JPH0479435U - - Google Patents
Info
- Publication number
- JPH0479435U JPH0479435U JP12411890U JP12411890U JPH0479435U JP H0479435 U JPH0479435 U JP H0479435U JP 12411890 U JP12411890 U JP 12411890U JP 12411890 U JP12411890 U JP 12411890U JP H0479435 U JPH0479435 U JP H0479435U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- transporting
- hole
- adsorbing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
Landscapes
- Rollers For Roller Conveyors For Transfer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12411890U JPH0479435U (fr) | 1990-11-26 | 1990-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12411890U JPH0479435U (fr) | 1990-11-26 | 1990-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0479435U true JPH0479435U (fr) | 1992-07-10 |
Family
ID=31871786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12411890U Pending JPH0479435U (fr) | 1990-11-26 | 1990-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0479435U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010116248A (ja) * | 2008-11-13 | 2010-05-27 | Ihi Corp | 浮上搬送装置及び搬送ローラ |
| KR101365851B1 (ko) * | 2006-12-22 | 2014-02-21 | 엘지디스플레이 주식회사 | 글래스 반송 장치 |
-
1990
- 1990-11-26 JP JP12411890U patent/JPH0479435U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101365851B1 (ko) * | 2006-12-22 | 2014-02-21 | 엘지디스플레이 주식회사 | 글래스 반송 장치 |
| JP2010116248A (ja) * | 2008-11-13 | 2010-05-27 | Ihi Corp | 浮上搬送装置及び搬送ローラ |