JPH048429U - - Google Patents
Info
- Publication number
- JPH048429U JPH048429U JP4923390U JP4923390U JPH048429U JP H048429 U JPH048429 U JP H048429U JP 4923390 U JP4923390 U JP 4923390U JP 4923390 U JP4923390 U JP 4923390U JP H048429 U JPH048429 U JP H048429U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- heat extraction
- dielectric window
- extraction body
- interposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4923390U JP2510166Y2 (ja) | 1990-05-11 | 1990-05-11 | プラズマプロセス装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4923390U JP2510166Y2 (ja) | 1990-05-11 | 1990-05-11 | プラズマプロセス装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH048429U true JPH048429U (cs) | 1992-01-27 |
| JP2510166Y2 JP2510166Y2 (ja) | 1996-09-11 |
Family
ID=31566746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4923390U Expired - Lifetime JP2510166Y2 (ja) | 1990-05-11 | 1990-05-11 | プラズマプロセス装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2510166Y2 (cs) |
-
1990
- 1990-05-11 JP JP4923390U patent/JP2510166Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2510166Y2 (ja) | 1996-09-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |