JPH0485243U - - Google Patents
Info
- Publication number
- JPH0485243U JPH0485243U JP12811890U JP12811890U JPH0485243U JP H0485243 U JPH0485243 U JP H0485243U JP 12811890 U JP12811890 U JP 12811890U JP 12811890 U JP12811890 U JP 12811890U JP H0485243 U JPH0485243 U JP H0485243U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sensor chip
- diaphragm
- metal
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12811890U JPH081467Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12811890U JPH081467Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0485243U true JPH0485243U (tr) | 1992-07-24 |
| JPH081467Y2 JPH081467Y2 (ja) | 1996-01-17 |
Family
ID=31875592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12811890U Expired - Lifetime JPH081467Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081467Y2 (tr) |
-
1990
- 1990-11-30 JP JP12811890U patent/JPH081467Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH081467Y2 (ja) | 1996-01-17 |
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