JPH0481004U - - Google Patents
Info
- Publication number
- JPH0481004U JPH0481004U JP12548190U JP12548190U JPH0481004U JP H0481004 U JPH0481004 U JP H0481004U JP 12548190 U JP12548190 U JP 12548190U JP 12548190 U JP12548190 U JP 12548190U JP H0481004 U JPH0481004 U JP H0481004U
- Authority
- JP
- Japan
- Prior art keywords
- slider
- coarse
- movement device
- fine movement
- moving means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第1図は本考案の一実施例を示す図である。
1……ベース、2,3……サポートナツト、4
,5……案内板、6……スライダ、7,8……ば
ね、9,10……スクリユウ。
,5……案内板、6……スライダ、7,8……ば
ね、9,10……スクリユウ。
Claims (1)
- 基台上でスライダを一方向に往復移動させる粗
微動装置において、前記スライダを挟んで対向し
て配置されスライダを移動させる一対の移動手段
と、該移動手段とスライダの間に設けられた弾性
係数の異なる弾性体とからなることを特徴とする
粗微動装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12548190U JPH0481004U (ja) | 1990-11-28 | 1990-11-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12548190U JPH0481004U (ja) | 1990-11-28 | 1990-11-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0481004U true JPH0481004U (ja) | 1992-07-15 |
Family
ID=31873077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12548190U Pending JPH0481004U (ja) | 1990-11-28 | 1990-11-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0481004U (ja) |
-
1990
- 1990-11-28 JP JP12548190U patent/JPH0481004U/ja active Pending