JPH0487961A - Doubly packaged body and packaging method therefor - Google Patents

Abstract

PURPOSE:To obtain a packaged body on the surface of which dust does not adhere, and through the packaging material of which dust of the composition does not pass by using a packaging material with specified oxygen permeating speed, permeability to water vapor and dust collecting efficiency, as a gas permeable packaging material. CONSTITUTION:For a doubly packaged body for which a single packaged body 60 which is packaged by a gas permeable packaging material 31 is packaged by a gas permeable packaging material 21, for the gas permeable packaging material 21, a packaging material of which oxygen permeating speed is not less than l000ml/m<2>.Atm.Day, of which permeability to water vapor is not less than 1g/m<2>.Day, and of which collecting efficiency for dust of 0.3mum is not less than 50% is used; or a packaging material of which oxygen permeating speed is not less than l000ml/m<2>.Atm.Day, of which permeability to water vapor is not less than 1g/m<2>.Day, and which is formed into a bag, and on the outer surface of which open holes do not exist is used. After a doubly packaged body has been actually formed, a quantity of dust on the surface of the bag is not more than 5X10<4>/10X10cm<2>.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention relates to a double package of a rust preventive agent suitable for preserving raw materials used in the manufacture of electronic parts, electronic products, particularly parts of semiconductor devices, and raw materials used in the manufacture of semiconductor devices. Regarding.

(Prior Art) Attempts have been made to package compositions with anti-corrosion properties in packaging materials and use them to preserve electronic parts, parts of electronic products, particularly semiconductor devices, and raw materials necessary for the manufacture of semiconductor devices. . A packaging material made by laminating paper and perforated plastic film is commonly used as a breathable packaging material.

However, when a rust preventive composition is packaged using this packaging material, dust floating in the atmosphere is attracted by the static electricity of the packaging material and adheres to the surface of the packaging material. If it is used as it is to store electronic parts, electronic products, particularly parts of semiconductor devices, and raw materials for manufacturing semiconductor devices, it is undesirable because it will contaminate the objects to be stored, short-circuit the electric circuit, or cause rust in the circuit.

On the other hand, in Japanese Patent Application Laid-Open No. 63-55075, an oxygen absorber double package is disclosed in which the oxygen absorber package is packaged inside an air-permeable outer bag made of a plastic film with holes of 0.2 to 2 mm in diameter. has been proposed, but since the diameter of the perforated holes is large, dust of the oxygen scavenger composition passes through the perforated portion, making it impossible to prevent dust contamination.

(Problems to be Solved by the Invention) In view of the above-mentioned problems, the present invention aims to provide a package in which dust does not adhere to the surface of the package and in which dust of the composition does not pass through the packaging material.

(Means for Solving the Problems) The present invention provides a single package in which a rust preventive composition is packaged in a breathable packaging material (1) and a double package in which a rust preventive composition is packaged in a breathable packaging material (2). In the body, the permeation rate of phosphorus as air permeable packaging material (2) is 10,100O! / m' ・Atm
- Day or more, using packaging material with moisture permeability of 1 g/m' Day or more and 0.3μ dust collection efficiency of 50% or more, or oxygen permeation rate of 1000 ma
l/m' ・Atm ・Day or more, moisture permeability 1g/m
Using a packaging material that is 1-Day or more and has no openings on the outer surface after forming the bag, the number of dust particles on the surface of the bag after forming the double package is 5 x 104 pieces/IO
Regarding the double packaging body characterized by the fact that It is isolated from the place where it is manufactured, and the working atmosphere is free of 0.
The present invention relates to a method for packaging a double-packed body as described above, characterized in that the packaging is carried out while supplying nitrogen gas or air in which the number of dust particles of 3 μ or more is 3×10 4 particles/1 cubic foot or less.

The rust preventive composition of the present invention is a composition that absorbs one or more substances that adversely affect rust prevention, such as oxygen, moisture, and acidic substances, or a composition that evaporates a volatile rust preventive agent. ．． ．． 5 Although not particularly limited, it is not 0. For example, a composition characterized by containing an organic compound such as an unsaturated aliphatic hydrocarbon, an unsaturated aliphatic compound, glycerin, catechol, glucose, or ascorbic acid as a main ingredient, and a substance that promotes oxygen absorption, or Compositions characterized by having metal powders such as iron, nickel, and copper as the main ingredient and containing substances that promote oxygen absorption, or compositions containing desiccants such as silica gel and zeolite, or compositions containing amine compounds, etc. Examples include compositions containing volatile rust inhibitors. The shape of this composition is not particularly limited, but examples include granules, sheets, tablets, and films.

The breathable packaging material (1) of the present invention is for packaging a composition, and has an oxygen permeation rate of 1000 mI! , /m'-At
The material is not particularly limited as long as it has a moisture permeability of 1 g/m" day or more and a moisture permeability of 1 g/m" mouth or more and is normally used as a packaging material for rust preventive agents.

Breathable packaging material (1) The packaging method is to align the low softening point perforated film sides of the packaging material on the composition side, seal by heat pressure using a hot plate or ultrasonic irradiation, and cut with a heated cutter. The packaging method is not particularly limited as long as the composition can be packaged.

The breathable packaging material (2) is used to further package the package into a double package that prevents dust from adhering to or passing through, and has an oxygen permeation rate of 10,100 O/ml-Atm-Da.
y or more, moisture permeability is 1 g/m"Day or more, and 0.
Packaging material (2)-A, which is made by laminating a microporous film with a perforated low softening point film such as polyethylene or a copolymer of polyacrylic acid and polyethylene on a microporous film with a dust collection efficiency of 50% or more, or polyethylene or A perforated low-softening point film made of polyacrylic acid and polyethylene copolymer, etc. can be used with paper made of natural pulp or synthetic pulp, synthetic paper, nonwoven fabric manufactured by the Subabond method (e.g. Tyvek manufactured by DuPont), microporous film, etc. A packaging material (2>-B, etc.) in which an oxygen-permeable resin such as a silicone resin or polybutadiene is laminated on the opposite side of the perforated low softening point film of the packaging material laminated on the base material and has no openings.

A packaging method in which a single-layer package wrapped with breathable packaging material (1) is wrapped with breathable packaging material (2) is to align the low softening point perforated film surfaces of packaging material (2) on the side of the single-layer package,
The packaging is carried out by a sealing method using a hot plate, heat pressure using ultrasonic irradiation, etc., and the packaging method itself is not particularly limited as long as the package can be wrapped.

During this packaging, remove the dust adhering to the surface of the air-permeable packaging material (2) opposite to the low softening point film, and reduce the number of dust particles of 0.3μ or more to 5 x 104 pieces/10 x 10
cm2 or less, preferably ], X 10' pieces/10
x 10cm2 or less and package. Methods for removing dust include neutralizing and removing static electricity caused by electrical discharge, suspending the dust, and suctioning it, applying ultrasonic waves to suspend the dust, and suctioning it off. A method of removing dust by adhering it to the roll side by adhering it to the air-permeable packaging material (2), and then peeling off the adhesive sheet. There are ways to do it.

Furthermore, an adhesive sheet with adhesive applied to the surface of a base material such as paper or film is adhered to the air-permeable packaging material (2) and packaged as is, and the resulting double package is placed in the system together with the object to be stored. The adhesive sheet may be peeled off just before sealing. At this time, if necessary, the dust remaining on the surface after peeling off the adhesive sheet may be removed by the method described above. Note that a double package with a pressure-sensitive adhesive sheet adhered to its surface greatly restricts the permeation of oxygen and moisture, suppresses deterioration of rust preventive performance, and can be left in the atmosphere for a long period of time.

When wrapping a package of breathable packaging material (1) with breathable packaging material (2) from which dust has been removed by the above method, the place where the package of breathable packaging material (1) is manufactured is separated from the place where the work is carried out. The number of dust particles of 0.3 μ or more in the atmosphere is 3 x 1. Q
Packaging is carried out while supplying nitrogen gas or air at a rate of 1 cubic foot or less.

(Effects of the Invention) A double package characterized in that the anticorrosive composition of the present invention is packaged in a breathable packaging material (1) and the package is packaged in a breathable packaging material (2). Because there is little dust attached to the surface of the package, when it is used to store electronic parts, electronic products, especially parts of semiconductor devices, and raw materials necessary for the manufacture of semiconductor devices, the objects to be stored may be contaminated with dust and electrical It is now possible to store the circuit properly without shorting or rusting the circuit.

Example 1 [Manufacture of breathable packaging material (1)] Perforated polyethylene (B type manufactured by Nippon ALC Q@) was pressed onto pure white roll paper (basis weight 50 g/m') at a pressure of 5 kg/ciJ, A pair of rolls consisting of a paper heated roll (temperature 200°C) and a perforated polyethylene side roll (temperature 100°C)
The paper and perforated polyethylene were laminated by sandwiching them at a speed of m/min.

Example 2 [Manufacture of breathable packaging material (2)] Silicone resin monomer (SD7328 manufactured by Toray Silicone Co., Ltd., resin content 30% toluene solvent) 100% on high-quality paper (basis weight 50 g/m')
Part of the catalyst (SRχ212 manufactured by Toray Silicon G) 0.6
1 part and 500 parts of toluene, and put the solution on paper 1
20g/ml was coated and the silicone resin was polymerized at 140°C for 1 minute.

Open-hole polyethylene (open-hole B type, manufactured by Shin Nihon ALC Co., Ltd.) was laminated on the opposite side of the paper coated with this silicone resin. PET is applied to the silicone resin coated side of this packaging material.
13 butyl polyacrylate on film (thickness 12μ)
A packaging material was manufactured by adhering the adhesive sheet coated with g/m'. After peeling off the adhesive sheet adhered to this packaging material, oxygen permeation rate, moisture permeability, and dust count were measured.

The results are shown in Table-1.

Table 1 (Measurement method) Oxygen permeation rate ASTM D1434 (50RH, 23°C) Moisture permeability ASTM E96-E (90RH,) Dust number 3 #/min. Count the number of dust particles of 0.3 μ or more in the air that come out by hitting 10 x 110 x 10 sheets of plastic packaging material (
This was measured using a MODEL 208L (manufactured by Swaya Transtec Co., Ltd.), and was used as the number of dust attached to the surface of the packaging material.

Example 3 [Production of breathable packaging material (2)] Microporous film (GTAFL9 manufactured by Japan Voretex ■)
It was manufactured by laminating open-pore polyethylene (open-hole B type, manufactured by Shin Nippon ALC Co., Ltd.) on 504, 0.3μ dust collection efficiency: 67%). A packaging material was produced by adhering a PET film (thickness: 12 μm) with an adhesive sheet coated with butyl polyacrylate at 13 g/m' to the microporous film surface of this packaging material. After peeling off the adhesive sheet adhered to this packaging material, oxygen permeation rate, moisture permeability, and dust count were measured. The results are shown in Table-2.

Table 2 (Measurement method) Oxygen permeation rate ASTM D1434 (50 RI) Moisture permeability ASTM E96-E (90 RI (dust number 3 A/min), air-permeable packaging of the example in a cleaned air 11" air flowing at a rate of 3 A/min) Hit 21 pieces of material 10 x 10 cm, and count the number of dust particles of 0.3μ or more in the air that come out (manufactured by Swire Transtech, MODEL).
208L), and this was taken as the number of dust attached to the surface of the packaging material.

Example 4 (Production of granular antirust composition) 0.2 g of cobalt naphthenate in 1.0 g of soybean oil fatty acid
After melting and impregnating 5g of granular activated carbon, 0.5g of slaked lime
A granular composition was prepared by sprinkling g on the surface of granular activated carbon.

Example 5 (Manufacture of sheet-like antirust composition) 0.3 g of tall oil fatty acid cobalt was added to a mixture of 0.5 g of butadiene polymer and 0.5 g of tall oil fatty acid, and the basis weight was 100 g.
/ m' Kraft valve sheet 5 x 5 cm2 impregnated sheet (I) and glycerin (for dynamite) 0.
A mixture of 7g and 0.1g of triethanolamine with a basis weight of 1
A sheet (n) impregnated into a kraft valve sheet 5×5 cm 2 of 00 g/m′ was manufactured.

Example 6 (Manufacture of granular rust-preventing composition package) Breathable packaging material manufactured in Example 1 (1) 140X70
Fold the mm in half with the perforated polyethylene side facing inside, wrap 2.5 g of the anticorrosive composition produced in Example 4 and 2.5 g of granular calcium oxide, and heat seal the periphery to create a 70 x 70 mm package. was manufactured. (Hereinafter referred to as heavy packaging.) Example 7 (Manufacture of sheet-like rust-preventing composition packaging) The breathable packaging material produced in Example 1 (1
) 140 x 70 mm with the perforated polyethylene side inside, fold it in half and use the rust-preventing sheet 1-(I
) and (II), heat-seal the periphery and make a 70X7
A 0 mm package was manufactured. (Hereinafter referred to as heavy packaging.

) Example 8 (Manufacture of double packaging body) The packaging material manufactured in Example 6.7 and the packaging material 80 x 160 mm manufactured in Example 2.3 were passed through an adhesive roll coated with polybutyl acrylate to remove dust. After removing it, fold it in half with the perforated polyethylene side inside, and
．． A double package of 80 x 80 mm was manufactured by heat sealing the periphery in an atmosphere in which air was introduced in which the number of dust particles of 3μ or more was 5000 pieces/1 cubic foot or less.

Example 9 (Application of sputtering target) After peeling off the adhesive sheet of the double package produced in Example 8, a sputtering target made of this and aluminum for vapor deposition, which is a wiring material for an IC to be incorporated into a semiconductor device (
(diameter 300mm) and vinylidene chloride 2μ/stretched nylon 15μ/polyethylene 50μ bag (500x500m
When it was stored for 3 months at 25° C. and 60% RH, there was no discoloration due to rust on the copper plate fixing the aluminum for deposition of the sputtering target. Further, when an IC was manufactured using this sputter link target, the IC could be used satisfactorily without dust contamination.

Comparative Example 1 The same method as in Example 9 was used except that the package used in Example 9 was the one produced in Example 6.7 instead of the double package in Example 8. During the manufacturing process, the inside of the deposition chamber was seriously contaminated with dust, and it took more than 12 hours to remove the dust by replacing the argon gas, resulting in a large loss in the manufacturing of IC chips.

Comparative Example 2 Instead of the double packaging body used in Example 9, the single packaging body produced in Example 6.7 was replaced with a PET 12μ/PE30μ perforated film (average perforation diameter 2mm). Porosity 15%) / pure white paper (50g/m')
/ PE 50μ perforated film (average perforation diameter 2mm
The process was carried out in the same manner as in Example 9, except that a double package was used, which was wrapped in the same manner as in Example 8 using a laminated breathable packaging material with a porosity of 15%). The dust contamination was so severe that it took more than 10 hours to remove the dust by replacing with argon gas, resulting in a large loss in the production of IC chips.

Example 10 (Number of dust) In the air after cleaning flowing at a speed of 3β/min,
One double package of Example 8 and one package of Comparative Example 1.2 were hit, and the number of dust particles of 0.3μ or more that came out into the air was measured using a counter (manufactured by Swire Transtic Co., Ltd., M
ODEL208L), and this was taken as the number of dust attached to the surface of the package. The results are shown in Table-3.

Table 3 Figure 3 shows an embodiment in which an adhesive sheet is adhered to the breathable packaging material (2).

Figure 4 shows one embodiment of a single-layer package containing a rust preventive composition.

FIG. 5 shows an embodiment of a double package in which the single package is further wrapped with a breathable packaging material (2).

Each number in the figure indicates the following.

10 Oxygen permeable resin 21 MiJ"L microporous film 22 Substrate-1, non-woven fabric or paper 3] Perforated low-softening point film 32 Perforated low-softening point non-woven fabric 41 Substrate-2, film or paper 42 Adhesive 50 Rust composition 6〇 - heavy packaging

[Brief explanation of drawings]

Figures 1 and 2 respectively show embodiments of the breathable packaging material (2) used in the present invention.

Claims (1)

[Scope of Claims] [1] A single package in which the anticorrosion composition is packaged in a breathable packaging material (1) and a double package in which the anticorrosive composition is packaged in a breathable packaging material (2), The packaging material (2) has an oxygen permeability rate of 1000 ml/m^2・Atm・Day or more, a moisture permeability of 1 g/m^2・Day or more, and 0.3
Use packaging materials with μ dust collection efficiency of 50% or more, or use packaging materials with an oxygen permeation rate of 1000 ml/m^2・At
The surface of the bag after actually forming a double package using a packaging material that has a moisture permeability of 1 g/m^2・Day or more and has no openings on the outer surface after forming the bag. The number of dust particles larger than 0.3μ is 5 x 10^4/10 x 1
A double package characterized by being 0cm^2 or less. [2] When packaging the package of breathable packaging material (1) with breathable packaging material (2), the place is separated from the place where the package of breathable packaging material (1) is manufactured, and the working atmosphere is .The method for packaging a double-wrapped body according to claim 1, characterized in that the packaging is carried out while feeding nitrogen gas or air so that the number of dust particles of 3μ or more is 3×10^4 pieces/1 cubic foot or less.