JPH0488033U - - Google Patents

Info

Publication number
JPH0488033U
JPH0488033U JP1990403615U JP40361590U JPH0488033U JP H0488033 U JPH0488033 U JP H0488033U JP 1990403615 U JP1990403615 U JP 1990403615U JP 40361590 U JP40361590 U JP 40361590U JP H0488033 U JPH0488033 U JP H0488033U
Authority
JP
Japan
Prior art keywords
housing
shaft
plates
oil chamber
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990403615U
Other languages
English (en)
Japanese (ja)
Other versions
JPH079375Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990403615U priority Critical patent/JPH079375Y2/ja
Publication of JPH0488033U publication Critical patent/JPH0488033U/ja
Application granted granted Critical
Publication of JPH079375Y2 publication Critical patent/JPH079375Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990403615U 1990-12-18 1990-12-18 ウエ−ハ接着装置 Expired - Lifetime JPH079375Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990403615U JPH079375Y2 (ja) 1990-12-18 1990-12-18 ウエ−ハ接着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990403615U JPH079375Y2 (ja) 1990-12-18 1990-12-18 ウエ−ハ接着装置

Publications (2)

Publication Number Publication Date
JPH0488033U true JPH0488033U (OSRAM) 1992-07-30
JPH079375Y2 JPH079375Y2 (ja) 1995-03-06

Family

ID=31881367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990403615U Expired - Lifetime JPH079375Y2 (ja) 1990-12-18 1990-12-18 ウエ−ハ接着装置

Country Status (1)

Country Link
JP (1) JPH079375Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009131920A (ja) * 2007-11-29 2009-06-18 Ebara Corp 研磨装置及び方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4675929B2 (ja) * 2007-04-05 2011-04-27 シャープ株式会社 インクジェットヘッドの製造装置およびそれを用いるインクジェットヘッドの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932135A (ja) * 1982-08-18 1984-02-21 Toshiba Corp 半導体ウエハの接着装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932135A (ja) * 1982-08-18 1984-02-21 Toshiba Corp 半導体ウエハの接着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009131920A (ja) * 2007-11-29 2009-06-18 Ebara Corp 研磨装置及び方法

Also Published As

Publication number Publication date
JPH079375Y2 (ja) 1995-03-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term