JPH0497732U - - Google Patents

Info

Publication number
JPH0497732U
JPH0497732U JP153691U JP153691U JPH0497732U JP H0497732 U JPH0497732 U JP H0497732U JP 153691 U JP153691 U JP 153691U JP 153691 U JP153691 U JP 153691U JP H0497732 U JPH0497732 U JP H0497732U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP153691U
Other versions
JP2547603Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1991001536U priority Critical patent/JP2547603Y2/ja
Publication of JPH0497732U publication Critical patent/JPH0497732U/ja
Application granted granted Critical
Publication of JP2547603Y2 publication Critical patent/JP2547603Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Special Conveying (AREA)
  • Control Of Conveyors (AREA)
  • Registering Or Overturning Sheets (AREA)
JP1991001536U 1991-01-22 1991-01-22 基板保持装置 Expired - Lifetime JP2547603Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991001536U JP2547603Y2 (ja) 1991-01-22 1991-01-22 基板保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991001536U JP2547603Y2 (ja) 1991-01-22 1991-01-22 基板保持装置

Publications (2)

Publication Number Publication Date
JPH0497732U true JPH0497732U (ja) 1992-08-24
JP2547603Y2 JP2547603Y2 (ja) 1997-09-10

Family

ID=31728938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991001536U Expired - Lifetime JP2547603Y2 (ja) 1991-01-22 1991-01-22 基板保持装置

Country Status (1)

Country Link
JP (1) JP2547603Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013203546A (ja) * 2012-03-29 2013-10-07 Hirata Corp 搬送ユニット及び搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6030251U (ja) * 1983-08-07 1985-03-01 服部　宅男 トレ−ニング装置
JPS61128224U (ja) * 1985-01-26 1986-08-12
JPH0188622U (ja) * 1987-12-04 1989-06-12

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6030251U (ja) * 1983-08-07 1985-03-01 服部　宅男 トレ−ニング装置
JPS61128224U (ja) * 1985-01-26 1986-08-12
JPH0188622U (ja) * 1987-12-04 1989-06-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013203546A (ja) * 2012-03-29 2013-10-07 Hirata Corp 搬送ユニット及び搬送装置
US9422118B2 (en) 2012-03-29 2016-08-23 Hirata Corporation Transport unit and transport apparatus

Also Published As

Publication number Publication date
JP2547603Y2 (ja) 1997-09-10

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