JPS6255557U - - Google Patents
Info
- Publication number
- JPS6255557U JPS6255557U JP14607785U JP14607785U JPS6255557U JP S6255557 U JPS6255557 U JP S6255557U JP 14607785 U JP14607785 U JP 14607785U JP 14607785 U JP14607785 U JP 14607785U JP S6255557 U JPS6255557 U JP S6255557U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- locking portion
- guide groove
- electronic components
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985146077U JPH0248424Y2 (cs) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985146077U JPH0248424Y2 (cs) | 1985-09-24 | 1985-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6255557U true JPS6255557U (cs) | 1987-04-06 |
| JPH0248424Y2 JPH0248424Y2 (cs) | 1990-12-19 |
Family
ID=31058208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985146077U Expired JPH0248424Y2 (cs) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248424Y2 (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5360381A (en) * | 1976-11-11 | 1978-05-30 | Mitsubishi Electric Corp | Planetary for vacuum evaporation |
-
1985
- 1985-09-24 JP JP1985146077U patent/JPH0248424Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5360381A (en) * | 1976-11-11 | 1978-05-30 | Mitsubishi Electric Corp | Planetary for vacuum evaporation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0248424Y2 (cs) | 1990-12-19 |