JPH0494734U - - Google Patents
Info
- Publication number
- JPH0494734U JPH0494734U JP47991U JP47991U JPH0494734U JP H0494734 U JPH0494734 U JP H0494734U JP 47991 U JP47991 U JP 47991U JP 47991 U JP47991 U JP 47991U JP H0494734 U JPH0494734 U JP H0494734U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47991U JPH0494734U (Sortimente) | 1991-01-11 | 1991-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47991U JPH0494734U (Sortimente) | 1991-01-11 | 1991-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0494734U true JPH0494734U (Sortimente) | 1992-08-17 |
Family
ID=31727203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47991U Pending JPH0494734U (Sortimente) | 1991-01-11 | 1991-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0494734U (Sortimente) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008192828A (ja) * | 2007-02-05 | 2008-08-21 | Tokyo Electron Ltd | 基板処理装置の検査方法及び基板のパーティクル低減方法 |
-
1991
- 1991-01-11 JP JP47991U patent/JPH0494734U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008192828A (ja) * | 2007-02-05 | 2008-08-21 | Tokyo Electron Ltd | 基板処理装置の検査方法及び基板のパーティクル低減方法 |