JPH0485141U - - Google Patents
Info
- Publication number
- JPH0485141U JPH0485141U JP12760090U JP12760090U JPH0485141U JP H0485141 U JPH0485141 U JP H0485141U JP 12760090 U JP12760090 U JP 12760090U JP 12760090 U JP12760090 U JP 12760090U JP H0485141 U JPH0485141 U JP H0485141U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- probe nozzle
- tube body
- series
- supply port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 5
- 239000000523 sample Substances 0.000 claims description 5
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 239000000344 soap Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000008929 regeneration Effects 0.000 claims 1
- 238000011069 regeneration method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12760090U JPH0485141U (ko) | 1990-11-29 | 1990-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12760090U JPH0485141U (ko) | 1990-11-29 | 1990-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485141U true JPH0485141U (ko) | 1992-07-23 |
Family
ID=31875094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12760090U Pending JPH0485141U (ko) | 1990-11-29 | 1990-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485141U (ko) |
-
1990
- 1990-11-29 JP JP12760090U patent/JPH0485141U/ja active Pending