JPH048989A - Connecting device of metallic apparatus and nonmetallic flange - Google Patents

Abstract

PURPOSE:To prevent a crack of a quartz pipe and to improve the airtightness by providing an elastic member between a flange of a nonmetallic material and a metallic apparatus, and holding the flange with the metallic apparatus through the elastic member. CONSTITUTION:In a structure in which a metallic apparatus 1 of a stainless steel or the like, and a nonmetallic material 2 of quartz or the like are connected, an O ring 3 made of a fluorine rubber is arranged between the flange of a quartz pipe 2 and the flange of a stainless steel 1, so as to maintain the airtightness. Furthermore, the first a member part 4 and the second member part 5 of a fluorine resin sheet, for example, which have an elasticity to disperse the fastening force to prevent the direct contact of the stainless steel 1 and the quartz pipe 2 are provided. A fastening member part 6 is pressed to the flange of the quartz pipe 2, and connected by using a bolt 7. As a result, a crack of the quartz tube and the like can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an airtight connection device between a metal device and a non-metallic flange.

[Summary of the invention]

The present invention relates to a structure that maintains airtightness by connecting a metal device and a non-metallic device, such as a flange provided at one end of a quartz tube. By configuring a connecting device from first and second devices having elasticity to maintain airtightness, a sealing material to maintain airtightness, and a tightening device, airtightness between the metal device and the non-metallic flange can be maintained. This makes it possible to provide a semiconductor manufacturing apparatus with improved and clean reaction atmosphere.

[Conventional technology]

Conventionally, in order to connect metal equipment of semiconductor manufacturing equipment to dissimilar materials such as quartz tubes, +1) As shown in FIG. A synthetic resin tube 14 is used to connect between the two.

(2) As shown in FIG. 5, the rubber O-ring 3 is used as a sealing material and the O-ring retainer 15. The quartz tube 2 and the metal body holder are connected using the play holes 7.

(3) As shown in Fig. 6, the tip of the quartz tube 2 is made into a flange, and the rubber O-ring 3 is used as a sealing material for the bolt 7.
A method such as connecting the quartz tube 2 and the metal body 16 using a metal body 16 is adopted.

[Problem to be solved by the invention]

However, in method (1), the airtightness of the synthetic resin tube is not good, so there is a large amount of external leakage, and fine particles are generated from the synthetic resin tube.

(In method 21, a quartz tube is inserted into the O-ring part of the body 16, which creates a dead zone where gas accumulates. Furthermore, the cross section of the quartz tube is limited to a cylindrical shape, resulting in insufficient dimensional accuracy. This may cause external leaks.

(Method No. 31 improves the shortcomings of Method (No. 11, f21) and can be applied to quartz tubes of any cross-sectional shape, but it has many problems such as the tightening applied for connection easily breaks the quartz tube due to force, making it impractical. It had

[Means to solve the problem]

In order to solve the above problems, in the present invention, in order to maintain airtightness by connecting a metal device and a flange provided at one end of a non-metallic material, for example, a quartz tube, a connecting device is provided between the two. A contact M device was constructed of first and second devices having elasticity for dispersing the tightening force applied to the device, a sealing material for maintaining airtightness, and the tightening device.

[Effect]

By using the connecting device configured as described above, the force of the tightening applied to connect the metal equipment and the non-metallic flange can be dispersed, so that cracking of the quartz tube can be prevented. Additionally, metal equipment with excellent airtightness can be connected with non-metallic flanges.

〔Example〕

Embodiments of the present invention will be described below based on the drawings. 1st
The figure shows a first embodiment of the present invention, including a gas supply system, a quartz tube 2. Stainless steel T-shaped tube 12. This figure shows a semiconductor manufacturing apparatus composed of a door 8 and an exhaust device. FIG. 2 is a sectional view of the connection vtWA portion of FIG. 1. In FIG. 2, reference numeral 1 indicates a metal device, such as a stainless steel flange, and 2 indicates a quartz tube, to which the quartz tube 2 and the metal device 1 are connected. 3 uses a sealing material that maintains airtightness, such as a fluororubber O-ring. Reference numerals 4 and 5 refer to first and second devices having elasticity for dispersing force for tightening to prevent direct contact between the metal material and the quartz, and use, for example, fluororesin sheets.

6 is a tightening device divided into 27 parts, which has the function of uniformly pressing the flange portion of the quartz tube 2 against the metal device 1 over the entire circumference with the convex portion 6a, and uses the bolt 7 to tighten the quartz tube 2. The metal equipment 1 is connected to. At this time, the tightening force applied for connection is given by the difference between the thickness of the second elastic device 5 and the depth of the groove provided in the device 6 in which the prefix device 5 is accommodated. . Therefore, when making a connection, it is sufficient to use the bolt 7 and tighten it until it is completely tightened, and the connection can be made reliably without regard to the experience or feeling of the operator.

In the present invention, the flange surface of the quartz tube 2 is optically polished to reduce the surface roughness, thereby improving airtightness and requiring less force for tightening. There is no need to apply unnecessary force.

FIG. 3 shows another embodiment according to the invention, in which the metal instrument 1
It has a structure in which a water channel 9 through which water flows to cool the seal portion is provided inside. Incidentally, as shown in the embodiment shown in FIG. 1, for example, in the semiconductor manufacturing process, the reaction between the semiconductor wafer 1o and the supplied gas is often carried out at a high temperature. At this time, the connecting device A is also exposed to a relatively high temperature due to the heat from the heating system 11. Therefore, deterioration of airtightness due to deterioration of the sealing material is prevented, and furthermore, the gas released from the sealing material and the gas permeation are minimized.

In the tightening device used in the present invention, the contact surface with the quartz tube, sealing material, and metal flange is pressed over the entire circumference,
There are no restrictions as long as the structure maintains a close contact.Furthermore, tightening should be done in such a way that the groove depth of the device and the thickness of the second device with elasticity should be adjusted to provide an appropriate amount of compression for the ○-ring from the viewpoint of airtightness. The invention is not limited to the above embodiments, and may be modified without departing from the spirit thereof.

〔Effect of the invention〕

The tightening applied for the connection according to the invention can prevent the quartz tube from cracking due to force. In addition, at the connection part, (11) the amount of external leakage is reduced to the utmost, eliminating air pollution.

(2) Punto zones where gas accumulates no longer exist.

(3) The amount of gas released from the sealing material can be minimized.

As a result, it is possible to provide a semiconductor manufacturing apparatus in which the reaction atmosphere is purified.

[Brief explanation of drawings]

1 is a schematic diagram of a semiconductor manufacturing apparatus embodying the present invention, FIG. 2 is a cross-sectional view of part A of the connection device in FIG. 1, FIG. 3 is a cross-sectional view showing another embodiment of the present invention, and FIG. 5 and 6 are cross-sectional views of conventional connection methods. ...Metal equipment...Quartz tube...0-ring 5...First and second equipment...Tightening equipment...Bolts...Door...Waterway...Semiconductor wafer heating system stainless steel T-shape metal pipe Synthetic resin tube 0-ring presser body plate Applicant Seiko Electronics Co., Ltd. Agent Patent attorney Takayuki Hayashi Sukehonko Niktsu Gen Toho Hishibo Tsuma Rensashi E9 Iku 1 T1 view No. Figure 3 Figure Figure Figure 3

Claims (4)

[Claims] (1) In a flange structure that connects a metal device and a flange made of a non-metallic material to maintain airtightness, an elastic material is placed between the flange portion of the non-metallic material and the metal device. A device for connecting a metal device and a non-metallic flange, characterized in that the flange portion is held between the metal devices via the elastic material, and the non-metallic flange and the metal device are connected. (2) The device for connecting a metal device and a non-metallic flange according to item 1, further comprising a water channel through which water for cooling passes through one or both of the metal device and the tightening device. (3) The device for connecting metal equipment and a non-metallic flange according to item 1 or 2, wherein the surface roughness of the non-metallic flange surface is 1 μm or less. (4) The reaction chamber is composed of a chamber made of a non-metallic material having the non-metallic flange, and
4. A semiconductor manufacturing device comprising the connection device according to item 1 or 3.