JPH0497853U - - Google Patents

Info

Publication number
JPH0497853U
JPH0497853U JP532291U JP532291U JPH0497853U JP H0497853 U JPH0497853 U JP H0497853U JP 532291 U JP532291 U JP 532291U JP 532291 U JP532291 U JP 532291U JP H0497853 U JPH0497853 U JP H0497853U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP532291U
Other languages
Japanese (ja)
Other versions
JP2569024Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP532291U priority Critical patent/JP2569024Y2/ja
Publication of JPH0497853U publication Critical patent/JPH0497853U/ja
Application granted granted Critical
Publication of JP2569024Y2 publication Critical patent/JP2569024Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP532291U 1991-01-21 1991-01-21 ウェーハ処理装置の下側電極着脱装置 Expired - Lifetime JP2569024Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP532291U JP2569024Y2 (ja) 1991-01-21 1991-01-21 ウェーハ処理装置の下側電極着脱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP532291U JP2569024Y2 (ja) 1991-01-21 1991-01-21 ウェーハ処理装置の下側電極着脱装置

Publications (2)

Publication Number Publication Date
JPH0497853U true JPH0497853U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-25
JP2569024Y2 JP2569024Y2 (ja) 1998-04-22

Family

ID=31735747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP532291U Expired - Lifetime JP2569024Y2 (ja) 1991-01-21 1991-01-21 ウェーハ処理装置の下側電極着脱装置

Country Status (1)

Country Link
JP (1) JP2569024Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JP2569024Y2 (ja) 1998-04-22

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