JPH0478934U - - Google Patents
Info
- Publication number
- JPH0478934U JPH0478934U JP12278390U JP12278390U JPH0478934U JP H0478934 U JPH0478934 U JP H0478934U JP 12278390 U JP12278390 U JP 12278390U JP 12278390 U JP12278390 U JP 12278390U JP H0478934 U JPH0478934 U JP H0478934U
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- vacuum
- workpiece
- vacuum space
- closing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12278390U JPH0478934U (OSRAM) | 1990-11-22 | 1990-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12278390U JPH0478934U (OSRAM) | 1990-11-22 | 1990-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478934U true JPH0478934U (OSRAM) | 1992-07-09 |
Family
ID=31870535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12278390U Pending JPH0478934U (OSRAM) | 1990-11-22 | 1990-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478934U (OSRAM) |
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1990
- 1990-11-22 JP JP12278390U patent/JPH0478934U/ja active Pending