JPH0479180A - Ionized gas generating device - Google Patents

Abstract

PURPOSE:To lengthen the life of each electrode as well as to exhibit stable ionizing capacity for a long time by disposing the tip end of a corona discharge electrode in the open structure of a container made of electrical insulating material, and thereby placing a selective electrode in a container filled with pure water, which is made of electrical insulating material. CONSTITUTION:Pure water is supplied into a container 2 made of electrical insulating material so that the tip end of a corona discharge electrode 1 shall be placed in pure water, and under this condition, high voltage is applied between the corona discharge electrode 1 and a counter electrode 6. In the neighborhood of the tip end of the corona discharge electrode 1 where intensive electric field is formed, water molucules are dissociated into H<+> ions and OH<+> ions, ions the polarities of which are opposite to the counter electrode 6, are pulled to the counter electrode, so that they go into air out of the gap of the container. Since water molucules are apt to be ionized much easier than oxygen and nitrogen, a great amount of ions is herein generated at voltage lower than that of a case when ions are in air. By this constitution, the life of each electrode can thereby be lengthened, and metal particles can be prevented from being mixed in ionized gas.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an apparatus for generating ionized gas used to neutralize electrical charges accumulated on the surfaces of various objects.

[Prior Art] Ionized gas generators commonly used in the past have a needle-shaped electrode and a plate-shaped counter electrode facing each other with an appropriate distance between them. , 000V is applied to form a non-uniform electric field, thereby causing corona discharge near the tip of the needle electrode.

In this ionized gas generator, the issues were ensuring the stability of corona discharge and the purity of the generated ionized gas. In other words, the tip of the needle electrode that generates corona discharge is sharp to lower the discharge starting voltage, but it is subject to severe wear due to discharge, and the needle tip of the commonly used tungsten electrode or stainless steel electrode is sharpened due to discharge. As it becomes thicker little by little, the electric field strength around it gradually decreases. When discharged, the corona discharge gradually weakens and the number of generated ions decreases, so the electrodes had to be replaced frequently.

In addition to simply causing a decline in performance, the metal at the tip of the electrode becomes particles of approximately 0.1 to 0.01 μm and scatters.
Since it enters the ionized gas, it produces a contaminated ionized gas that cannot be used as it is in fields such as the semiconductor industry where submicron dust is also averse.

[Problems to be Solved by the Invention] Therefore, an object of the present invention is to provide an ionized gas generation device that has a longer electrode life than conventional ionized gas generation devices and is free from the risk of gold and am particles being mixed into the ionized gas. There is a particular thing.

Means for Solving the Problems The present invention provides an apparatus for generating ionized gas by corona discharge, in which a corona discharge electrode is disposed in an electrically insulating container having an open structure in the direction of the tip of the electrode, and the electrically insulating A body-shaped container was filled with pure water so that the electrode tip was placed in the pure water.

K action) When generating ionized gas using the ionized gas generator of the present invention, supply pure water to an electrically insulating container so that the tip of the corona discharge electrode is placed in the pure water, and adjust the state A high voltage of about 3,0 OOV or more is applied between the corona discharge electrode and the counter electrode. Near the tip of the corona discharge electrode where a strong electric field is formed, water molecules dissociate into H" ions and Kano 1 ions, and ions of opposite polarity are attracted to the opposite electrode and exit into the air from the gap in the container. Because it ionizes more easily than oxygen or nitrogen, a large amount of ions are generated at a lower voltage than when the electrode is in air.

[Example] The corona discharge electrode 1 installation part of the illustrated embodiment is made by tapering the tip of a glass funnel-shaped container 2 to form a capillary gap 3, and fitting a sealing lid 4 on the opposite side, and then A needle-like corona discharge electrode 1 made of tungsten is fixed in a horizontally arranged structure with the needle-like tip 1a facing toward the capillary gap 3 from the side of the airtight lid 4, and pure water W can be supplied through the pipe 5. This is what I did. It should be noted that water pressure is not applied to the pure water W in the container 2 to the extent that the pure water is forced out of the capillary gap 3.

Pure water is only replenished from the vibrator 5 in an amount corresponding to the amount consumed by discharge. The counter electrode 6 is a flat plate made of stainless steel. The corona discharge electrode 1 mounting portion and the counter electrode 6 are fixed to opposing walls of a duct 7 having a square cross section, with the needle-like corona discharge electrode 1 facing the center of the counter electrode 6. At the top of the duct 7 there is a blower 8 and a high-performance air filter 9.
Cleaned air is sent to the above-mentioned electrode installation area.

In addition to these, there is a high voltage power supply (not shown), which can apply a high voltage necessary for maintaining corona discharge between the corona discharge electrode 1 and the counter electrode 6.

The polarity of the electrode is changed depending on the type of ionized gas required. That is, when + ions are required, the corona discharge electrode 1 side is set to +, and when - ions are required, the corona discharge electrode 1 side is set to -.

If you want to generate both + ions and 1 ions, apply an AC high voltage. The voltage required to maintain corona discharge is approximately 3,000~s, ooov, and in conventional ionized gas generators that do not use water, the voltage is approximately 5,000~7 s, ooov.
,000V is required, which is much lower than that required.

To further explain the case of generating ten ions,
While the blower 8 is operated to flow clean air into the electrode installation area, a high voltage is applied to the corona discharge electrode 1 with + and the counter electrode 6 with -. As a result, a strong non-uniform electric field is formed near the tip of the corona discharge electrode 1, and corona discharge begins. At this time, water molecules dissociate into H+ ions and Kano- ions,
The leaf ions are attracted to the corona discharge electrode 1, while the H+ ions are attracted to the counter electrode 6 and exit from the container 4 through the capillary gap 3, and most of them are carried by the clean air flow and sent downward in the drawing.

Depending on the size of the capillary gap 3, pure water W that is not ionized
The water droplets may fly out in the form of a mist, but if this poses an obstacle to the use of the ionized gas, the water droplets can be vaporized by heating with an electric heater or the like.

In the above embodiment, the corona discharge electrode 1 consists of a single needle-like electrode, but if necessary, a plurality of electrodes can be arranged in parallel to increase the ion generation ability. In that case, it is preferable to distribute power in parallel with needle-like corona discharge electrodes in a container made of an insulating material provided with a slit-like capillary gap, with the tip facing the slit-like capillary gap.

(Effect of K light) As mentioned above, all ionized gas generation in this defense is performed by placing a corona discharge electrode in an electrically insulating container with a dissolving structure in the direction of the tip of the electrode, and pouring pure water into the electrically insulating container. The electrode tip is placed in pure water,
Compared to conventional ionized gas generators, it is possible to generate a large amount of ions with a lower voltage.

Furthermore, since the electrode placed in pure water does not turn into fine particles and scatter, the electrode has a long lifespan and exhibits stable ionization ability over a long period of time. Furthermore, since metal particles originating from the electrodes are not mixed into the ionized gas, it can be used as is in applications where mixing of metal particles is not desirable.

[Brief explanation of the drawing]

The drawings are schematic vertical cross-sectional views showing essential parts of embodiments of the present invention. 1...Corona discharge electrode, 2...Glass container.

Claims (1)

[Claims] 1. In a device that generates ionized gas by corona discharge, a corona discharge electrode is placed in an electrically insulating container with an open structure toward the tip of the electrode, and the electrically insulating container is filled with pure water and the electrode is An ionized gas generator characterized in that its tip is placed in pure water.