JPH0478266U - - Google Patents
Info
- Publication number
- JPH0478266U JPH0478266U JP11964090U JP11964090U JPH0478266U JP H0478266 U JPH0478266 U JP H0478266U JP 11964090 U JP11964090 U JP 11964090U JP 11964090 U JP11964090 U JP 11964090U JP H0478266 U JPH0478266 U JP H0478266U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cooling device
- raw material
- material gas
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11964090U JPH0478266U (cs) | 1990-11-14 | 1990-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11964090U JPH0478266U (cs) | 1990-11-14 | 1990-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478266U true JPH0478266U (cs) | 1992-07-08 |
Family
ID=31867585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11964090U Pending JPH0478266U (cs) | 1990-11-14 | 1990-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478266U (cs) |
-
1990
- 1990-11-14 JP JP11964090U patent/JPH0478266U/ja active Pending