JPH0485444U - - Google Patents

Info

Publication number
JPH0485444U
JPH0485444U JP12887690U JP12887690U JPH0485444U JP H0485444 U JPH0485444 U JP H0485444U JP 12887690 U JP12887690 U JP 12887690U JP 12887690 U JP12887690 U JP 12887690U JP H0485444 U JPH0485444 U JP H0485444U
Authority
JP
Japan
Prior art keywords
circumferential grooves
base plate
circumferential
intake holes
transparent plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12887690U
Other languages
English (en)
Japanese (ja)
Other versions
JP2531653Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12887690U priority Critical patent/JP2531653Y2/ja
Publication of JPH0485444U publication Critical patent/JPH0485444U/ja
Application granted granted Critical
Publication of JP2531653Y2 publication Critical patent/JP2531653Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP12887690U 1990-11-30 1990-11-30 露光装置のベース板装置 Expired - Lifetime JP2531653Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12887690U JP2531653Y2 (ja) 1990-11-30 1990-11-30 露光装置のベース板装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12887690U JP2531653Y2 (ja) 1990-11-30 1990-11-30 露光装置のベース板装置

Publications (2)

Publication Number Publication Date
JPH0485444U true JPH0485444U (US06229276-20010508-P00022.png) 1992-07-24
JP2531653Y2 JP2531653Y2 (ja) 1997-04-09

Family

ID=31876314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12887690U Expired - Lifetime JP2531653Y2 (ja) 1990-11-30 1990-11-30 露光装置のベース板装置

Country Status (1)

Country Link
JP (1) JP2531653Y2 (US06229276-20010508-P00022.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007079103A (ja) * 2005-09-14 2007-03-29 Ono Sokki Co Ltd フィルム保持板、フィルム保持機構、露光機の整合装置
JP2014074888A (ja) * 2012-09-13 2014-04-24 Nippon Mektron Ltd フォトマスク、フォトマスク組、露光装置および露光方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007079103A (ja) * 2005-09-14 2007-03-29 Ono Sokki Co Ltd フィルム保持板、フィルム保持機構、露光機の整合装置
JP2014074888A (ja) * 2012-09-13 2014-04-24 Nippon Mektron Ltd フォトマスク、フォトマスク組、露光装置および露光方法

Also Published As

Publication number Publication date
JP2531653Y2 (ja) 1997-04-09

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