JPH049570Y2 - - Google Patents

Description

[Detailed Description of the Invention] A. Field of Industrial Application The present invention relates to a light irradiation device that utilizes a prism effect to make a light beam incident on a film-like sample.

B. Prior art When measuring the optical characteristics of a film-like sample, as shown in Fig. 4, a sample mounting table A is used, which is made by polishing the end face of a parallel plate-shaped light transmitting material to a constant angle of about 45°. With a sample S in close contact with the surface of the sample S, an analytical light beam L such as infrared light is incident from one optical plane a, and the spectrum of the light beam emitted from the other optical plane b is measured. A method is used to detect changes using a spectrometer.

In such a method, when obtaining data in the thickness direction of the sample S, the traveling angle of the light beam within the sample mounting table A is changed, but if the incident angle is on the optical planes a and b, Due to the deviation from the normal line, the amount of light reflected by L' and optical planes a and b increases, resulting in a problem in that the amount of light incident on the spectrometer decreases.

C. Purpose The present invention was made in view of the above problems, and its purpose is to provide an analytical light irradiation device that can always input and output a light beam in the same direction as the normal line. It's about doing.

D. Overview of the invention In other words, the feature of this invention is that it uses a sample mounting table in which the angle of the optical planes on both sides of the parallel plate-shaped light-transmitting material is continuously changed from one side to the other. It is in.

E. Embodiments The details of the present invention will be explained based on illustrated embodiments.

FIG. 1 is a perspective view of an apparatus showing an embodiment of the present invention, and reference numeral 1 in the figure is a sample mounting table, which is a feature of the present invention, and as shown in FIG. The main body 10 is cut into a parallel plate shape from an infrared transmitting crystal material, and the opposite sides thereof are polished or the like from one side to the other side, so that the angle with respect to the surface 14 is continuously changed (α to B). Plane 1
1 and 12, and is erected on a base 2 that is movable in the vertical direction by a drive device (not shown). Optical plane 11 on the incident side of the sample mounting table 1
, there is an off-axis concave mirror 4 whose reflecting surface is continuously twisted in the axial direction so as to reflect light incident from a certain direction in the normal direction of the surface 11, and an optical plane 12 on the output side has an off-axis concave mirror 4 which A similar off-axis concave mirror 5 is erected on the base 2 to reflect the emitted light in a certain direction. Note that reference numerals 6 and 7 in the figure indicate reflecting mirrors that optically face the off-axis concave mirrors 4 and 5, respectively, and guide light to the analysis optical system.

In this embodiment, the sample S is brought into close contact with the sample mounting table 1 (FIG. 3), and the optical path of each off-axis concave mirror 4, 5 is made to face the optical path _L1 connecting the light source section and the light receiving section of the spectrometer.

In this state, the base 2 is moved to create an optical plane 11, which is at an angle of 60° to the surface, for example.
12 (FIG. 3), the light from the light source is reflected by the off-axis concave mirror 4 and enters the sample stage 1 from the normal direction of the selected optical plane 11.

This incident light is repeatedly reflected between parallel surfaces 13 and 14 even at an incident angle θ ₁ =60°, and travels toward the other optical plane 12 .

In this process, spectral components of the light that partially leaks from the surface, depending on the characteristics of the sample S provided on the sample mounting table 1, are absorbed each time it is reflected. Proceeding in this way to the other optical plane 12, it is reflected by the surface 14 at an angle of 60°,
The light is emitted in accordance with the normal to the optical plane 12 of a portion having an angle of 60° to the surface 14, is reflected in a fixed direction by the off-axis concave mirror 5, and enters the light receiving section of the spectrometer.

On the other hand, when the base 2 is moved upward to change the angle of incidence on the sample S, the optical plane 11 of the sample mounting table 1 relative to the optical path connecting the light source and light receiving section of the spectrometer
The angle changes continuously with respect to the surface 14. In this way, when the base 2 is moved until the optical plane 11 of the part having an angle of 30° is located in the optical path L ₃ (see the same figure), the light from the spectrometer is directed to the off-axis concave mirror 4. Therefore, it is reflected in a direction that coincides with the normal to the optical plane 11 and enters the sample mounting table 1 . The light incident on the sample mounting table 1 is repeatedly reflected between the two surfaces 13 and 14 while maintaining the reflection angle θ ₂ at 30°. Needless to say, surface 1
Since the reflection angle between 3 and 14 is different from the previous case, the incident angle to the sample will also be changed, and this light will undergo spectral absorption based on the characteristics in the thickness direction of the same sample S. .

In this way, when it travels to the other optical plane 12, it is reflected at an angle of 30° from the surface 14, and is emitted coincident with the normal to the optical plane 12 of the part having an angle of 30° to the plane 14. The light is then reflected in a certain direction by the off-axis concave mirror 5 and enters the light receiving section of the spectrometer.

Needless to say, the light incident on the optical plane and the light emitted from the optical planes 11 and 12 are normal to the optical planes 11 and 12, regardless of changes in the traveling angle of the light on the sample stage 1. , the reflection at the optical planes 11 and 12 is extremely small.

In addition, in order to simplify the explanation, in this example, the case where the advancing angle of light on the sample mounting table is set independently is taken as an example. By continuously moving, data in the thickness direction can be obtained in a series of operations, and by arranging multiple light emitting elements and light receiving elements in the longitudinal direction of the optical plane, data in the thickness direction of the sample can be obtained. It becomes possible to obtain data simultaneously.

Further, in this embodiment, the sample mounting table is moved in the vertical direction, but it is clear that it may be moved in the direction in which the angle of the optical plane changes with respect to the analysis optical path.

Furthermore, although this embodiment has been explained by taking infrared analysis as an example, it goes without saying that it can be similarly applied to visible light and ultraviolet light analysis.

Effects As described above, according to the present invention, both sides of a parallel plate-shaped optical member are formed into optical planes whose angles change continuously from one side to the other, and at the same time, an off-axis axis is formed on these planes. Since the concave mirrors are arranged facing each other, the analysis light can be input and output in line with the normal to the optical plane regardless of changes in the light propagation angle on the sample stage, and the analysis light can be attenuated. Furthermore, by linearly moving the base on which the sample mounting table is fixed, it is possible to obtain continuous samples in the thickness direction, which shortens analysis time. .

[Brief explanation of drawings]

Fig. 1 is a perspective view showing one embodiment of the present invention;
Figures A and B are a perspective view and a side view showing the main parts of the above apparatus, respectively, FIG. 3 is an explanatory view showing the operation of the above apparatus, and FIG. 4 is a sectional view showing an example of a conventional irradiation apparatus. 1...Sample mounting table, 2...Base, 11, 12...
...Optical plane, 4,5... Off-axis concave mirror, S...
sample.

Claims (1)

[Scope of utility model registration request] A sample mounting table formed by forming optical planes with angles continuously changing from one end to the other on opposite sides of a parallel plate-shaped optical member that brings the film-like sample into close contact with the sample, and an optical path in a constant direction. 1. A light irradiation device for analyzing a film-like sample, comprising: an off-axis reflecting mirror that aligns the normal line of the optical plane with the normal line of the optical plane; and a base that is movable relative to the analysis optical path.