JPH0487648U - - Google Patents
Info
- Publication number
- JPH0487648U JPH0487648U JP13021190U JP13021190U JPH0487648U JP H0487648 U JPH0487648 U JP H0487648U JP 13021190 U JP13021190 U JP 13021190U JP 13021190 U JP13021190 U JP 13021190U JP H0487648 U JPH0487648 U JP H0487648U
- Authority
- JP
- Japan
- Prior art keywords
- conductive substrate
- wafer
- circumferential side
- fixed
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13021190U JPH0487648U (sv) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13021190U JPH0487648U (sv) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487648U true JPH0487648U (sv) | 1992-07-30 |
Family
ID=31877569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13021190U Pending JPH0487648U (sv) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487648U (sv) |
-
1990
- 1990-11-30 JP JP13021190U patent/JPH0487648U/ja active Pending