JPH0480042U - - Google Patents
Info
- Publication number
- JPH0480042U JPH0480042U JP12538890U JP12538890U JPH0480042U JP H0480042 U JPH0480042 U JP H0480042U JP 12538890 U JP12538890 U JP 12538890U JP 12538890 U JP12538890 U JP 12538890U JP H0480042 U JPH0480042 U JP H0480042U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- drying
- semiconductor wafer
- groove
- blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12538890U JPH0480042U (id) | 1990-11-27 | 1990-11-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12538890U JPH0480042U (id) | 1990-11-27 | 1990-11-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0480042U true JPH0480042U (id) | 1992-07-13 |
Family
ID=31872988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12538890U Pending JPH0480042U (id) | 1990-11-27 | 1990-11-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0480042U (id) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012142343A (ja) * | 2010-12-28 | 2012-07-26 | Fujitsu Semiconductor Ltd | 洗浄方法及び洗浄装置 |
-
1990
- 1990-11-27 JP JP12538890U patent/JPH0480042U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012142343A (ja) * | 2010-12-28 | 2012-07-26 | Fujitsu Semiconductor Ltd | 洗浄方法及び洗浄装置 |