shown as an example of equipment to be cooled, and includes a main shaft (la) to which a drill, a milling blade, etc. is attached to the tip, and a thermal load generated on the main shaft (1a). It is provided with a coolant pipe (1b) that circulates the coolant in order to remove the coolant and keep the temperature constant, and a reservoir (1c) that receives the coolant. Note that (ld) is a control panel for controlling the operation of the machine tool (1).

(2) is a refrigeration circuit for cooling the main shaft (1a) of the machine tool (1), and a compressor (2) whose capacity can be controlled.
21), condenser (22), pressure reduction mechanism (23), and evaporator (
24) and an accumulator (25), a liquid circulation circuit (3) is provided between the evaporator (24) and the liquid pipe (1b) of the machine tool (1), and the liquid circulation circuit (3) is provided with a liquid circulation circuit (3).
) by means of a circulation pump (4) interposed in the evaporator (2
The coolant cooled in step 4) is circulated to the machine tool (1) to cool the machine tool (1).

The compression 4!1 (21) may be one in which capacity is controlled by an inverter, which will be described later, or one in which capacity is controlled by providing a bypass path between the suction side and the discharge side and controlling the opening and closing of the bypass path. You can use the following.

In the above liquid cooling device, the liquid circulation circuit (
3) A temperature control device is provided to control the temperature of the circulating coolant. That is, this temperature control git is
A setter (6) for setting the temperature of the coolant circulated through the liquid circulation circuit (3) is provided on the input side of the controller (5), and a setting device (6) for setting the temperature of the coolant circulated through the liquid circulation circuit (3); 3)
a liquid temperature detector (7) that detects the outlet side temperature of the coolant to the machine tool (1), an air temperature detector (8) that detects the air temperature, and outputs the operating state of the machine tool (1). A capacity control means (hereinafter referred to as an inverter) mainly consisting of an inverter for controlling the capacity of the compressor (21) is connected to the output side of the controller (5). 10
) is connected, and the capacity of the compressor (21) is controlled by changing the output from the inverter (10), thereby controlling the evaporation capacity of the evaporator (24), that is, the coolant temperature of the circulation circuit (3). On the other hand, the controller (5) controls the circulation circuit (3) based on the detection results of the liquid temperature detector (7) and the air temperature detector (8).
the inverter (10) so that the temperature of the coolant circulated through the inverter (10) converges to the set value set by the setting device (6).
feedback control means (11) for controlling the output of;
The setting device (
A set value changing means (12) for changing the set value according to 6) is provided.

The inverter (10
) controls the frequency of the compressor (21) at a frequency of 0 to 120 (Hz) in steps of 0 to 10, as shown in Table 1 below.

Table 1 In addition, the controller (5) is equipped with an interface circuit that uses 4-bit signals arranged at addresses "1" to "4" shown in Table 2 below for control purposes. The compressor (
21) are controlled in various ways.

Table 2 In Table 2 above, (-) means that the value of the external command signal is (0
) or (1), that is, for example, when the spindle (1a) is supercooled, from addresses "2" and "4" to (1).
When the output signal (1) is output, the address rl
The compressor (21) is stopped regardless of the external command signal input to r3J.

When the machine tool (1) is in operation, the liquid temperature@pressure device (7) and air detector (8) determine the outlet side temperature (TO) of the circulation circuit (3) for the machine tool (1).
) and the air temperature (TA) are detected, and the deviation ΔT=TO−TA of each of these temperatures is compared with the set value (TS) by the temperature setting device (5), and the feedback control is performed based on the comparison result. The output from the means (11) causes the inverter (10
) is performed on the compressor (21), and feedback control is performed so that the temperature of the coolant circulating through the circulation circuit (3) is converged to the set value (TS).

In addition, the above feedback control is based on the deviation ΔT=TO-TA and the temperature setting device (5), as shown in Table 3 below.
Ten temperature zones are set at intervals of 0.5"C according to the comparison value with the set value (TS), and the frequency (f
).

Table 3 As is clear from Table 3 above, the deviation ΔT=To−T
When the comparison value between A and the set value (TS) by the temperature setting device (5) is in the temperature zones O-U and 0-L, that is, in the range of TS ± 0.5°C, When it is determined that the inverter (10) is in the stable region, the frequency control of the inverter (10) is not performed, and when TS becomes 0.5°C or more, 10)
(Frequency control is performed by adding z at a time, and TS is 0.
When the temperature drops below 5°C, frequency control is performed by subtracting 10Hz.

Furthermore, when the operating state of the machine tool (1) changes during control by the feedback control means (11), based on the output from the operating state output means (9),
A set value change signal is output from the set value changing means (12), and the set value (TS) by the setter (6) is changed. In other words, the standard setting value (TS) in Table 3 is changed, and the inverter (TS) is changed based on this changed setting value.
10) is controlled to control the capacity of the compressor (21). As described above, the set value by the setting device (6) is changed, and the compressor (21) is changed based on this changed set value.
) of the main shaft (1) of the machine tool (1) by controlling the coolant temperature of the circulation circuit (3).
a) is cooled accurately and quickly, the mechanical thermal displacement generated in the spindle (1a) is reduced, and the machining accuracy is improved.

The operating state output means (9) includes the machine tool (
For example, a rotation speed detection sensor that detects the rotation speed of the main shaft (1a) in 1) based on the current value of the main shaft motor (m) is used to output the rotation speed to the set value changing means (12) side. Therefore, when using such a detection sensor (9), the set value (TS) is changed in synchronization with the change in rotation speed.
This not only simplifies the configuration of the set value changing means (12) that changes the set value (TS), but also enables quick control of the inverter (10) with good responsiveness. .

That is, the present invention has discovered that the mechanical thermal displacement of the main shaft (1a) has a correlation with the rotation speed of the main shaft (1a), and based on this new recognition, the mechanical thermal displacement of the main shaft (1a) has a correlation with the rotation speed of the main shaft (1a). By detecting the operating state of the main shaft (1a), changing the set value of the temperature at which the cooling liquid is cooled, and performing feedback control of the inverter (10) based on the changed set value (TS), This makes it possible to suppress thermal displacement of the main shaft (1a) to a minimum.

This point will be explained in more detail based on FIG.

FIG. 3 shows a change in the amount of thermal displacement of the main shaft (1a) in the machine tool (1) when the rotation speed of the main shaft (1a) is changed while the temperature of the coolant is controlled. In FIG. 3, (a) shows an operation pattern in which the spindle (1a) is changed between 1000 rotations (rpm) and 6000 rotations every hour, and (b) shows the detection sensor (1a). 9) shows the change state of the set value changed by the set value changing means (12) based on the output from the set value, and (c) shows the temperature at the outlet side of the liquid circulation circuit (3) due to the change of the set value. It shows change. Further, the solid line (d) shows the thermal displacement (μm) in the Z-axis direction of the main shaft (1a) according to the present invention, and the dotted line (e) shows the thermal displacement in the Z-axis direction of the main shaft (1a) according to the conventional example. Further, the solid line (F) represents the thermal displacement (μm) in the Y-axis direction of the main shaft (1a) according to the present invention, and the dotted line (G) represents the thermal displacement in the Y-axis direction of the main shaft (1a) according to the conventional example. are shown respectively.

As is clear from FIG. 3, when the rotation speed of the main shaft (1a) in the machine tool (1) is detected by the detection sensor (9) and the rotation speed is changed from 1000 rotations to 6000 rotations, Based on this detected value, the set value changing means (12) lowers the set value (TS) of the setter (6), as shown in (c) above.
The outlet side temperature of the liquid circulation circuit (3) is controlled to be low as the set value decreases, and as a result, the main shaft (
The thermal displacement in the two-axis direction and the Y-axis direction in 1a) is the change in the dotted lines (E) and (G) according to the conventional example, and the solid lines (D) and (F).
As shown in , the amount of thermal displacement is reduced by about half.

When the rotation speed detection sensor (9) is used as the operating state output means (9), the rotation speed of the main shaft (1a) may be directly detected, but as described above, the rotation speed of the main shaft (1a)
It is preferable to detect the current value of a rotary motor provided in the rotary motor.

In addition, if the rotation speed for a predetermined machining time is set in advance according to the type of workpiece or machining state, the spindle (1a) is set to a set value corresponding to the rotation speed that is changed according to the operation pattern. It may be set in advance.

Further, as the operating state output means (9), a temperature detection sensor that detects a temperature change of an operating part such as the main shaft (1a) in the machine tool (1) may be used, or a It is also possible to use a displacement detector such as a strain meter that detects displacement.

The change in thermal displacement of the operating part represented by the main shaft (1a) is caused by the change in the rotation speed of the main shaft (la), but as a result of the change in the rotation speed, there is a temperature change in the main shaft (1a). occurs, and this temperature change increases thermal displacement. Therefore, this temperature change is detected and the set value (
The increase in thermal displacement can be suppressed by changing the set value (TS), or by detecting the thermal displacement and changing the set value (TS).
) can also suppress the increase in thermal displacement, and when changing the set value (TS) by detecting temperature changes and thermal displacement, it is possible to suppress thermal displacement with more accuracy. It becomes possible.

Next, the contents of control by the temperature control device as described above will be explained based on the flowcharts shown in FIGS. 4 to 6.

First, with the start of operation (step 1), it is determined whether the power is on (step 2). If it is turned on, the power lamp is turned on in step 3, and then in step 4 the operation is started. It is determined whether the switch is on or not, and if the switch is on, the operating lamp is lit. Next, in step 5, a protective device (not shown)
It is determined whether or not it is normal, and if the answer is NO, that is, when the N-holding device is abnormal, an abnormal output is displayed in step 7, and in step 8, it is determined whether or not the operation has been stopped.
Also, in step 9, it is determined whether the reset has been completed, and if the answer is yes in each step 8.9, the abnormal output display is turned off in step 10, and the routine from step 2 is repeated. . If the maintenance II device is determined to be normal in step 6, the display on the monitor is performed in step 11, and then in step 12, the circulation pump (4) installed in the liquid circulation circuit (3) is ) is operated, that is, cooling is performed by the cooling liquid on the machine tool (1) side, and then in step 13, the air temperature (TA) detected by the air temperature detector (8) and the liquid temperature are A detection capability calculation is performed with the outlet side temperature (To) of the circulation circuit (3) detected by the detector (7), and the outlet side temperature (TO)
A temperature deviation ΔT=TO−TA between the temperature and the air temperature (TA) is calculated. Then, in steps 15 to 17, the deviation TO-TA is compared with the set value TS by the setting device (5), that is, the temperature zone shown in Table 3 is determined, and based on the result, the step 18-20,
The frequency (n) in the inverter (10) is controlled to increase or decrease, and if the answer in step 17 is NO, that is, the temperature deviation To-TA and the set value T
If the temperature difference with S is smaller than TS-2,0°C,
In step 21, the inverter (10) is controlled to the minimum frequency, that is, f=f-50Hz, and feedback control of the inverter (10) is performed.

Next, after passing through step 21, the routine moves to the routine shown in FIG.
It is determined whether or not the temperature is in the -L temperature zone, and if YES, the inverter control is performed as is without changing the frequency in step 23, and the process proceeds to step 24. If the answer is NO in step 22, the number of times (n) the step has been reached is counted, and it is determined in step 26 whether the counted number is 3 or less. If the answer is YES, the operating conditions are changed. If it is determined that sufficient time has not elapsed for changing the frequency, the inverter control is performed without changing the frequency in step 27, and if the answer is NO in step 26, the frequency is changed in step 28. It is determined whether the region is on the decreasing side or not, and if it is on the decreasing side, the frequency f=
If the frequency is f+10 Hz or on the increasing side, the frequency is changed to f=f-10 Hz in step 30, and the process proceeds to step 24. Then, in step 24, it is determined whether a signal is output from the operating state output means (9), and if no, that is, during the feedback control, the operating state of the machine tool (1) is determined. When the rotation speed changes or the amount of temperature change of the main shaft (1a) exceeds a certain value, and a force signal is output from the operating state output means (9),
After information processing of the input signal is performed in step 31, the setting value (TS) by the setting device (6) is changed in step 32 by the setting value changing means (12).

Furthermore, if the answer is YES in step 24, and after the reset of the set value in step 32 is completed, the routine moves to the routine shown in FIG. 6, and in step 32 of the same figure, if the frequency If the answer is NO, that is, if the frequency exceeds the maximum frequency of 120 Hz, then f=120 Hz is forcibly set in step 33, and in step 34, it is determined whether the frequency f<30 Hz. It is determined whether or not, and if no,
That is, when the frequency is equal to or higher than the minimum frequency of 30 Hz, the frequency is reset to the current frequency f in step 35. If the judgment results in steps 32 and 34 are both YES, in step 36, the number of times (m) that this step has been reached is counted, that is, the states in the extreme frequency region as described above are counted. , it is determined in step 37 whether this count number is 3 times or less,
If no, that is, if the extreme frequency range is repeated three or more times, then in step 38 the compressor (21)
In addition, the above-mentioned step 3
If yes in step 7, that is, the extreme frequency region is not repeated more than three times, then in step 39 the frequency f
: Fixed to 30. Further, in step 40, the frequency f of the inverter (10) set by the above control is output to the compressor (21), and after counting the sampling time of 60 seconds in step 41, the process returns.

In the embodiment described above, the liquid temperature detector (7) and the air temperature detector (8) for detecting the temperature of the coolant are used to determine the temperature between the liquid temperature (TO) and the air temperature (TA). The deviation ΔT (To-TA) is calculated so that the temperature deviation ΔT converges to a predetermined set value TS, but the set value (T
S), the liquid temperature (To) may be controlled to converge to the set value (TS).

In addition, when changing the set value (TS) according to the rotation speed based on the operating parameters of the main spindle (1a), an operation command from the control panel (1d) of the machine tool (1) is required. is input to the interface circuit of the controller (5), and the control panel (1d) constitutes an operating state output means.

(Effects of the Invention) As explained above, in the temperature control device for a liquid cooling device according to the present invention, the liquid is interposed between the evaporator (24) of the refrigeration circuit (2) and the equipment to be cooled (1). The refrigeration circuit (2) is equipped with a temperature setting device (6) for setting the temperature of the coolant circulated through the circulation circuit (3), a liquid temperature detector (7) for detecting the temperature of the coolant, and A capacity control means for controlling the capacity of the compressor (21), and an output of the capacity control means for controlling the output of the capacity control means so that the coolant temperature converges to a set value based on the detection result of the liquid temperature detector (7). Feedback control means, operating state output means for outputting the operating state of the cooled device (1), and set value changing means for changing the set value based on the output from the operating state output means, The temperature of the coolant that cools the operating section can be changed according to the operating state of the operating section in the cooled equipment (1), and the thermal displacement that changes in correlation with the rotation speed of the operating section can be changed. You can do it less.

Therefore, when the cooled device (1) processes a workpiece, such as a machine tool, the processing accuracy can be improved.

As the operating state and status output means, the cooled equipment (1)
By using a rotation speed detection sensor that detects and outputs the rotation speed of the main shaft, the set value can be changed in synchronization with the rotation speed, which not only simplifies the configuration of the set value changing means, but also The operation of the actuator can be controlled without response delay, and mechanical displacement in the actuating section can be further reduced.

Further, as the operating state output means, the cooled equipment (
By using a temperature detection sensor that detects and outputs the temperature of the operating section in 1), the set value can be changed in synchronization with the temperature change of the operating section, and the controllability of the capacity control means can be improved accordingly. .

Furthermore, as the operating state output means, the cooled equipment (
By using a displacement detection sensor that detects and outputs the mechanical displacement of the actuating part in 1), it is possible to change the set value in accordance with the mechanical displacement of the actuating part, thereby improving the controllability of the capacity control means. We can do better.

[Brief explanation of the drawing]

Fig. 1 is a block diagram of the temperature control device according to the present invention, Fig. 2 is a piping diagram showing the overall structure of the liquid cooling device, and Fig. 3 is temperature control of the cooling liquid while changing the rotation speed of the main spindle in a machine tool. FIGS. 4 to 6 are flowcharts showing control modes of the temperature control device, and FIG. 7 is a block diagram showing a conventional example. (1)・ (1a) (2)・・Cooled equipment・Main shaft・Refrigerating circuit compressor・Condenser・Pressure reduction mechanism・Evaporator (3) −・・(6)・・・−(7)・・・Φ (9) ・ Fist ・ (10)−@ (11)−・ (12) ・ ・

Claims (1)

[Claims] 1) A liquid circulation circuit (3) that circulates cooling liquid to the equipment to be cooled (1), a compressor (21) whose capacity can be controlled, and a condenser (
22), pressure reduction mechanism (23) and the liquid circulation circuit (3)
A temperature control device for a liquid cooling device, comprising: a refrigeration circuit (2) having an evaporator (24) for cooling a cooling liquid; a temperature setting device (6) for setting the temperature of the cooling liquid; ,
a liquid temperature detector (7) that detects the temperature of the cooling liquid;
capacity control means for controlling the capacity of the compressor (21);
feedback control means for controlling the output of the capacity control means so that the coolant temperature converges to a set value based on the detection result of the liquid temperature detector (7); and the operating state of the cooled equipment (1). 1. A temperature control device for a liquid cooling device, comprising: an operating state output means for outputting the operating state; and a set value changing means for changing the set value based on the output from the operating state output means. 2) The temperature control device for a liquid cooling device according to claim 1, wherein the operating state output means includes a rotation speed detection sensor that detects and outputs the rotation speed of the main shaft of the cooled device (1). 3) The temperature control device for a liquid cooling device according to claim 1, wherein the operating state output means includes a temperature detection sensor that detects and outputs the temperature of the operating section of the cooled device (1). 4) The temperature control device for a liquid cooling device according to claim 1, wherein the operating state output means includes a displacement detection sensor that detects and outputs a mechanical displacement of an operating part in the cooled device (1).