JPH0485728U - - Google Patents
Info
- Publication number
- JPH0485728U JPH0485728U JP13036790U JP13036790U JPH0485728U JP H0485728 U JPH0485728 U JP H0485728U JP 13036790 U JP13036790 U JP 13036790U JP 13036790 U JP13036790 U JP 13036790U JP H0485728 U JPH0485728 U JP H0485728U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer jig
- changed
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13036790U JPH0485728U (el) | 1990-11-29 | 1990-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13036790U JPH0485728U (el) | 1990-11-29 | 1990-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485728U true JPH0485728U (el) | 1992-07-24 |
Family
ID=31877717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13036790U Pending JPH0485728U (el) | 1990-11-29 | 1990-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485728U (el) |
-
1990
- 1990-11-29 JP JP13036790U patent/JPH0485728U/ja active Pending