JPH0491906U - - Google Patents

Info

Publication number
JPH0491906U
JPH0491906U JP40175890U JP40175890U JPH0491906U JP H0491906 U JPH0491906 U JP H0491906U JP 40175890 U JP40175890 U JP 40175890U JP 40175890 U JP40175890 U JP 40175890U JP H0491906 U JPH0491906 U JP H0491906U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40175890U
Other languages
Japanese (ja)
Other versions
JP2555685Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990401758U priority Critical patent/JP2555685Y2/en
Publication of JPH0491906U publication Critical patent/JPH0491906U/ja
Application granted granted Critical
Publication of JP2555685Y2 publication Critical patent/JP2555685Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP1990401758U 1990-12-25 1990-12-25 Article storage facilities in clean rooms Expired - Fee Related JP2555685Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990401758U JP2555685Y2 (en) 1990-12-25 1990-12-25 Article storage facilities in clean rooms

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990401758U JP2555685Y2 (en) 1990-12-25 1990-12-25 Article storage facilities in clean rooms

Publications (2)

Publication Number Publication Date
JPH0491906U true JPH0491906U (en) 1992-08-11
JP2555685Y2 JP2555685Y2 (en) 1997-11-26

Family

ID=31879797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990401758U Expired - Fee Related JP2555685Y2 (en) 1990-12-25 1990-12-25 Article storage facilities in clean rooms

Country Status (1)

Country Link
JP (1) JP2555685Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005311260A (en) * 2004-04-26 2005-11-04 Hitachi Plant Eng & Constr Co Ltd Storage chamber for liquid crystal substrate
WO2014184990A1 (en) * 2013-05-16 2014-11-20 村田機械株式会社 Stacker crane

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044403A (en) * 1983-08-17 1985-03-09 Daifuku Co Ltd Load hold installation in clean room
JPS638105A (en) * 1986-06-26 1988-01-13 Mitsubishi Electric Corp Clean storage device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044403A (en) * 1983-08-17 1985-03-09 Daifuku Co Ltd Load hold installation in clean room
JPS638105A (en) * 1986-06-26 1988-01-13 Mitsubishi Electric Corp Clean storage device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005311260A (en) * 2004-04-26 2005-11-04 Hitachi Plant Eng & Constr Co Ltd Storage chamber for liquid crystal substrate
WO2014184990A1 (en) * 2013-05-16 2014-11-20 村田機械株式会社 Stacker crane
JP6004099B2 (en) * 2013-05-16 2016-10-05 村田機械株式会社 Stacker crane
TWI567022B (en) * 2013-05-16 2017-01-21 Murata Machinery Ltd Stacking crane
US9809433B2 (en) 2013-05-16 2017-11-07 Murata Machinery, Ltd. Stacker crane

Also Published As

Publication number Publication date
JP2555685Y2 (en) 1997-11-26

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