JPH0495846A - Chuck for tester on characteristic of optical device and testing method using same - Google Patents

Abstract

PURPOSE:To simplify attaching and removal of an optical device and highly accurately reproduce the same fixing position of the device at the time of repetitive attaching/ removal by providing a socket equipped with a terminal of an optical device made through a bottom of a fixing seat and a desired number of connection terminals which can be coupled with the above terminal. CONSTITUTION:First an optical device D is sated on an optical device fixing seat 12 of a socket 1, the socket is positioned and mounted along a periphery in a holder 2 of a chuck, and then a lid 3 is closed. Closing the lid 3 determines the position along an axial direction of the optical device D in the holder 2. On the other hand, a terminal D1 of the optical device 1 is electrically connected to outside the holder 2 via a connection terminal 14 provided on the socket 1. Thermostatic conditions according to a set temperature are generated by compensating by a Peltier element with comparison with a detected temperature of a temperature sensor 4 provided on a second heat transmitting material 21 in the chuck as a control means and dissipating heat by a heat dissipation means. Thus attaching/removal of the optical device is simplified and the same fixing position can be highly accurately reproduced in the case of repetitive attaching/removal.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention relates to a tester that obtains data by inspecting and measuring the optical and/or electrical characteristics of optical devices such as laser diode elements, light emitting diode elements, etc. The present invention relates to an apparatus (hereinafter referred to as a chuck) for supporting and fixing an optical device to be inspected, and a test method using the chuck.

(Prior art) Conventionally, as a characteristic tester for optical devices, there are those that perform inspection and measurement by fixing the optical device to a jig, and those that fix the optical device to a jig that is housed in a constant temperature bath that can control the temperature. Those that perform inspection measurements are well known.

(Problems to be Solved by the Invention) Conventionally, the work of inspecting and measuring the electrical characteristics of a small element such as an optical device while fixing it to a tester jig, or the work of removing an optical device from the jig, requires It required detailed and delicate operations, and it took a great deal of effort and time to complete.

In addition, conventional jigs have poor measurement reproducibility because they affect the temperature change in the temperature bath where the optical device is fixed. It is difficult to repeatedly fix the optical device in the same position on the jig with high precision, and slight deviations in the fixing position of the optical device caused measurement errors.

On the other hand, when performing inspection and measurement by fixing an optical device to a jig within a thermostatic oven set at a desired temperature, most of the heat from the thermostatic oven is transferred to the optical device by air conduction; Because it is a poor conductor of heat, it has poor heat transfer efficiency.
Since it takes time for the temperature of the optical device to reach the same temperature as the thermostatic oven, there is a concern that the time required for inspection and measurement will be longer, especially when performing inspection and measurement by sequentially changing the set temperature of the thermostatic oven. Inspection and measurement took a very long time because the temperature of the optical device could not immediately follow the changing set temperature.

Furthermore, since the tester's inspection and measurement tools are housed in the thermostatic chamber together with the jig, not only does the thermostatic chamber become larger and take up more space, but the inspection and measurement instruments also suffer from constant errors that must be corrected. There were some drawbacks.

The present invention solves these problems, allows attachment and detachment of optical devices through simple operations, and reliably reproduces the same fixing position with high precision even when the optical device is repeatedly attached and detached. Another object of the present invention is to provide a chuck for an optical device characteristic tester that can quickly and accurately control the temperature of an optical device, and to obtain a method for quickly and accurately testing an optical device using the chuck.

(Means for Solving the Problems) In order to achieve the above object, the present invention provides a socket for fixing an optical device alone, a holder for loading the socket, and circumferential positioning means for the socket with respect to the holder. The present invention has created a chuck for a characteristic tester of an optical device, which comprises the socket in the holder, means for axially positioning the optical device within the socket, and temperature control means.

The socket includes an optical device fixing seat, which is provided with a desired number of terminal insertion holes having a depth and diameter that allow the terminal of the optical device to be attached and detached, and a seat for the optical device on the seat surface of the optical device fixing seat. It includes a heat transfer material whose upper surface is exposed at a portion in contact with the bottom circumferential surface of the device, and a desired number of connection terminals that are connected to the terminals of the optical device and are provided through the bottom of the optical device fixing seat.

In the holder, the inner surface of the second heat transfer material is exposed at a portion in contact with the outer surface of the heat transfer material, and a connection pin connectable to the connection terminal is provided through the bottom surface of the holder.

It is also possible to simultaneously measure and inspect a plurality of optical devices by providing a plurality of optical device fixing seats of the socket.

As an example of means for positioning the socket in the circumferential direction with respect to the holder, a spacer member and a convex member that fit into specific parts of both of the contact portions are provided facing each other.

As an example of means for axially positioning the socket in the holder and the optical device in the socket, one end of a lid provided with a window in a portion facing the head of the optical device is pivoted to one end of the holder. At the same time, a stopper is provided at the other end of the boulder to fix the lid in the closed position, and a pressing member is attached to the inner surface of the lid via a spring, and the pressing member fixes the optical device of the socket. A hole is provided in a portion facing the seat, and the diameter of the hole is large enough to allow the light emitting part of the optical device to be loosely inserted therein, and so large that the flange installed at the base of the light emitting part cannot be inserted therethrough. Satoru.

As an example of temperature control means via the second heat transfer material, a temperature sensor is provided near the optical device, a heat exchange portion of a Peltier element is provided in contact with the second heat transfer material, and the temperature sensor While correcting the temperature corresponding to the difference between the detected temperature and the set temperature, if the internal heat is higher than the set temperature, a heat dissipation means that discharges the internal heat to the outside is activated to keep the inside of the chuck at the set temperature. Maintaining a constant temperature state - As the heat dissipation means, it is possible to provide a water cooling type or an air cooling type.

(Function) First, the optical device is seated on the optical device fixing seat of the socket, the socket is circumferentially positioned and loaded into the holder of the chuck, and then the lid is closed.

Closing the lid determines the axial position of the optical device within the holder.

On the other hand, the terminal of the optical device is electrically connected to the outside of the holder via a connection terminal provided in the socket.

A constant temperature state according to the set temperature is generated by comparing the temperature detected by a temperature sensor provided in the chuck and correcting it with a Peltier element, or by radiating heat by a heat radiating means.

The optical and/or electrical properties of the optical device are thus measured and tested.

(Example) Specific examples of the present invention will be described in detail based on the drawings.

1 to 3 show a water-cooled chuck for a single element as a first embodiment of the chuck for a characteristic tester of an optical device according to the present invention. 1 and a holder 2 into which the socket 1 is loaded.

The socket l is provided with an optical device fixing seat 12 having a desired number (for example, four) of terminal insertion holes 11 with a depth and diameter that allow the attachment and detachment of the terminal D1 of the single optical device D, and A heat transfer material 13 is provided with its upper surface exposed at a portion of the seat surface of the device fixing seat 12 that is in contact with the bottom circumferential surface of the optical device D. Two connecting terminals 14 are inserted through the bottom of the optical device fixing seat 12 (see FIGS. 1 and 3).

The holder 2 into which the socket 1 is loaded is provided with a second heat transfer material 21 with its inner surface exposed at a portion that contacts the outer surface of the heat transfer material 13 of the socket 1, and a connection of the socket 1 to the bottom of the holder 2. Connection pin 22 connectable with terminal 14
(See Figure 3).

Next, as means for positioning the socket l relative to the holder 2 in the circumferential direction, a spout 15 is provided at the holder contacting part of the socket l, and a spout 15 is provided at the socket contacting part of the holder 2.
A convex member 23 is provided to fit with the holder (see Fig. 1).

In addition, since the chuck socket l according to this embodiment has a key plate K protruding from the optical device fixing seat 12,
When the optical device D is seated in the socket 1, the reference slot provided at the base of the light emitting part D2 of the optical device (i.e., the recess 0 and the convex part of the key plate are fitted together, and the circumferential direction of the optical device D with respect to the socket 1 is fitted. (See Figure 1).

Further, as a means for axially positioning the socket 1 in the holder 2 and the optical device D in the socket l, one end of the lid 3, which has a window 31 in a portion facing the head of the optical device, is attached to one end of the holder 2. Along with supporting the shaft,
A stopper 35 for fixing the lid 3 in the closed position is provided at the other end of the holder 2, while a pressing member 33 is attached to the inner surface of the lid 3 via a spring 32, and the optical device of the socket 1 is fixed by the pressing member 33. A hole 34 is provided in a portion facing the seat 12, and the hole has a diameter that allows the light emitting portion D2 of the optical device D to be loosely inserted, and that does not allow insertion of the flange D3 provided at the base of the light emitting portion D2. has.

Finally, as a temperature control means via the second heat transfer material 2I of the holder 2, first, the second heat transfer material 21 is equipped with a temperature sensor 4, and then the second heat transfer material 21 is equipped with a Peltier element 5. A water-cooled heat radiating means 6 is provided for discharging internal heat to the outside. The heat dissipation means 6 is formed by connecting a coolant inflow hole 62 and a coolant discharge hole 63 to an internal space 61 through which liquid can flow.
(See Figures 1 and 3).

When fixing an optical device using the chuck according to the present embodiment, first, the optical device D is seated on the optical device fixing seat ] 2 of the socket ], and while the socket is loaded into the holder 2, the optical device D is mounted on the socket 1. The position of the socket 1 in the circumferential direction with respect to the holder 2 is determined by fitting the provided rotation 15 with the convex member 23 provided on the holder 2.

After that, when the lid 3 is closed, the light emitting part D2 of the optical device D
is inserted through the hole 34 of the pressing member 33 and exposed to the outside, and the pressing member 33 connects the flange D3 at the base of the light emitting part to the socket 1.
The socket 1 is crimped onto the holder 2, and the axial position of the optical device D within the holder 2 is determined, and the chuck mechanically fixes the optical device D (
(See Figures 2 and 3).

In this way, the chuck according to this embodiment can be used as an optical device D.
Since the positioning and fixing of the optical device D is performed mechanically, even if the optical device D is attached and detached in the opposite direction, the chuck repeatedly fixes the optical device D in the same position with high precision. Measurement errors caused by this can be reduced as much as possible.

On the other hand, terminal DJ of optical device D is connected to socket 1
The holder 2 is electrically connected to the outside of the holder 2 through the terminal insertion hole 11 provided in the optical device fixing seat 12 via the connecting terminal 14 and the connecting pin 22 (see FIG. 3).

The chuck according to this embodiment has a light emitting portion D2 of an optical device exposed to the outside through a hole 34 provided in a pressing member 33 of a lid 3.
It is possible to inspect and measure the optical characteristics by bringing an optical inspection measurement tool close to or in contact with the terminal DI of the optical device inserted into the terminal insertion hole 11 of the socket 1. Connecting terminal 14 of socket L
It is also possible to connect an electrical inspection and measurement tool via the connection pin 22 of the holder 2 to inspect and measure the electrical characteristics.

When the chuck according to this embodiment is used to inspect and measure the optical characteristics and electrical characteristics of the optical device D under a desired set temperature, the constant temperature state according to the set temperature is
It is generated by comparing the temperature detected by the temperature sensor 4 provided in the heat transfer material 21 and correcting it with the Peltier element 5, or by circulating a cooling liquid such as water through the internal space 61 of the heat radiating means 6 to radiate heat. The heat in the constant temperature state is quickly conducted from the second heat transfer material 21, which is a good conductor of heat, to the heat transfer material 13, which is also a good conductor of heat, and the heat is transferred at the optical device fixing seat I2 of the socket l. Since the temperature is efficiently and evenly transmitted to the optical device D in contact with the material I3, temperature control can be performed quickly and accurately.

Therefore, even when performing inspection and measurement by sequentially changing the set temperature, the temperature of the optical device D can follow the changing set temperature in a short time, and the inspection and measurement time can be shortened.

In addition, in the chuck according to this embodiment, several types of sockets with different shapes of optical device fixing seats 12 and numbers of terminal insertion holes 11 are prepared in advance in order to accommodate differences in the shape and number of terminals of various optical devices. Therefore, when sequentially inspecting and measuring several types of optical devices with different shapes and numbers of terminals, it is possible to replace the socket 1 with one compatible with the various optical devices and load it into the holder 2. It is possible to deal with it quickly.

4 to 7 show an air-cooled chuck for a single element as a second embodiment of the chuck for a characteristic tester of an optical device according to the present invention, and the chuck is capable of attaching and detaching a single optical device D. In addition to providing a socket 1 and a holder 2 into which the socket 1 is loaded, providing a turn 15 on the socket 1 and a convex member 23 on the holder 2 as means for positioning the socket 1 in the circumferential direction with respect to the holder 2 is the first embodiment. This is the same as the example (see Figure 4).

Then, the socket 1 in the holder 2 and the axial positioning means of the optical device D in the socket 1 are also similar to the first embodiment, except that via the second heat transfer material 21 of the holder 2 As a temperature control means, a second
The second heat transfer material 21 is provided with the temperature sensor 4, and the heat exchange portion of the Peltier element 5 is provided in contact with the second heat transfer material 21, which is the same as in the first embodiment. Regarding the heat dissipation means for discharging heat to the outside,
An air-cooled heat dissipation means 7, which is different from the water-cooled type in the embodiment, is provided.

The heat dissipation means 7 includes a heat dissipation fin 71 installed in contact with the other heat exchange part of the Peltier element 5, an air blower 72 installed at a position where air can be blown against the fin 71, and a connection between the blower 72 and the heat dissipation fin 71. A ventilation hole 73 is provided in between, and an exhaust hole 74 is further provided downstream of the radiation fin 7I (see FIGS. 4 and 6).

In order to obtain a desired set temperature environment using the chuck according to this embodiment, the constant temperature state according to the set temperature is
Corrected by the Peltier element 5 by comparison with the temperature detected by the temperature sensor 4 provided on the second heat transfer material 21, or
It is generated by blowing air through the heat radiation fins 71 of the heat radiation means 7 with the blower 72 to radiate heat.

Note that a lever L for operating a stage (not shown) on which the chuck is seated is provided on the external side surface of the chuck according to this embodiment (see FIGS. 5 and 7). Therefore, this lever L can be used, for example, to switch the direction of movement of the stage between the horizontal direction and the vertical direction.

8 to 10 show a water-cooled chuck for multiple elements as a third embodiment of the chuck for a characteristic tester of an optical device according to the present invention, and the chuck has a socket to which a plurality of optical devices D can be attached and detached. 1 and a holder 2 into which the socket I is loaded.

The socket 1 includes a plurality of optical device fixing seats 12 having a desired number of terminal insertion holes 11, and a heat transfer material 13 is provided at a portion of the seating surface of the plurality of optical device fixing seats 12 that is in contact with the bottom peripheral surface of the optical device D. is provided with its upper surface exposed (see FIGS. 8 and 10), while the terminal D of the optical device D
A desired number of connection terminals 14 connectable to the optical device fixing seat 12 are provided through the bottom of each optical device fixing seat 12 (see FIG. 9).

The holder 2 into which the socket 1 is loaded is provided with a second heat transfer material 2 with its inner surface exposed at a portion in contact with the outer surface of the heat transfer material 13 of the socket I, and a second heat transfer material 2] is provided at the bottom of the holder 2 with the inner surface exposed. Connection pin 22 connectable with connection terminal 14
(See Figure 9).

Next, as means for positioning the socket l relative to the holder 2 in the circumferential direction, a spacer 15 deformed into a thank-you note is provided at the holder contact portion of the socket l, and a convex member that fits with the spacer 15 is provided at the socket contact portion of the holder 2. 23 (see FIGS. 8 and 10).

Further, as means for axially positioning the socket 1 within the holder 2 and the optical device D within the socket 1, a window 31 is provided at a portion facing the heads of the plurality of optical devices.
One end of the lid 3 provided with this is pivotally supported on one end of the holder 2, and a stopper 35 for fixing the lid 3 in the closed position is provided at the other end of the holder 2. A pressing member 33 is attached, and holes 34 are provided in a plurality of parts of the pressing member 33 facing the plurality of optical device fixing seats 12 of the socket 1, and the holes are provided with
2 can be loosely inserted, and has a diameter that makes it impossible to insert the flange D3 provided at the base of the light emitting ff1D2 (see FIGS. 8 and 9).

Finally, as a temperature control means via the second heat transfer material 21 of the holder 2, first, the heat transfer material 13 of the socket 1 is provided with a temperature sensor 4, and then the second heat transfer material 21 of the holder 2 is provided with a temperature sensor 4. The heat exchange portions of the Peltier elements 5 are provided at both ends in contact with each other, and water-cooled heat radiating means 6 for discharging internal heat to the outside is provided. The heat dissipation means 6 is formed by connecting a coolant inflow hole 62 and a coolant discharge hole 63 to an internal space 61 through which liquid can flow (see FIGS. 8 and 9).

Since the chuck according to this embodiment has a plurality of optical device fixing seats 12 attached to the socket l, it is possible to fix a plurality of optical devices at the same time and inspect and measure them with a one-time fixing operation. Optical devices can be efficiently inspected and measured.

It is also conceivable to provide several types of optical device fixing seats 12 with different shapes in the socket 1 in order to simultaneously fix and inspect and measure several types of end devices with different shapes and numbers of terminals.

Furthermore, the socket l of the chuck according to the present embodiment has an optical structure that allows the optical device to be easily removed from the optical device fixing seat 12 by taking a cue from the base of the optical device that is in close contact with the optical device fixing seat 12. A groove 16 is provided in contact with the periphery of the device fixing seat 12.

In addition, as the connection pin 22 provided in the holder 2 of the chuck according to the present invention, it is possible to provide a plunger pin that is crimped to the connection terminal 14 of the socket 1 by the elasticity of a built-in spring. Even when the socket 1 is repeatedly attached to and detached from the holder 2, the plunger pin of the holder 2 is reliably crimped to the connection terminal 14 of the socket I, so that the electrical connection can be made reliably.

(Effects of the Invention) As described in detail above, the chuck for an optical device characteristic tester according to the present invention can position the optical device to be inspected and measured in the circumferential direction and the axial direction by simply performing a simple operation. can be reliably fixed in a fixed position, electrically connect the fixed optical device to the outside of the chuck, and further maintain a constant temperature state according to a desired set temperature generated by a temperature control means provided in the chuck. of heat is transferred quickly, efficiently, and evenly to a fixed optical device, so the optical and/or electrical characteristics of the optical device can be quickly and accurately inspected and measured under a desired temperature environment. . Moreover, even if the optical device is repeatedly attached to and detached from the chuck, the optical device is repeatedly fixed at the same position on the chuck with high precision, so measurement errors caused by deviations in the fixed position of the optical device are reduced as much as possible. Accurate inspection measurements can be made.

[Brief explanation of the drawing]

The drawings show specific embodiments of the invention. FIG. 1 shows a water-cooled chuck for a single element according to the present invention;
FIG. 2 is a plan view showing the chuck shown in FIG. 1 with the lid closed; FIG. FIG. 4 is a vertical cross-sectional view taken along the line 3-3, FIG. 6 is a plan view of the chuck shown in FIG. 4 with the lid in an open position; FIG. 6 is a plan view of the chuck of FIG. 4 with the lid closed and including a socket in which an optical device is seated; FIG. 7 is a plan view of FIG. 6, and FIG. 8 is a water-cooled chuck for multiple elements according to the present invention,
9 is a perspective partial sectional view showing the socket inserted into the chuck separately; FIG. 9 is a vertical sectional view taken along the line 9-9 in FIG. 10 showing the socket inserted into the chuck of FIG. 8; FIG. 10 is a partially cutaway plan view taken along line 1010 in FIG. 9. FIG. 1. Socket 11. Terminal insertion hole 12. Optical device fixing seat 13. Heat transfer material 14. Connection Terminal, 15, Intermediate material, 16.61. Groove, 2, Holder 21, Second heat transfer material, 22, Connection pin, 23, Convex material, 3゜, Lid, 31, ,,,,window, 32,,,,spring, 331. Pressing material, 341. Hole 35...Stopper 411. Temperature sensor 56. Peltier element, 6, Water-cooled heat dissipation means, 61, Internal space, 62, Coolant inlet, 63,
, coolant discharge hole, 7, air-cooled heat radiating means, 71, , radiating fins, 72, , blower, 73, , ventilation hole, 74, , exhaust Hole, D 69. Optical device, D I , , Terminal of optical device, D2. , , Light emitting part of optical device, D 3 , , Flange of optical device, K1. . 6. Key plate 1 111. lever

Claims (8)

[Claims] (1) an optical device fixing seat having a desired number of terminal insertion holes with a depth and diameter that allow terminals of a single optical device to be attached and detached; a heat transfer material in contact with the optical device on the fixing seat; a socket provided with a desired number of connecting terminals that can be connected to the terminals of the optical device, which are provided through the bottom of the surface mounting seat; a second heat transfer material that is in contact with the heat transfer material; a holder for loading the socket, which includes a connection pin connectable to the connection terminal; means for positioning the socket in the circumferential direction with respect to the holder; the socket in the holder; and the axial direction of the optical device in the socket. A chuck for a characteristic tester of an optical device, comprising: a positioning means; and a temperature control means via the second heat transfer material. (2) The chuck for an optical device characteristic tester according to claim 1, wherein the socket is provided with a plurality of optical device fixing seats. (3) The chuck for a characteristic tester of an optical device according to claim 1, wherein the means for positioning the socket in the circumferential direction with respect to the holder includes a concave member and a convex member that are fitted to specific portions of both of the contact portions. . (4) As means for axially positioning the socket in the holder and the optical device in the socket, a window is provided in a portion facing the head of the optical device, and one end is pivotally supported at one end of the holder. a stopper provided at the other end of the holder for fixing the lid in the closed position; a pressing member provided on the inner surface of the lid via a spring; The pressing member is provided at a portion of the socket facing the optical device fixing seat, and has a diameter that allows the light emitting part of the optical device to be loosely inserted therein, and that does not allow insertion of a flange provided at the base of the light emitting part. The chuck for a characteristic tester of an optical device according to claim 1, comprising: a hole having a hole; (5) Temperature control means via the second heat transfer material includes a temperature sensor provided near the optical device, and a heat exchange section provided in contact with the second heat transfer material, The chuck for a characteristic tester of an optical device according to claim 1, comprising: a Peltier element that corrects a temperature corresponding to the difference between the detected temperature and the set temperature; and a heat dissipation means that discharges internal heat to the outside. (6) As a heat dissipation means, an internal space that allows liquid to flow; Coolant inflow hole connected to its internal space and a discharge hole; Features of the optical device according to claim 5, comprising: Chuck for sex tester. (7) As a heat dissipation means, Connected to the other heat exchange part of the Peltier element. radiating fins installed, Set it in a position where air can be blown against the fin. A girder blower and installed between the blower and the heat radiation fins. With girder ventilation holes, an exhaust hole provided downstream of the radiation fin; Characteristics of the optical device according to claim 5, comprising: Chuck for tester. (8) Seating the optical device on the optical device fixing seat of the socket, positioning and loading the socket into the holder of the chuck in the circumferential direction, closing the lid, and aligning the axis of the optical device within the holder. the terminal of the optical device is electrically connected to the outside of the holder via the connection terminal provided in the socket, and the temperature detected by the temperature sensor provided in the chuck is the set temperature. When the detected temperature is lower than the set temperature, the detected temperature is corrected by a Peltier element, and when the detected temperature is higher than the set temperature, the heat is radiated by a heat radiating means to generate a constant temperature state according to the set temperature, and the optical and/or electrical characteristics of the optical device are adjusted. A method for testing the characteristics of an optical device, characterized by measuring and inspecting the characteristics of the optical device.