JPH048429U - - Google Patents

Info

Publication number
JPH048429U
JPH048429U JP4923390U JP4923390U JPH048429U JP H048429 U JPH048429 U JP H048429U JP 4923390 U JP4923390 U JP 4923390U JP 4923390 U JP4923390 U JP 4923390U JP H048429 U JPH048429 U JP H048429U
Authority
JP
Japan
Prior art keywords
waveguide
heat extraction
dielectric window
extraction body
interposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4923390U
Other languages
English (en)
Japanese (ja)
Other versions
JP2510166Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4923390U priority Critical patent/JP2510166Y2/ja
Publication of JPH048429U publication Critical patent/JPH048429U/ja
Application granted granted Critical
Publication of JP2510166Y2 publication Critical patent/JP2510166Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4923390U 1990-05-11 1990-05-11 プラズマプロセス装置 Expired - Lifetime JP2510166Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4923390U JP2510166Y2 (ja) 1990-05-11 1990-05-11 プラズマプロセス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4923390U JP2510166Y2 (ja) 1990-05-11 1990-05-11 プラズマプロセス装置

Publications (2)

Publication Number Publication Date
JPH048429U true JPH048429U (cs) 1992-01-27
JP2510166Y2 JP2510166Y2 (ja) 1996-09-11

Family

ID=31566746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4923390U Expired - Lifetime JP2510166Y2 (ja) 1990-05-11 1990-05-11 プラズマプロセス装置

Country Status (1)

Country Link
JP (1) JP2510166Y2 (cs)

Also Published As

Publication number Publication date
JP2510166Y2 (ja) 1996-09-11

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term