JPH0494116A - スピンコータ - Google Patents

スピンコータ

Info

Publication number
JPH0494116A
JPH0494116A JP2210424A JP21042490A JPH0494116A JP H0494116 A JPH0494116 A JP H0494116A JP 2210424 A JP2210424 A JP 2210424A JP 21042490 A JP21042490 A JP 21042490A JP H0494116 A JPH0494116 A JP H0494116A
Authority
JP
Japan
Prior art keywords
motor
wafer
casing
clearance
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2210424A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568090B2 (enExample
Inventor
Fumio Kondo
文雄 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2210424A priority Critical patent/JPH0494116A/ja
Publication of JPH0494116A publication Critical patent/JPH0494116A/ja
Publication of JPH0568090B2 publication Critical patent/JPH0568090B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
JP2210424A 1990-08-10 1990-08-10 スピンコータ Granted JPH0494116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2210424A JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2210424A JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Publications (2)

Publication Number Publication Date
JPH0494116A true JPH0494116A (ja) 1992-03-26
JPH0568090B2 JPH0568090B2 (enExample) 1993-09-28

Family

ID=16589087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2210424A Granted JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Country Status (1)

Country Link
JP (1) JPH0494116A (enExample)

Also Published As

Publication number Publication date
JPH0568090B2 (enExample) 1993-09-28

Similar Documents

Publication Publication Date Title
US4483570A (en) Magnetic bearing arrangement for an artificial satellite
US8461735B2 (en) Magnetically levitated and controlled body of revolution
CN102537045B (zh) 自动消除滚动轴承外圈径向间隙的径向保护轴承装置
CN1605145A (zh) 反作用平衡旋转驱动机构
JPH0495609A (ja) スピンドル軸の軸受構造
WO2015106617A1 (zh) 洗衣机内筒限位平衡控制系统和方法
JPH03111096A (ja) アンバランス修正装置
EP1166041A1 (en) Reactionless rotary drive mechanism
JPH0568090B2 (enExample)
JPH11166532A (ja) 磁気軸受装置
JPH04300417A (ja) 磁気軸受装置
US6196502B1 (en) Attitude control of spinning spacecraft with counterspun controls platform
JP2003339136A (ja) 環状モータ
JPH0137215Y2 (enExample)
JPH0625698Y2 (ja) ティルティングパッド軸受
JP3042545B2 (ja) 磁気軸受装置
JP2615624B2 (ja) 超仕上盤
WO2005075938A1 (en) Bearingless gyroscope
JP2006300017A (ja) フライホイールエネルギ貯蔵装置
JPH0319766A (ja) 回転体の動的バランサ
JPH0587139A (ja) 回転機械用磁気軸受装置
JPH04340353A (ja) 周波数発電機付きモータ装置
JPH031903B2 (enExample)
JPH0139942Y2 (enExample)
JP2003235273A (ja) 回動ユニット