JPH0479417U - - Google Patents

Info

Publication number
JPH0479417U
JPH0479417U JP12131490U JP12131490U JPH0479417U JP H0479417 U JPH0479417 U JP H0479417U JP 12131490 U JP12131490 U JP 12131490U JP 12131490 U JP12131490 U JP 12131490U JP H0479417 U JPH0479417 U JP H0479417U
Authority
JP
Japan
Prior art keywords
wafer stage
wafer
reduction lens
foreign matter
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12131490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12131490U priority Critical patent/JPH0479417U/ja
Publication of JPH0479417U publication Critical patent/JPH0479417U/ja
Pending legal-status Critical Current

Links

JP12131490U 1990-11-21 1990-11-21 Pending JPH0479417U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12131490U JPH0479417U (US20100268047A1-20101021-C00003.png) 1990-11-21 1990-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12131490U JPH0479417U (US20100268047A1-20101021-C00003.png) 1990-11-21 1990-11-21

Publications (1)

Publication Number Publication Date
JPH0479417U true JPH0479417U (US20100268047A1-20101021-C00003.png) 1992-07-10

Family

ID=31869174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12131490U Pending JPH0479417U (US20100268047A1-20101021-C00003.png) 1990-11-21 1990-11-21

Country Status (1)

Country Link
JP (1) JPH0479417U (US20100268047A1-20101021-C00003.png)

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