JPH0493749A - Pressure testing method for high-pressure gas contaier - Google Patents

Abstract

PURPOSE:To omit cleaning and the like of a container after testing and to make it possible to maintain the purity of a gas to be filled by filling the container with liquid such as pure water which does not contain contaminant,and making compressing liquid act on a pressure transfer means. CONSTITUTION:A pressure transfer device 3 has a tubular cylinder 4 and a piston 7 which divides the cylinder into two chambers 5 and 6. Pure water is supplied through a pure-water supplying valve 12. With the container 1 being attached to the pressure transfer device 3, the container 1 is submerged into the water in a pressure testing device 14. Then, high-pressure city water is made to act on the piston 7 with a high-pressure pump 11 so as to transfer the pressure on the pure water in the container 1. The amount of expansion at the specified pressure is checked. The pressure is further reduced, and the amount of permanent expansion is checked. After the end of the test, the container 1 is taken out, the device 3 is removed, the pure water in the container 1 is removed and the inside is dried. Namely, the contamination in the inside of the container 1 during the test is prevented.

Description

[Detailed description of the invention] Industrial applications The present invention relates to a pressure test method for high-pressure gas containers.

BACKGROUND OF THE INVENTION In recent years, high pressure gases have been used in various fields such as the semiconductor industry. The high-pressure gas is used by being filled into a high-pressure gas container, or when the gas in the container is used up, the gas is refilled, and the container is used repeatedly. To ensure safety, containers are now subjected to pressure tests after a certain number of years.

In this conventional pressure test, a container is filled with city water, ie, general tap water, and a high-pressure pump is used to pressurize the water in the container. After the test, discard the water inside and dry the inside of the container.

By the way, high-pressure gases used in various industrial fields are required to have extremely high purity. Therefore, the gas to be filled must of course be of high purity, but no impurities must remain inside the container.

Regarding this point, in the conventional pressurized test method in which a container is directly filled with city water, impurities such as chlorine ions and sodium ions contained in the city water remain in the container, resulting in contamination. It may be possible to wash the sample with pure water after the test, but this would increase the number of man-hours and would make it impossible to completely remove impurities.

Means for Solving Problems The present invention has been made in view of the above problems, and in the pressure test method according to the present invention, a container is filled with a liquid that does not contain contaminants, such as pure water, and the opening of the container is A removable pressure transmission means is attached to the container, high-pressure liquid is applied to the pressure transmission means using, for example, a high-pressure pump, and this pressure is transmitted to the pure water in the container via the pressure transmission means to perform a pressure resistance test. This is how it was done.

Example The present invention will be described in detail below with reference to the drawings.

FIG. 1 is a schematic configuration diagram showing a state in which a withstand voltage test is conducted according to the test method described in this paper.

In the figure, numeral 1 is a high-pressure gas container to be subjected to a pressure test, and a pressure transmitting device 3 is attached to 2 on the same day. This pressure transmission device 3 includes a cylindrical cylinder 4 and a piston 7 housed within the cylinder 3 and partitioning the inside of the cylinder 3 into two chambers 5.6. A seal 8 is provided on the outer periphery of the piston 7.

One end of the cylinder 4 communicates with the inside of the container 1, and the other end communicates with a high-pressure pump 11 via a pipe 9, and high-pressure city water is sent to the upper chamber 5 and acts on the piston 7. In this embodiment, the container 1 is filled with pure water. 12 is a valve for supplying pure water, and 13 is an air purge bolt. Reference numeral 14 denotes a pressure test device which has also been used in conventional pressure tests, and the container 1 filled with water and ready for testing is housed in the state shown in the figure. Reference numeral 15 denotes a mask, to which a billet (not shown) is attached, and during the pressure test, the amount of expansion of the container 1 can be determined from the water level in the billet.

In conducting the test, first the gas remaining in the container 1 is replaced with an inert gas such as nitrogen.

Next, remove the valve from spout 2 and add pure water, which does not nearly fill the container 1.

Next, the pressure transmitting device 3 is attached to the mouth 2 of the container 1 in the state shown. Then, with the air purge bolt 13 loosened, pure water is replenished from the pure water supply valve 12. If pure water leaks from the air purge hole 13, tighten the bolt 13 and close the valve 12 to stop refilling the pure water. The container 1 and the lower chamber 6 are now filled with pure water. in this case,
The pressure transmission device 3 may be attached to the container 1 from the beginning to supply pure water into the container 1. In this state, the container 1 is hydraulically operated in the pressure test device 14 without the pressure transmission device y1.3 attached. .

Next, high-pressure city water is applied to the piston 7 by the high-pressure pump 11, thereby transmitting pressure to the pure water in the container 1,
Check the amount of expansion at a given pressure, then reduce the pressure and check the amount of permanent expansion.

After the test, take out container 1, remove device 3, and remove container 1.
Remove the pure water inside and dry the inside.

When a pressure test was conducted using the test method according to the present invention, the electrical conductivity of pure water in the container 1 before and after the test was examined, and both were found to be 1.
80μs/cx=(0.56MΩ/■),
No changes were observed before and after the test. This confirms that the upper and lower chambers 5 and 6 were reliably isolated by the piston 7 of the device 3 during the test, and that there was no leakage of city water from the upper chamber 5 to the lower chamber 6. This indicates that contamination of the container 1 by city water is reliably prevented.

Table 11 and Table 2 show the relationship between the pressure in the upper chamber 5 and the pressure in the lower chamber 6 when the pressure was increased and when the pressure was reduced.

Table 1 Pressure increase (unit: kg/cd G) Table 2
During pressure reduction (unit: kg/cd G) As is clear from this, the pressure loss caused by the pressure transmission device 3 can be ignored.

In the above example, instead of using pure water as the liquid to fill the container 1, it is also possible to use, for example, isopropyl alcohol or a fluorocarbon-based organic solvent.

Effects of the Invention As is clear from the above explanation, the pressure test method according to the present invention prevents the inside of the container from being contaminated during the test, and eliminates the need to clean the container after the test. The purity of the product can be maintained. In addition, the liquid to be filled in the container 1 during the test is selected as necessary, such as pure water, but the pressure test equipment 14 and high pressure pump 11 used conventionally are
etc. can be used as they are, and the pressurized liquid used can be city water as usual, which is extremely convenient.

[Brief explanation of drawings]

FIG. 1 is a schematic configuration diagram showing a state in which a test is performed using a pressure resistance test method according to the present invention. 1: Container 32 Pressure transmission device 4: Cylinder 7: Piston 11; High pressure pump patent applicant Osaka Sanso Kogyo Co., Ltd. (1 other person)

Claims (1)

[Claims] 1. In a pressure test method for a high-pressure gas container, the container is filled with a liquid that does not contain contaminants, such as pure water, a pressure transmitting means is attached to the mouth of the container, and a pressure transmitting means is attached to the mouth of the container. A pressure resistance test method for a high-pressure gas container, comprising applying a pressurized liquid and transmitting the pressure of the pressurized liquid to the liquid in the container via the pressure transmitting means. 2. The pressure transmitting means includes a cylinder that communicates with the container at one end and the source of pressurized liquid at the other end, and is mounted within the cylinder to divide the interior of the cylinder into two chambers. 2. The pressure resistance test method for a high-pressure gas container according to claim 1, comprising: 3. The pressure resistance test method for a high-pressure gas container according to claim 1, wherein the pressurized liquid is tap water and acts on the pressure transmission means via a high-pressure pump.