JPH0477474B2 - - Google Patents

Info

Publication number
JPH0477474B2
JPH0477474B2 JP61274926A JP27492686A JPH0477474B2 JP H0477474 B2 JPH0477474 B2 JP H0477474B2 JP 61274926 A JP61274926 A JP 61274926A JP 27492686 A JP27492686 A JP 27492686A JP H0477474 B2 JPH0477474 B2 JP H0477474B2
Authority
JP
Japan
Prior art keywords
laser
tube
protective frame
gas
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61274926A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63128687A (ja
Inventor
Jutaro Yanagisawa
Etsuo Iizuka
Toshiaki Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP27492686A priority Critical patent/JPS63128687A/ja
Publication of JPS63128687A publication Critical patent/JPS63128687A/ja
Publication of JPH0477474B2 publication Critical patent/JPH0477474B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/036Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
JP27492686A 1986-11-18 1986-11-18 ガスレ−ザ発振装置 Granted JPS63128687A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27492686A JPS63128687A (ja) 1986-11-18 1986-11-18 ガスレ−ザ発振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27492686A JPS63128687A (ja) 1986-11-18 1986-11-18 ガスレ−ザ発振装置

Publications (2)

Publication Number Publication Date
JPS63128687A JPS63128687A (ja) 1988-06-01
JPH0477474B2 true JPH0477474B2 (pt) 1992-12-08

Family

ID=17548468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27492686A Granted JPS63128687A (ja) 1986-11-18 1986-11-18 ガスレ−ザ発振装置

Country Status (1)

Country Link
JP (1) JPS63128687A (pt)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4868997A (pt) * 1971-12-23 1973-09-19
JPS50134792A (pt) * 1974-04-04 1975-10-25

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4868997A (pt) * 1971-12-23 1973-09-19
JPS50134792A (pt) * 1974-04-04 1975-10-25

Also Published As

Publication number Publication date
JPS63128687A (ja) 1988-06-01

Similar Documents

Publication Publication Date Title
US5438587A (en) Preionizer for laser assembly
US5467362A (en) Pulsed gas discharge Xray laser
JP2934511B2 (ja) コロナ放電光源セル及びコロナ放電光源装置
JPH0477474B2 (pt)
US3516012A (en) Argon laser
US3745483A (en) Inert gas laser with continuous gas flow
WO2006035748A1 (ja) Euv発生装置
JP2592821B2 (ja) ガスレーザ装置
EP0319898B1 (en) Metal vapor laser apparatus
US4228407A (en) Ion-beam-excited gas laser
US3783405A (en) Laser having means for defogging the optical cavity thereof
JP2538590B2 (ja) 金属蒸気レ−ザ装置
JP2614231B2 (ja) ガスレーザ装置
JP2913743B2 (ja) X線予備電離ガスレーザ装置
JP2699894B2 (ja) X線予備電離放電励起ガスレーザ装置及びその発振方法
JP2880731B2 (ja) レーザ発振装置
JP2685929B2 (ja) ガスレーザ装置
JPH01228184A (ja) 金属蒸気レーザ発振装置
JPH02123775A (ja) X線予備電離放電励起パルスガスレーザ装置
JPS63199476A (ja) ガスレ−ザ装置
JPH04118981A (ja) X線予備電離型レーザ装置
JP2971595B2 (ja) 金属蒸気レーザ発振管
JP2003142758A (ja) フッ素分子レーザ装置
JPH01128482A (ja) ガスレーザ発振装置
JPH01274485A (ja) パルスレーザ装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees