JPH0478080B2 - - Google Patents
Info
- Publication number
- JPH0478080B2 JPH0478080B2 JP58203606A JP20360683A JPH0478080B2 JP H0478080 B2 JPH0478080 B2 JP H0478080B2 JP 58203606 A JP58203606 A JP 58203606A JP 20360683 A JP20360683 A JP 20360683A JP H0478080 B2 JPH0478080 B2 JP H0478080B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- ultrasonic transducer
- aspherical surface
- desired spherical
- damping member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000013016 damping Methods 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005498 polishing Methods 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000002033 PVDF binder Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- MUJOIMFVNIBMKC-UHFFFAOYSA-N fludioxonil Chemical compound C=12OC(F)(F)OC2=CC=CC=1C1=CNC=C1C#N MUJOIMFVNIBMKC-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/30—Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
技術分野
本発明は超音波トランスジユーサの製造方法、
特に超音波放射面を所望の球面または非球面とし
た超音波トランスジユーサの製造方法に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a method for manufacturing an ultrasonic transducer;
In particular, the present invention relates to a method of manufacturing an ultrasonic transducer in which the ultrasonic radiation surface has a desired spherical or aspherical surface.
従来技術
従来、超音波顕微鏡、超音波診断装置、超音波
探傷装置等において、超音波ビームを発生させる
ために超音波トランスジユーサが用いられてい
る。第１図は超音波顕微鏡に用いられる代表的な
超音波トランスジユーサを示すものであり、超音
波振動子１を電極２および３でサンドイツチ状に
挾んだものを超音波伝播媒体より成る音響レンズ
４の一端面に取付け、この音響レンズ４の他端４
ａを凹面状としてレンズ作用を持たせ、超音波ビ
ームを集束するようにしている。このような超音
波トランスジユーサにおいては、音響レンズ４で
の内部反射があり、外部へ放射される超音波ビー
ムのパワーが著しく低下してしまう欠点がある。
すなわち、音響レンズ４をサフアイアで形成する
と、音響レンズ４と被検体５との間に介在する液
体媒質６の音響インピーダンスとサフアイアの音
響インピーダンスとは大きく相違するため、超音
波振動子１から放射された超音波ビームは音響レ
ンズ４と液体媒質６との境界で大部分反射されて
しまうことになる。さらに、従来の音響レンズ４
を構成する材料であるサフアイアは非常に硬度の
高いものであり、その加工は非常に困難である。
したがつて、従来の音響レンズは球面レンズであ
り、収差が問題となると云う欠点もあつた。BACKGROUND ART Conventionally, ultrasonic transducers have been used in ultrasonic microscopes, ultrasonic diagnostic devices, ultrasonic flaw detection devices, and the like to generate ultrasonic beams. Figure 1 shows a typical ultrasonic transducer used in an ultrasonic microscope, in which an ultrasonic transducer 1 is sandwiched between electrodes 2 and 3 in a sandwich-like manner. attached to one end surface of the lens 4, and the other end 4 of this acoustic lens 4.
The concave surface a has a lens effect and focuses the ultrasonic beam. Such an ultrasonic transducer has the drawback that internal reflection occurs at the acoustic lens 4, and the power of the ultrasonic beam radiated to the outside is significantly reduced.
That is, when the acoustic lens 4 is made of saphire, the acoustic impedance of the liquid medium 6 interposed between the acoustic lens 4 and the subject 5 is greatly different from the acoustic impedance of the saphire, so that the ultrasonic transducer 1 emits less energy. Most of the ultrasonic beam will be reflected at the boundary between the acoustic lens 4 and the liquid medium 6. Furthermore, the conventional acoustic lens 4
The material that makes up the sapphire is extremely hard, making it extremely difficult to process.
Therefore, conventional acoustic lenses are spherical lenses, which have the disadvantage of aberrations.
このような欠点を除去するために、水晶板や圧
電磁器超音波振動子の表面を直接研磨し凹面状に
彎曲させることも提案されているが、機械的研磨
を行なつているため超音波振動子の厚さをあまり
薄くすることはできず、十数メガヘルツ以上の超
高周波帯の超音波を発生することはできなかつ
た。また、このような機械的な研磨では非球面を
形成することは困難である。 In order to eliminate these defects, it has been proposed to directly polish the surface of the crystal plate or piezoelectric ultrasonic vibrator to make it curved into a concave shape, but since mechanical polishing is performed, ultrasonic vibration It was not possible to make the thickness of the core very thin, and it was not possible to generate ultrasonic waves in the ultrahigh frequency band of more than 10 megahertz. Further, it is difficult to form an aspherical surface by such mechanical polishing.
さらに上述した欠点を解決するため、特開昭53
−25389号公報には、金属板等の基板に剛球を押
し当てて凹面状のくぼみを形成し、この凹面に超
音波振動子および電極を被着した超音波トランス
ジユーサが示されているが、この場合、金属板に
は弾性変形や塑性変形があるため、剛球によつて
形成した凹面状のくぼみの精度が出にくいと云う
欠点がある。特に、このような方法では非球面を
正確に形成することは実際上きわめて困難であ
る。 Furthermore, in order to solve the above-mentioned drawbacks,
Publication No. 25389 discloses an ultrasonic transducer in which a rigid ball is pressed against a substrate such as a metal plate to form a concave depression, and an ultrasonic transducer and an electrode are attached to this concave surface. In this case, since the metal plate is subject to elastic deformation or plastic deformation, there is a drawback that it is difficult to obtain the precision of the concave depression formed by the hard sphere. In particular, it is actually extremely difficult to accurately form an aspherical surface using such a method.
発明の目的
本発明の目的は上述した従来の欠点を除去し、
音響レンズでの内部反射がなく、しかも超高周波
帯の超音波を放射することができ、しかも所望の
球面または非球面とすることができる超音波トラ
ンスジユーサを容易かつ正確に製造することがで
きる方法を提供しようとするものである。OBJECT OF THE INVENTION The object of the invention is to eliminate the above-mentioned conventional drawbacks,
It is possible to easily and accurately manufacture an ultrasonic transducer that has no internal reflection in an acoustic lens, can emit ultrasonic waves in an ultra-high frequency band, and can have a desired spherical or aspherical surface. It is intended to provide a method.
発明の概要
本発明による超音波トランスジユーサの製造方
法は、一表面を所望の球面または非球面に形成し
た成形型内に超音波に対するダンピング作用を有
するダンピング材料を注入して、一表面に前記所
望の球面または非球面に対応した所望の球面また
は非球面を有するダンピング部材を形成する工程
と、このダンピング部材の、前記所望の球面また
は非球面を有する表面に超音波振動子および電極
を被着する工程とを具えることを特徴とするもの
である。Summary of the Invention A method for manufacturing an ultrasonic transducer according to the present invention includes injecting a damping material having a damping effect on ultrasonic waves into a mold having one surface formed into a desired spherical or aspherical surface. Forming a damping member having a desired spherical or aspherical surface corresponding to the desired spherical or aspherical surface, and attaching an ultrasonic vibrator and an electrode to the surface of the damping member having the desired spherical or aspherical surface. The invention is characterized by comprising the steps of:
実施例
第２図は本発明の超音波トランスジユーサを製
造する順次の工程を示すものである。EXAMPLE FIG. 2 shows the sequential steps for manufacturing the ultrasonic transducer of the present invention.
第２図Ａに示すように、底面１１ａを所望の
面、例えば非球面とした成形型１１を用意する。
この成形型１１は、例えばフツ素樹脂で形成する
ことができる。次に、この成形型１１内にノズル
１２からダンピング材料を注入して成形する。こ
のダンピング材料としては、例えばエポキシ樹脂
に金属粉末を加えたものとすることができる。エ
ポキシ樹脂に加える金属粉末はタングステン、銅
等の比重の大きい金属の粉末とするが、これによ
つて所望のダンピング特性が得られると共にエポ
キシ樹脂の収縮が少なくなり、非球面の寸法精度
が確保されることになる。 As shown in FIG. 2A, a mold 11 is prepared in which the bottom surface 11a is a desired surface, for example, an aspherical surface.
This mold 11 can be made of, for example, fluororesin. Next, damping material is injected into the mold 11 from the nozzle 12 and molded. This damping material may be, for example, an epoxy resin with metal powder added thereto. The metal powder added to the epoxy resin should be a metal powder with a high specific gravity such as tungsten or copper, which will provide the desired damping characteristics, reduce the shrinkage of the epoxy resin, and ensure the dimensional accuracy of the aspheric surface. That will happen.
次に第２図Ｂに示すように、成形型１１内で成
形させたダンピング部材１３を成形型から取出
し、成形型１１の底面１１ａと対応する非球面に
成形された表面にSiO2膜１４をスパツタリング
により一様に被着する。さらに第２図Ｃに示すよ
うにSiO2膜１４上にNi−Cr層およびAu層から成
る下部電極１５を蒸着する。この電極１５は一様
に形成せず、部分的に形成する。これは一様に蒸
着した後、選択的にエツチングして形成すること
ができる。 Next, as shown in FIG. 2B, the damping member 13 molded in the mold 11 is taken out from the mold, and a SiO 2 film 14 is applied to the aspherical surface corresponding to the bottom surface 11a of the mold 11. Apply uniformly by sputtering. Furthermore, as shown in FIG. 2C, a lower electrode 15 consisting of a Ni--Cr layer and an Au layer is deposited on the SiO 2 film 14. This electrode 15 is not formed uniformly but partially. This can be formed by uniformly depositing and then selectively etching.
次に第２図Ｄに示すように圧電材料であるZnO
の超音波振動子１６をスパツタし、さらにその上
にNi−Cr層およびAu層から成る上部電極１７を
蒸着する。この上部電極も部分的に形成する。そ
の後、第２図Ｄにおいて圧電膜１６の、斜線を付
けて示す部分を希硫酸によりエツチング除去して
下部電極１５を露出させて外部リード線を接続で
きるようにする。最後にSiO2膜１８をスパツタ
して第２図Ｅに示すような本発明の超音波トラン
スジユーサが得られる。 Next, as shown in Figure 2D, ZnO, which is a piezoelectric material,
The ultrasonic vibrator 16 is sputtered, and an upper electrode 17 made of a Ni--Cr layer and an Au layer is further deposited thereon. This upper electrode is also partially formed. Thereafter, the hatched portion of the piezoelectric film 16 in FIG. 2D is removed by etching with dilute sulfuric acid to expose the lower electrode 15 so that it can be connected to an external lead wire. Finally, a SiO 2 film 18 is sputtered to obtain the ultrasonic transducer of the present invention as shown in FIG. 2E.
本発明は上述した実施例にのみ限定されるもの
ではなく、幾多の変形が可能である。上述した例
では超音波振動子としてZnOをスパツタにより形
成したが、PVDF樹脂フイルムを用いることもで
きる。この場合には、成形体より成るダンピング
部材の表面に電極をコートした後、その上に
PVDF樹脂フイルムを貼付し、さらにその上に電
極をコートした後絶縁性樹脂を被着する。さらに
上述した例では超音波振動子としてZnO圧電膜を
用いたが、他の材料を用いることも勿論可能であ
る。また、上述した例ではダンピング部材の表面
を非球面としたが、勿論球面とすることもでき
る。 The present invention is not limited to the embodiments described above, but can be modified in many ways. In the above example, ZnO was formed by sputtering as the ultrasonic transducer, but a PVDF resin film may also be used. In this case, after coating the surface of the damping member made of a molded body with an electrode,
A PVDF resin film is attached, an electrode is coated on top of that, and then an insulating resin is applied. Further, in the above example, a ZnO piezoelectric film was used as the ultrasonic transducer, but it is of course possible to use other materials. Further, in the above example, the surface of the damping member is aspherical, but of course it can also be spherical.
発明の効果
本発明によれば成形体より成るダンピング部材
の表面に超音波振動子および電極を被着したた
め、従来の音響レンズを用いる場合のような内部
反射がないので大きなパワーの超音波ビームを被
検体に投射することができる。また、超音波振動
子の共振をダンピング部材によつて有効に抑止す
ることができると共に超音波振動子の厚さは容易
に薄くすることができるので、超高周波帯の超音
波を発生させることができる。さらに、音響レン
ズを研磨したり、超音波振動子を研磨するのに比
べ、遥かに容易に非球面を有する超音波トランス
ジユーサとすることができる。また、成形によつ
て形成するのは音響レンズではなく、ダンピング
部材であるから、精度はレンズに比べて低くても
よく、樹脂により容易に成形することができ、し
かも基体に剛球を押し付けて凹面を形成する場合
に比べると精度は高くなるという利点がある。Effects of the Invention According to the present invention, since an ultrasonic vibrator and an electrode are attached to the surface of a damping member made of a molded body, there is no internal reflection unlike when using a conventional acoustic lens, so that a large power ultrasonic beam can be generated. It can be projected onto the subject. In addition, the resonance of the ultrasonic transducer can be effectively suppressed by the damping member, and the thickness of the ultrasonic transducer can be easily reduced, making it possible to generate ultrasonic waves in the ultra-high frequency band. can. Furthermore, compared to polishing an acoustic lens or polishing an ultrasonic transducer, it is much easier to obtain an ultrasonic transducer having an aspherical surface. In addition, since the damping member is formed by molding rather than an acoustic lens, the precision may be lower than that of a lens, and it can be easily molded using resin. This has the advantage that the accuracy is higher than when forming a .
第１図は音響レンズを有する従来の超音波トラ
ンスジユーサの構成を示す断面図、第２図Ａ〜Ｅ
は本発明による超音波トランスジユーサの順次の
製造工程を示す断面図である。
１１……成形型、１１ａ……非球面、１３……
ダンピング部材、１４……SiO2膜、１５……下
部電極、１６……超音波振動子、１７……上部電
極、１８……SiO2膜。
Figure 1 is a sectional view showing the configuration of a conventional ultrasonic transducer with an acoustic lens, Figures 2 A to E
1A and 1B are cross-sectional views showing sequential manufacturing steps of an ultrasonic transducer according to the present invention. 11... Molding mold, 11a... Aspherical surface, 13...
Damping member, 14...SiO 2 film, 15... Lower electrode, 16... Ultrasonic vibrator, 17... Upper electrode, 18... SiO 2 film.
Claims (1)
成形型内に超音波に対するダンピング作用を有す
るダンピング材料を注入して、一表面に前記所望
の球面または非球面に対応した所望の球面または
非球面を有するダンピング部材を形成する工程
と、このダンピング部材の、前記所望の球面また
は非球面を有する表面に超音波振動子および電極
を被着する工程とを具えることを特徴とする超音
波トランスデユーサの製造方法。1. A damping material having a damping effect on ultrasonic waves is injected into a mold in which one surface is formed into a desired spherical or aspherical surface, and one surface is formed into a desired spherical or aspherical surface corresponding to the desired spherical or aspherical surface. an ultrasonic transducer comprising the steps of: forming a damping member having a desired spherical or aspherical surface; and attaching an ultrasonic vibrator and an electrode to a surface of the damping member having the desired spherical or aspherical surface. Usa manufacturing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58203606A JPS6096996A (en) | 1983-11-01 | 1983-11-01 | Ultrasonic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58203606A JPS6096996A (en) | 1983-11-01 | 1983-11-01 | Ultrasonic transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6096996A JPS6096996A (en) | 1985-05-30 |
| JPH0478080B2 true JPH0478080B2 (en) | 1992-12-10 |
Family
ID=16476823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58203606A Granted JPS6096996A (en) | 1983-11-01 | 1983-11-01 | Ultrasonic transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6096996A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0731170Y2 (en) * | 1989-10-12 | 1995-07-19 | 日立建機株式会社 | Ultrasonic probe |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5325390A (en) * | 1976-08-22 | 1978-03-09 | Noritaka Nakahachi | Ultrasonic transducer |
| JPS53103571A (en) * | 1977-02-22 | 1978-09-08 | Pioneer Electronic Corp | Printed circuit board holder for automatic soldering device |
| JPS587994A (en) * | 1981-07-08 | 1983-01-17 | Toray Ind Inc | Joined material between metallic material and high polymer material |
| JPS587998A (en) * | 1981-07-08 | 1983-01-17 | Toray Ind Inc | Ultrasonic transducer structure material |
-
1983
- 1983-11-01 JP JP58203606A patent/JPS6096996A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5325390A (en) * | 1976-08-22 | 1978-03-09 | Noritaka Nakahachi | Ultrasonic transducer |
| JPS53103571A (en) * | 1977-02-22 | 1978-09-08 | Pioneer Electronic Corp | Printed circuit board holder for automatic soldering device |
| JPS587994A (en) * | 1981-07-08 | 1983-01-17 | Toray Ind Inc | Joined material between metallic material and high polymer material |
| JPS587998A (en) * | 1981-07-08 | 1983-01-17 | Toray Ind Inc | Ultrasonic transducer structure material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6096996A (en) | 1985-05-30 |
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