JPH0492644U - - Google Patents

Info

Publication number
JPH0492644U
JPH0492644U JP40631490U JP40631490U JPH0492644U JP H0492644 U JPH0492644 U JP H0492644U JP 40631490 U JP40631490 U JP 40631490U JP 40631490 U JP40631490 U JP 40631490U JP H0492644 U JPH0492644 U JP H0492644U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40631490U
Other versions
JPH0737316Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP40631490U priority Critical patent/JPH0737316Y2/ja
Publication of JPH0492644U publication Critical patent/JPH0492644U/ja
Application granted granted Critical
Publication of JPH0737316Y2 publication Critical patent/JPH0737316Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP40631490U 1990-12-28 1990-12-28 基板搬送用ロボットチャックの洗浄装置 Expired - Lifetime JPH0737316Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40631490U JPH0737316Y2 (ja) 1990-12-28 1990-12-28 基板搬送用ロボットチャックの洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40631490U JPH0737316Y2 (ja) 1990-12-28 1990-12-28 基板搬送用ロボットチャックの洗浄装置

Publications (2)

Publication Number Publication Date
JPH0492644U true JPH0492644U (ja) 1992-08-12
JPH0737316Y2 JPH0737316Y2 (ja) 1995-08-23

Family

ID=31883591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40631490U Expired - Lifetime JPH0737316Y2 (ja) 1990-12-28 1990-12-28 基板搬送用ロボットチャックの洗浄装置

Country Status (1)

Country Link
JP (1) JPH0737316Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016167553A (ja) * 2015-03-10 2016-09-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置及びそのチャック洗浄方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016167553A (ja) * 2015-03-10 2016-09-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置及びそのチャック洗浄方法

Also Published As

Publication number Publication date
JPH0737316Y2 (ja) 1995-08-23

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term