JPH0478264U - - Google Patents
Info
- Publication number
- JPH0478264U JPH0478264U JP11880790U JP11880790U JPH0478264U JP H0478264 U JPH0478264 U JP H0478264U JP 11880790 U JP11880790 U JP 11880790U JP 11880790 U JP11880790 U JP 11880790U JP H0478264 U JPH0478264 U JP H0478264U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pivot hole
- holder
- front surface
- peripheral wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11880790U JPH0478264U (en, 2012) | 1990-11-15 | 1990-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11880790U JPH0478264U (en, 2012) | 1990-11-15 | 1990-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478264U true JPH0478264U (en, 2012) | 1992-07-08 |
Family
ID=31866773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11880790U Pending JPH0478264U (en, 2012) | 1990-11-15 | 1990-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478264U (en, 2012) |
-
1990
- 1990-11-15 JP JP11880790U patent/JPH0478264U/ja active Pending
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