JPH0478264U - - Google Patents
Info
- Publication number
- JPH0478264U JPH0478264U JP11880790U JP11880790U JPH0478264U JP H0478264 U JPH0478264 U JP H0478264U JP 11880790 U JP11880790 U JP 11880790U JP 11880790 U JP11880790 U JP 11880790U JP H0478264 U JPH0478264 U JP H0478264U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pivot hole
- holder
- front surface
- peripheral wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図〜第３図は本考案の一実施例を示したも
ので、第１図は基板ホルダの正面図、第２図は第
１図の−線に沿う拡大断面図、第３図は基板
固定片の拡大図である。第４図はスパツタ装置の
構成図、第５図は従来の基板ホルダの斜視図、第
６図は第５図の−線に沿う拡大断面図である
。
２１……ホルダ本体、２１ａ……周壁、２２…
…基板収容凹部、２３……基板固定片、２４……
枢支孔、２５……支軸、２６……ストツパ、Ａ…
…被成膜基板。
1 to 3 show an embodiment of the present invention, in which FIG. 1 is a front view of the substrate holder, FIG. 2 is an enlarged sectional view taken along the line - in FIG. 1, and FIG. FIG. 3 is an enlarged view of a board fixing piece. FIG. 4 is a configuration diagram of a sputtering device, FIG. 5 is a perspective view of a conventional substrate holder, and FIG. 6 is an enlarged sectional view taken along the line - in FIG. 5. 21... Holder main body, 21a... Peripheral wall, 22...
... Board housing recess, 23... Board fixing piece, 24...
Pivot hole, 25... Support shaft, 26... Stopper, A...
...Substrate to be film-formed.
Claims (1)
を垂直に保持する基板ホルダにおいて、前面に前
記被成膜基板をほぼ密に嵌込み収容する矩形状の
基板収容凹部を形成した垂直板状ホルダ本体の前
記基板収容凹部を囲む周壁の前面に、その上辺部
の両端部と両側辺部の下端部とにそれぞれ位置さ
せて、一端から他端に向かつて広幅となる形状を
なしかつ中心から狭幅端に偏つた位置に枢支孔を
形成した４個の基板固定片を配設し、これら基板
固定片は、前記ホルダ本体の周壁の前面にその内
周縁から前記基板固定片の狭幅端と枢支孔との距
離より大きく広幅端と枢支孔との距離より小さな
間隔をとつて設けた支軸に前記枢支孔を枢支して
回転可能に設けるとともに、前記ホルダ本体の周
壁の両側辺部に、この両側辺部の前記基板固定片
をその広幅端が前記基板収容凹部に向いた横向き
状態において下方から受止めるストツパを設けた
ことを特徴とするスパツタ装置用基板ホルダ。 A vertical plate-shaped holder that vertically holds a substrate on which a film is to be deposited by a patching device, and has a rectangular substrate accommodating recess formed in the front surface to fit and accommodate the substrate to be deposited almost densely. On the front surface of the peripheral wall that surrounds the board storage recess of the main body, the grooves are located at both ends of the upper side and at the lower ends of both sides, and have a shape that becomes wider from one end to the other end and narrows from the center. Four board fixing pieces each having a pivot hole formed at a position biased toward the width end are arranged, and these board fixing pieces are attached to the front surface of the peripheral wall of the holder body from the inner peripheral edge to the narrow end of the board fixing piece. The pivot hole is rotatably supported on a support shaft provided with an interval larger than the distance between the wide end and the pivot hole and smaller than the distance between the wide end and the pivot hole, and the peripheral wall of the holder main body is A substrate holder for a sputtering apparatus, characterized in that stoppers are provided on both side portions to receive the substrate fixing pieces on both side portions from below in a horizontal state with their wide ends facing the substrate accommodating recess.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11880790U JPH0478264U (en) | 1990-11-15 | 1990-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11880790U JPH0478264U (en) | 1990-11-15 | 1990-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478264U true JPH0478264U (en) | 1992-07-08 |
Family
ID=31866773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11880790U Pending JPH0478264U (en) | 1990-11-15 | 1990-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478264U (en) |
-
1990
- 1990-11-15 JP JP11880790U patent/JPH0478264U/ja active Pending
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