JPH0484785U - - Google Patents

Info

Publication number
JPH0484785U
JPH0484785U JP12926190U JP12926190U JPH0484785U JP H0484785 U JPH0484785 U JP H0484785U JP 12926190 U JP12926190 U JP 12926190U JP 12926190 U JP12926190 U JP 12926190U JP H0484785 U JPH0484785 U JP H0484785U
Authority
JP
Japan
Prior art keywords
partition plate
stage side
stage
suction
air chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12926190U
Other languages
English (en)
Japanese (ja)
Other versions
JP2528144Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12926190U priority Critical patent/JP2528144Y2/ja
Publication of JPH0484785U publication Critical patent/JPH0484785U/ja
Application granted granted Critical
Publication of JP2528144Y2 publication Critical patent/JP2528144Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP12926190U 1990-11-30 1990-11-30 ２段形液封式真空ポンプ Expired - Fee Related JP2528144Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12926190U JP2528144Y2 (ja) 1990-11-30 1990-11-30 ２段形液封式真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12926190U JP2528144Y2 (ja) 1990-11-30 1990-11-30 ２段形液封式真空ポンプ

Publications (2)

Publication Number Publication Date
JPH0484785U true JPH0484785U (OSRAM) 1992-07-23
JP2528144Y2 JP2528144Y2 (ja) 1997-03-05

Family

ID=31876672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12926190U Expired - Fee Related JP2528144Y2 (ja) 1990-11-30 1990-11-30 ２段形液封式真空ポンプ

Country Status (1)

Country Link
JP (1) JP2528144Y2 (OSRAM)

Also Published As

Publication number Publication date
JP2528144Y2 (ja) 1997-03-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees