JPH0489547U - - Google Patents

Info

Publication number
JPH0489547U
JPH0489547U JP40126190U JP40126190U JPH0489547U JP H0489547 U JPH0489547 U JP H0489547U JP 40126190 U JP40126190 U JP 40126190U JP 40126190 U JP40126190 U JP 40126190U JP H0489547 U JPH0489547 U JP H0489547U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40126190U
Other languages
Japanese (ja)
Other versions
JPH089162Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP40126190U priority Critical patent/JPH089162Y2/ja
Publication of JPH0489547U publication Critical patent/JPH0489547U/ja
Application granted granted Critical
Publication of JPH089162Y2 publication Critical patent/JPH089162Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP40126190U 1990-12-04 1990-12-04 基板保持装置 Expired - Lifetime JPH089162Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40126190U JPH089162Y2 (ja) 1990-12-04 1990-12-04 基板保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40126190U JPH089162Y2 (ja) 1990-12-04 1990-12-04 基板保持装置

Publications (2)

Publication Number Publication Date
JPH0489547U true JPH0489547U (cs) 1992-08-05
JPH089162Y2 JPH089162Y2 (ja) 1996-03-13

Family

ID=31879384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40126190U Expired - Lifetime JPH089162Y2 (ja) 1990-12-04 1990-12-04 基板保持装置

Country Status (1)

Country Link
JP (1) JPH089162Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06267902A (ja) * 1993-02-06 1994-09-22 Hyundai Electron Ind Co Ltd イーシーアール装置
US8815015B2 (en) 2008-05-15 2014-08-26 Samsung Display Co., Ltd. Apparatus and method for fabricating organic light emitting diode display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06267902A (ja) * 1993-02-06 1994-09-22 Hyundai Electron Ind Co Ltd イーシーアール装置
US8815015B2 (en) 2008-05-15 2014-08-26 Samsung Display Co., Ltd. Apparatus and method for fabricating organic light emitting diode display device

Also Published As

Publication number Publication date
JPH089162Y2 (ja) 1996-03-13

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