JPH0497853U - - Google Patents
Info
- Publication number
- JPH0497853U JPH0497853U JP532291U JP532291U JPH0497853U JP H0497853 U JPH0497853 U JP H0497853U JP 532291 U JP532291 U JP 532291U JP 532291 U JP532291 U JP 532291U JP H0497853 U JPH0497853 U JP H0497853U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP532291U JP2569024Y2 (ja) | 1991-01-21 | 1991-01-21 | ウェーハ処理装置の下側電極着脱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP532291U JP2569024Y2 (ja) | 1991-01-21 | 1991-01-21 | ウェーハ処理装置の下側電極着脱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0497853U true JPH0497853U (enExample) | 1992-08-25 |
| JP2569024Y2 JP2569024Y2 (ja) | 1998-04-22 |
Family
ID=31735747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP532291U Expired - Lifetime JP2569024Y2 (ja) | 1991-01-21 | 1991-01-21 | ウェーハ処理装置の下側電極着脱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2569024Y2 (enExample) |
-
1991
- 1991-01-21 JP JP532291U patent/JP2569024Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2569024Y2 (ja) | 1998-04-22 |