JPH0488033U - - Google Patents
Info
- Publication number
- JPH0488033U JPH0488033U JP1990403615U JP40361590U JPH0488033U JP H0488033 U JPH0488033 U JP H0488033U JP 1990403615 U JP1990403615 U JP 1990403615U JP 40361590 U JP40361590 U JP 40361590U JP H0488033 U JPH0488033 U JP H0488033U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- shaft
- plates
- oil chamber
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920001971 elastomer Polymers 0.000 claims description 2
- 239000000806 elastomer Substances 0.000 claims description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990403615U JPH079375Y2 (ja) | 1990-12-18 | 1990-12-18 | ウエ−ハ接着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990403615U JPH079375Y2 (ja) | 1990-12-18 | 1990-12-18 | ウエ−ハ接着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0488033U true JPH0488033U (is) | 1992-07-30 |
JPH079375Y2 JPH079375Y2 (ja) | 1995-03-06 |
Family
ID=31881367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990403615U Expired - Lifetime JPH079375Y2 (ja) | 1990-12-18 | 1990-12-18 | ウエ−ハ接着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH079375Y2 (is) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009131920A (ja) * | 2007-11-29 | 2009-06-18 | Ebara Corp | 研磨装置及び方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4675929B2 (ja) * | 2007-04-05 | 2011-04-27 | シャープ株式会社 | インクジェットヘッドの製造装置およびそれを用いるインクジェットヘッドの製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5932135A (ja) * | 1982-08-18 | 1984-02-21 | Toshiba Corp | 半導体ウエハの接着装置 |
-
1990
- 1990-12-18 JP JP1990403615U patent/JPH079375Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5932135A (ja) * | 1982-08-18 | 1984-02-21 | Toshiba Corp | 半導体ウエハの接着装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009131920A (ja) * | 2007-11-29 | 2009-06-18 | Ebara Corp | 研磨装置及び方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH079375Y2 (ja) | 1995-03-06 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |