JPH0492977A - Graphic processing method - Google Patents

Abstract

PURPOSE:To reduce influence to an LSI circuit by eliminating the overlapped part of patterns without generating a minute projecting part and a recessed part even when the intersected point of the outside segment of plural patterns does not exist on a grid. CONSTITUTION:When the outside segments intersect each other between the moving position of a scanning line and the next grid in front of a moving direction, in the case only the one side is effective, an auxiliary segment is generated from the intersected point of the scanning line and the effective outside segment to the next grid in the moving direction of the scanning line, the effective outside segment in the section is made ineffective, and the auxiliary segment is outputted as an effective line, so the generation of the minute projecting and recessed parts is prevented. And, in the case the crossed outside segments are effective each other, both the outside segments are made ineffective in the section from the intersected point of the scanning line and both the outside segment at that moment to the next grid in front of the moving direction of the scanning line. Then, the generation of the minute projecting and recessed parts is prevented, and the influence to the LSI circuit is reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] It relates to a graphic processing method, more specifically, to a graphic processing method for generating a photomask graphic, a directly drawn graphic, etc. based on graphic data of a mask pattern, for example, the outline of a plurality of patterns. The purpose is to be able to remove overlapping parts of patterns without creating minute depressions or protrusions even when the intersections of line segments are not on the grid, thereby reducing the effect on LSI circuits. year,
If only one of the intersecting outline segments is valid, an auxiliary line segment is generated from the intersection of the current scanning line and the valid outline segment to the next grid in front of the scanning line in the moving direction. , invalidates the effective outline line segment in the section where the auxiliary line segment was generated, outputs the auxiliary line segment as a valid line segment, and if the intersecting outline segments are valid, Both outline line segments are invalidated in the section from the intersection of the current scanning line and both outline line segments to the next grid in the forward direction of movement of the scanning line.

[Industrial Application Field] The present invention relates to a graphic processing method, and more particularly to a graphic processing method for generating photomask graphics, directly drawn graphics, etc. based on graphic data of a mask pattern.

With the recent increase in the scale and density of LSIs, the demand for higher precision in graphic processing is increasing.

That is, in miniaturized LSI chips, minute concave or convex portions of graphics have a large influence on the LSI circuit, and errors in graphic processing affect the characteristics and operation of the LSI.

Furthermore, since it is effective to use diagonal line segments in graphics in order to manufacture high-density LSIs, it is important that graphics with diagonal line segments can also be processed in graphic processing. However, when a figure with diagonal line segments is processed, the accuracy of figure processing is lower than when a figure consisting of only horizontal and vertical line segments is processed.

For this reason, when graphic processing is performed to create drawn graphic data, highly accurate removal processing of overlapping portions of graphics is essential.

[Prior Art] Conventionally, for example, as shown in FIG. 12, two patterns At
When creating graphic data for a drawing device by removing the overlapping portion from the graphic data of the design pattern FO consisting of , A2,
Scanning lines passing through grids G arranged at minimum intervals for graphic processing are oriented in one direction (to the right) with respect to the design pattern FO.
, and all outline line segments of each pattern AI and A2 that intersect the scanning line at right angles or obliquely at each movement position of the scanning line are determined. In addition, in order to remove the overlapping part, it is necessary to set a scanning line at the intersection of the outline line segment L13 and Li2, but since the position S3' is not on the grid, the scanning line cannot be set, and the scanning line cannot be set at the position S3'. Sl, S2. S3.
S4. S5. The processing is performed by setting in the order of S6. Therefore, in FIG. 12, when the scanning line reaches position 81, the line segment LI
O,Lll is determined and the scanning line is 82. When it reaches position S3, line segment L12. LIO, 'L14 and Li2 are found, and when the scanning line comes to the position 84, the line segment L12°Li2 is found, and when the scanning line comes to the position 85, the line segment L12. L
i2 is calculated.

Next, based on whether each contour line segment obtained at each movement position of the scanning line is inside the design pattern FO, it is determined whether each contour line segment at each movement position is invalid or valid, and whether the contour line segment is valid or not is determined. The portion from the moving position of the scanning line that was first determined to be valid to the moving position of the scanning line that was determined to be invalid is output as a valid line segment. That is, when the scanning line comes to position S1, line segments LIO and Lll are determined to be valid first, and when the scanning line comes to position S2, line segment L12 is determined to be valid.
．． Li2 are each determined to be valid first. Further, when the scanning line reaches position S2, line segment LIO is determined to be invalid because it is inside the design pattern FO, and line segment Lll is determined to be invalid because it is not to the right of position S2. When the scanning line reaches position S3, line segment L12. Li2 is determined to be valid, and line segments LIO and L14 are determined to be invalid. When the scanning line reaches position S4, line segment L12 is determined to be valid, line segment L14 is determined to be valid first, and line segment L10. Since L13 is not to the right of position S4, it is determined to be invalid. Furthermore, when the scanning line reaches position S5, line segment LL2 is determined to be valid, line segment L15 is determined to be valid first, and line segment L14 is determined to be valid at position S5.
Since it is not to the right of , it is determined to be invalid. Furthermore, when the scanning line reaches position S6, line segment L12. Since Li2 is not to the right of position S6, it is determined to be invalid.

Therefore, for line segments LIO and Lll, the portion from position S1 to position S2 is output as a valid line segment, and line segment L1
2, the portion from position S2 to position S6 is output as an effective line segment. Also, regarding line segment L13, position S
The part from 2 to position S4 is output as a valid line segment,
Regarding line segment L14, the portion from position S4 to position S5 is output as a valid line segment. Furthermore, regarding line segment L15, a portion from position S5 to position S6 is output as a valid line segment. As a result, the graphic processing is performed into a graphic F1 with the overlapping portion removed, as shown in FIG.

[Problem to be solved by the invention] However, in the figure Fl shown in FIG.
13. A minute recess (or protrusion) Fa is formed between position S3°84 where the intersection of L14 exists, and LS
The I circuit may be affected. Therefore, it is necessary to create a design pattern that takes these influences into consideration, which hinders miniaturization.

The present invention has been made to solve the above-mentioned problem. For example, even when the intersections of the outline segments of a plurality of patterns are not on the grid, the patterns can overlap each other without generating minute depressions or protrusions. It is an object of the present invention to provide a graphic processing method that can remove portions and thereby reduce the influence on LSI circuits.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides graphic processing for creating drawn figures by removing overlapping parts from graphic data of a design pattern composed of a plurality of patterns having overlapping parts. When performing graphic processing, scanning lines passing through grids arranged at minimum intervals are moved parallel to the design pattern in one direction, and intersect the same scanning line at right angles or diagonally at each position of movement of the scanning line. Find all the outline line segments of each pattern. Then, based on whether each contour line segment obtained at each movement position of the scanning line is inside the design pattern, it is determined whether or not each contour line segment at each movement position is valid. The portion from the moving position of the scanning line that was first determined to be valid to the moving position of the scanning line that was determined to be invalid is output as a valid line segment. At this time, when the outline line segments obtained at each scanning line movement position intersect with each other between the scanning line movement position at that time and the next grid in front of the scanning line movement direction, If only one of the intersecting outline line segments is valid, an auxiliary line segment is generated from the intersection of the current scanning line and the valid outline segment to the next grid in the scanning line movement direction, The effective outline line segment in the section where the auxiliary line segment was generated is invalidated, and the auxiliary line segment is output as a valid line segment. In addition, if the intersecting contour line segments are valid, both contour line segments in the section from the intersection of the current scanning line and both contour line segments to the next grid in the forward direction of movement of the scanning line are calculated. To disable.

[Operation] Therefore, when the outline line segments obtained at each scanning line movement position intersect with each other between the scanning line movement position at that time and the next grid ahead in the scanning line movement direction, , if only one of the intersecting contour line segments is valid, an auxiliary line segment is generated from the intersection of the current scan line and the valid contour line segment to the next grid in the direction of movement of the scan line. Since the effective outline line segment in the section where the auxiliary line segment was generated is invalidated and the auxiliary line segment is output as a valid line segment, the generation of minute recesses and protrusions is prevented. Also, if the intersecting outline line segments are valid, both outline segments in the section from the intersection of the current scanning line and both outline segments to the next grid in the forward direction of the scanning line are invalid. This prevents the formation of minute recesses and protrusions. By preventing the formation of minute concave portions and convex portions in this manner, the influence on the LSI circuit is reduced.

``Example 1'' An example embodying the present invention will be described below with reference to FIGS. 1 to 11.

FIG. 1 shows a schematic electrical configuration of a graphic processing device for implementing the present invention. The CPU 1 of the graphics processing device includes a system control section 2, a graphics data input section 3, a graphics processing section 4,
Consists of a drawing data output processing section 5, which outputs photomask figures,
Create direct drawing figures, etc. That is, when the system control section 2 receives the control command 6 instructing the graphic conversion process, it starts a predetermined graphic processing program and reads the graphic data 7 into the graphic data input section 3 to be processed. and,
The system control unit 2 executes graphic processing in the graphic processing unit 4 using the work direct access device 8, outputs the processing progress to a processing list 9, and outputs output data 10 such as photomask figures, directly drawn figures, etc. to a magnetic tape. output to etc.

FIG. 2 is a flowchart showing details of the graphic processing program executed by the graphic processing section 4. As shown in FIG.

First, in step 11, the graphic data 7 input to the processed graphic data input section 3 is segmented into lines. That is, for example, as shown in FIG. 6, in a design pattern F2 consisting of two patterns A3 and A4, a horizontal or diagonal outline line segment is extracted, and as shown in FIG. 3, its line segment direction code, left end point X coordinate,
The line segment data consisting of the Y coordinate of the left end point and the X coordinate of the right end point is output to the working direct access device 8 as a graphic line segment format. Therefore, the working direct access device 8 includes line segments L1 to L3 parallel to the X axis. L6-L8 and oblique bone L4.
Only line segment data of L5 is stored.

Next, in step I2, each line segment data stored in the working direct access device 8 in step 11 is sorted in ascending order using the left end point X coordinate as the first key, the left end point Y coordinate as the second key, and the right end point X coordinate as the third key. Classify. That is, pattern F in FIG.
2, the line segments are classified in the order of Ll to L8.

Next, in step 13, the internal storage area M of the graphic processing section 4 is
As shown in FIG. 4, each node 21 is divided by nodes 21 each having a storage section 21a and a pointer 21b in the graphic line segment format shown in FIG. 3, and all the nodes 21 are connected by the pointer 21b.

Then, the pointer 21 of the last connected node 21
b and the root pointer 22 indicating the beginning of the connection, and the sentinel (5enL), which is a value for recognizing the end of the connection.
1nel), and defines the internal storage area M as a work concatenation area (work list) with all areas as free areas.

Next, in step 14, as shown by broken lines in FIG. 6, a scanning line passing through a grid with the minimum interval for graphic processing, in which the end points of each line segment L1 to L8 of the pattern F2 are arranged, is defined as a sweep line. The sweep line is initialized by setting the minimum X coordinate value, that is, the X coordinate value of the left end point of the line segment L1, using the working direct access device 8. In this embodiment, the sweep line is scanned in the direction in which the X coordinate value increases, and is also translated in the direction in which the X coordinate value increases.

Next, in step 15, among the line segments that intersect the sweep line at right angles or diagonals, the line segment having a portion whose X coordinate value is larger than that of the sweep line is transferred to the work direct access device 8.
A group of outline line segments is obtained by sequentially importing the line segments having the smallest X coordinate value into the work list M. FIG. 5 shows the state of the work list M when the sweep line arrives at position 81 in FIG. 6, and the line segment data of line segments L1 and L2 are sequentially captured. Thereafter, when the sweep line sequentially reaches positions 82 to S7, line segment data of line segments L2 to L8 are taken in.

In step 16, the line segment data in the work list M is sequentially traced from the first data to determine whether the graphic line segment is invalid or valid. That is, the direction of the line segment to be judged is compared with the direction of the previous line segment in the work list M, and if it is the same direction as the previous line segment, the judgment value of the previous line segment is set to ``. 1'' is added, and if the direction is opposite to the direction of the previous line segment, the sign of the judgment value of the previous line segment is inverted, thereby setting a judgment value for the line segment. Then, the judgment value of the line segment to be judged is “±”
1", the line segment is not inside the design pattern,
In other words, it is determined that it is an outline line and is valid, and the determination value is "±".
1", the line segment is determined to be invalid because it is inside the design pattern. Note that the determination value of the first line segment data in the work list M is the line segment L whose Y coordinate value is smaller than the line segment L3, as shown by the two-dot chain line in FIG.
It is set by assuming O and setting the determination value to "-1", and comparing the first line segment data and the line segment LO.

Therefore, for example, when the sweep line arrives at position 84 in FIG. 6, the line segment data in work list M becomes line segment L3. L5. L4. L2, and each line segment L3. L5. L
4. The judgment values of L2 are r-+-t'' and r+2, respectively.
J, r-2J, r-IJ, and the line segment L3. L
2 is determined to be valid, and line segment L5°L4 is determined to be invalid.

Then, in step 17, in each group of outline line segments obtained at the current sweep line movement position, a line segment pair that intersects between the grid at that movement position and the next grid in front of the sweep line movement direction is determined. It is determined whether or not there is a pair of line segments that intersect, and if there is a pair of line segments that intersect, a process for generating an auxiliary line segment, which will be described later, is performed.

In the next step 18, among the line segments in the work list M, the line segments that have changed from valid to invalid in the moving direction of the sweep line at the rear (to the left) and in front (to the right) of the current sweep line are checked. is output as output data 10 to a magnetic tape or the like, and the line segments that change from invalid to valid at the rear and front of the sweep line at that time are cut by the sweep line to remove invalid portions. That is, the portion of the valid outline line segment from the moving position of the scanning line that was first determined to be valid to the moving position of the scanning line that was determined to be invalid is output as a valid line segment.

In step 19, the position of the next sweep line is set. In other words, the right end point X of the line segment on the work list M
The smallest of the coordinate value or a value larger than the current position of the sweep line, the X coordinate value of the intersection of the line segments, and the X coordinate value of the left end point of the unprocessed first line segment of the direct access device 8 for work. Set the sweep line with as the sweep line value. In addition, if the intersection of line segments is not on the grid, instead of using the X coordinate value of the intersection point, divide the X coordinate value by the crit width and round down or round up the decimal point to set the grid width. The multiplied value is the X coordinate value of the grid immediately before or after the intersection in the X-axis direction.

Then, the process proceeds to step 20 to determine whether or not unprocessed line segment data remains in the work direct access device 8 or the work list M. If there remains, the process returns to step 15 and the work direct access device 8 Steps 15 to 20 are repeated until there are no more line segment data in the work list M than line segment data in the work list M. On the other hand, if there are no line segments left, the process ends.

Next, in step 17, the generation process of auxiliary line segments when the intersections of the outline line segments are not on the grid is performed in steps 7 to 1.
This will be explained based on Figure 0.

In FIGS. 7 to 10, black circles (.) indicate grids with minimum spacing for graphic processing, solid lines indicate part of line segments to be processed, and broken lines indicate sweep lines.

When the sweep line comes to the position shown in Figure 7(a),
When it is determined that line segment L20 is valid and line segment L21 is invalid,
As shown in the same figure (b), the effective line segment L20 and the sweep
Line segment L21 when the sweep line is moved one grid point forward (to the right) from the intersection with the line (grid) Gl
An auxiliary line segment C1 is generated up to the intersection (grid) G2. Then, the auxiliary line segment C1 is output as a valid line segment, and the part of the line segment L20 in the section where the auxiliary line segment CI was generated is invalidated, and the part behind the sweep line (
The line segment L20 on the left side) is output as a valid line segment.

When the sweep line comes to the position shown in Figure 8(a),
When it is determined that the line segment L22 is invalid and the line segment L2'3 is valid, the sweep line is moved by 1 from the intersection (grid) G3 of the valid line segment L23 and the sweep line, as shown in FIG. Line segment L2 when moving the grid forward (to the right)
An auxiliary line segment C2 is generated up to the intersection (grid) G4 with 2. Then, output the auxiliary line segment C2 as an effective line segment,
Line segment L23 in the section where the auxiliary line segment C2 was generated
The line segment L23 at the rear (left side) of the sweep line is output as a valid line segment.

When the sweep line comes to the position shown in Figure 9(a),
Line segment L24. When each of L25 is determined to be valid, the sweep line is moved one grid ahead (to the right) from the current sweep line movement position, as shown in Figure (b).
Intersection (grid) with line segment L24°L25 when moved to G5. Both line segments L24. in the section up to G6. L2
5 is invalidated, and the line segment L24.5 at the rear (left side) of the sweep line is invalidated. Output L25 as an effective line segment.

When the sweep line comes to the position shown in FIG. 10(a), line segment L26. When each L27 is determined to be invalid,
As shown in FIG. 2(b), no processing is performed.

Therefore, when the graphic processing method of this embodiment is applied to the design pattern FO shown in FIG. Similar processing is performed. When the sweep line reaches position 83, line segment LI2. LIO
, LI4°Li2 are taken into the work list M. Then, each line segment L12. LIO, Li2. The judgment values of Li2 are r+1. +, r+2'', r-2J.

It becomes "-1" and line segment L12. Li2 is determined to be valid, and line segments LIO and L14 are determined to be invalid.

At this time, the intersecting line segment L13. For L14, the line segment L13 is valid and the line segment L14 is invalid, so the example shown in FIG. 8 can be applied, and as shown in FIG. )G
Sweep line and line segment L14 from a to position S4
An auxiliary line segment CO is generated up to the intersection (grid) Gb with Gb, and this auxiliary line segment CO is output as an effective line segment.

Also, line segment L1 in the section from position S3 to position S4
3 is invalidated, and the line segment L13 behind (to the left of) the position S3 is output as a valid line segment.

As a result, as shown in FIG. 11, the figure F3 is processed to have the overlapping portion removed, and a minute recess Fa (as shown in FIG. ) can be prevented from occurring, thereby reducing the influence on the LSI circuit.

Note that in this embodiment, the sweep line is scanned in the direction in which the Y-coordinate value increases, and is also translated in the direction in which the X-coordinate value increases; however, the sweep line is not limited to this; - The scanning direction and moving direction of the line may be set arbitrarily.

[Effects of the Invention] As described in detail above, according to the present invention, even when the intersections of the outline segments of a plurality of patterns are not on the grid, patterns can be intersected without producing minute recesses or protrusions. The overlapping portion can be removed, which allows the LSI
It has an excellent effect of reducing the influence on the circuit.

[Brief explanation of the drawing]

1 to 11 are diagrams showing an embodiment embodying the graphic processing method of the present invention, FIG. 1 is a schematic diagram showing the electrical configuration of a graphic processing device, and FIG. 2 is a diagram showing a graphic processing program. Flowchart, Figure 3 is a diagram showing figure line segment data, Figure 4 is a diagram showing the structure of the work list after initial setting, Figure 5 is a diagram showing the structure of the work list after line segments are registered, Figure 6 is a diagram explaining the method of classifying line segments, Figure 7 (a),
(b) is a diagram showing the generation process of auxiliary line segments, and Figure 8 (a)
, (b) is a diagram showing the generation process of auxiliary line segments, and FIG.
), (b) are diagrams showing the auxiliary line segment generation process, FIGS. 10(a) and 10(b) are diagrams showing the auxiliary line segment generation process,
FIG. 1 is an explanatory diagram of the operation in the graphic processing method of one embodiment. FIG. 12 is a diagram showing a design pattern, and FIG. 13 is an explanatory diagram of the operation in a conventional graphic processing method. 9 is a processing list, and 10 is output data. In the figure, 1 is the CPU. 2 is a system control unit; 3 is a graphic data input unit to be processed; 4 is a graphic processing unit; 5 is a drawing data output processing unit; 6 is a control command; 7 is graphic data; 8 is a direct access device for work;・Structure after initial setting of list Figure 5entlne showing the structure of the registration tube
i Fig. 9 A diagram showing the generation process y1 of an auxiliary line segment (a) Fig. 10 A diagram showing the generation process y1 of an auxiliary line segment (a) -Real I! Fig. 12 is an explanatory diagram of the operation of the example graphic processing method. Fig. 13 is a diagram showing possible design turns.

Claims (1)

[Scope of Claims] When performing graphic processing for creating a drawn figure by removing overlapping parts from the graphic data of a design pattern composed of a plurality of patterns having overlapping parts, a plurality of patterns are arranged at minimum intervals for the graphic processing. The scanning line passing through the grid is moved parallel to the design pattern in one direction, and at each position of the scanning line, all outline segments of each pattern that intersect the same scanning line at right angles or obliquely are determined. Based on whether each contour line segment obtained at each movement position is inside the design pattern, it is determined whether each contour line segment at each movement position is invalid or valid, and the valid contour line segments are first determined to be valid. In a graphic processing method in which a portion from a determined scanning line movement position to a scanning line movement position determined to be invalid is output as a valid line segment, each outline line obtained at each movement position of the scanning line. When outline line segments intersect with each other between the current scanning line movement position and the next grid ahead in the scanning line movement direction, only one of the intersecting outline line segments is valid. In this case, an auxiliary line segment is generated from the intersection of the current scanning line and the valid outline line segment to the next grid in front of the scanning line in the moving direction, and the effective outline line segment is generated in the section where the auxiliary line segment is generated. is invalidated, the auxiliary line segment is output as a valid line segment, and if the intersecting contour line segments are valid, scanning is performed from the intersection of the current scanning line and both contour line segments. A graphic processing method characterized in that both outline line segments in a section up to the next grid in the forward direction of line movement are invalidated.