JPH0494183A - Gas laser - Google Patents

Abstract

PURPOSE:To prevent the damage of an electrode in a laser gas discharge tube or laser gas deterioration by detecting the temperature of electric insulating gas in a gap switch and controlling the pressure of the gas. CONSTITUTION:A pressure set point station setter is specified as a pressure setter 8 having a pressure variable mechanism 11 which uses a servo motor or a pulse motor as a drive section. A temperature detector 12, which measures the temperature of electric insulating gas, is installed to an electric power supply means 4. The pressure variable mechanism 11 is controlled by a control device which stores a temperature signal detected by the temperature detector 12. This construction makes it possible to protect a gap switch 4 so that it may perform proper operation by transmitting a signal from the temperature detector 12 to the pressure variable mechanism by means of the control device 9 when the temperature of insulating gas is subjected to change resultant from long time operation or repetition of switching operation.

Description

[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a gas laser device.

(Prior art) In oscillation devices such as TEA co2 lasers and excimer lasers in which the gas laser medium is at atmospheric pressure or higher and the laser light is emitted perpendicular to the discharge direction, electrical insulation is used for switching the power source for discharge. A power supply control means maintained at a predetermined pressure with a gaseous gas is used.

FIG. 3 shows an example of the above-mentioned conventional oscillation device. That is, in FIG. 3, 1 is a gas laser tube, and inside thereof is a set of discharge electrodes 2aq 2 whose cross section is semicylindrical.
b% are provided facing each other. Reference numeral 3 denotes a power supply unit that generates high voltage DC pulses, and is configured to supply a predetermined amount of power to the gas laser tube 1 via a gap switch 4 serving as a power supply control means. The gap switch 4 is connected to a trigger generator 5 to receive a switch operation signal, and also supplies air, nitrogen gas, or other electrically insulating gas from a supply device 6 to a solenoid valve 7 and a pressure setting device 8. It is designed to be supplied via. The trigger generator 5 and the solenoid valve 7 are controlled by a control device 9 in their trigger operation and valve opening/closing operation, respectively. Note that an exhaust pipe 10 provided with a needle valve 7a is connected to the gap switch 4 to exhaust excess gas.

(Problem to be Solved by the Invention) However, in the above configuration, in order to properly operate the gap switch 4, it is necessary to maintain the pressure within a predetermined range depending on the temperature of the electrically insulating gas inside the gap switch 4. be. As shown in FIG. 2, when the temperature of the electrically insulating gas in the gap switch 4 is T, the pressure is P1 to P2.
Proper operation can be achieved within the range (A). Above the above range (C), a switching operation is not performed even if a trigger is input, a so-called "mistrigger" occurs, and below the range (B), switching is performed even without a trigger input.

A so-called "self-destruction phenomenon" occurs. Furthermore, as the temperature of the electrically insulating gas within the gap switch 4 increases, the density per unit volume of the electrically insulating gas within the gap switch 4 decreases, and the insulation distance becomes shorter. This is why, in FIG. 2, as the temperature increases, the appropriate pressure range (A) increases.

Therefore, when the temperature of the electrically insulating gas inside the gap switch 4 rises due to long-term laser oscillation or changes depending on the number of repetitions of the switching operation, the pressure is adjusted to ensure proper operation. There was the inconvenience of having to do so.

Therefore, during operation of the laser oscillation device, there may be an inconvenience that the gap switch 4 is out of the pressure range for proper operation, and as a result, especially in the case of a mis-trigger, sufficient power is not supplied from the power source 3 to the gas laser tube 1. is not supplied, so-called mark discharge occurs between the electrodes 2a and 2b,
This may cause damage to the electrodes 2a and 2b or cause deterioration of the laser gas.

Therefore, in view of the above-mentioned problems, it is an object of the present invention to provide a gas laser oscillation device that eliminates the above-mentioned disadvantages by detecting the temperature of the electrically insulating gas in the gap switch and controlling its pressure.

[Configuration of the Invention (Means for Solving the Problems) Therefore, in order to achieve the above object, the present invention provides a gas laser tube, a power supply unit that supplies a predetermined electric power to the gas laser tube, and an electrically insulating gas maintained at a predetermined pressure by
a power supply control means for controlling the supply of power; a gas supply device for supplying the insulating gas via a pressure setting device having a pressure variable mechanism; and a temperature of the gas provided in the power supply control means. and a control device that outputs a drive signal to the pressure variable mechanism so that the pressure within the power supply control means is changed to a pressure according to a detected temperature signal from the temperature detection means. A gas laser device is provided.

(Function) In the gas laser device of the present invention configured as described above, the set pressure of the pressure setting means provided in the supply pipeline of the electrically insulating gas supplied to the power supply control means is set within the power supply control means. It can be controlled in accordance with the detected temperature signal from the attached temperature detection means, and the gas pressure within the electricity supply control means can be immediately responsive to temperature changes.

(Example) An embodiment of the present invention will be described below with reference to the drawings.

Note that parts common to those in FIG. 3 are given the same reference numerals, and detailed explanations will be omitted. That is, the difference from the configuration shown in FIG. 3 is that the pressure setting device 8 has a pressure variable mechanism 11 using a servo motor, pulse motor, etc. as a drive unit, and the pressure setting device 8 has a pressure variable mechanism 11 using a servo motor, pulse motor, etc. A temperature detector 12 is provided to measure the temperature of the electrically insulating gas therein, and the pressure variable mechanism 11 is controlled by a control device 9 into which the temperature signal detected by the temperature detector 12 is input. .

In the above configuration, when the temperature of the electrically insulating gas in the gap switch 4 is detected by the temperature detector 12 and the signal is sent to the control device 9, the control device 9 sends a control signal to the pressure variable mechanism 11. , the pressure setting device 8 is set to a pressure corresponding to the above temperature. A temperature signal from a temperature detector 12 is constantly input to the control device 9 .

By the way, if the temperature of the electrically insulating gas in the gap switch 4 changes due to long-term operation or a change in the number of switching repetitions, for example, if the temperature changes from T to T'' in FIG. 2, the gap switch will close at T'. The control device 9 sends a signal to the pressure variable mechanism so that the pressure range P'1 to P'2 is within which the gap switch 4 operates properly.In this way, the temperature of the electrically insulating gas inside the gap switch 4 can be detected. This ensures that the gap switch 4 is always maintained at a pressure that allows it to operate properly.

[Effects of the Invention] As described above, according to the present invention, the gas pressure for the power supply control means can always be maintained at a pressure that allows the best operation, so malfunctions such as self-destruction due to mistriggering are prevented. Damage to the electrode inside the laser gas discharge tube,
This prevents laser gas deterioration and eliminates the inconvenience of having to adjust the gas pressure to the power supply control means each time due to changes in operating conditions as in the past.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing one embodiment of the present invention, and FIG.
Graph showing characteristics of proper operation of gap switch, 3rd
The figure is a configuration diagram showing a conventional example. DESCRIPTION OF SYMBOLS 1... Gas laser tube, 3... Power supply part 4... Gap switch (power supply control means) 6... Supply device, 8... Pressure setting device 9... Control device, 11.
・・Pressure variable device 12 ・・Temperature detector agent Patent attorney Noriyuki Kensuke Chika Figure 2 -> Goto Figure 3

Claims (1)

[Claims] a gas laser tube, a power supply unit that supplies predetermined power to the gas laser tube, and a power supply control means that is maintained at a predetermined pressure by an electrically insulating gas and controls the supply of the power;
a gas supply device for supplying the insulating gas through a pressure setting device having a pressure variable mechanism; a temperature detection means for detecting the temperature of the gas provided in the power supply control means; and the power supply control means. 1. A gas laser apparatus comprising: a control device that outputs a drive signal to the pressure variable mechanism so that the pressure inside the pressure variable mechanism is changed to a pressure corresponding to a detected temperature signal from the temperature detection means.