JPH0476894B2 - - Google Patents

Info

Publication number
JPH0476894B2
JPH0476894B2 JP58188757A JP18875783A JPH0476894B2 JP H0476894 B2 JPH0476894 B2 JP H0476894B2 JP 58188757 A JP58188757 A JP 58188757A JP 18875783 A JP18875783 A JP 18875783A JP H0476894 B2 JPH0476894 B2 JP H0476894B2
Authority
JP
Japan
Prior art keywords
sheet
vibrating body
polarization
electrostrictive element
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58188757A
Other languages
Japanese (ja)
Other versions
JPS6082548A (en
Inventor
Joji Amitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58188757A priority Critical patent/JPS6082548A/en
Publication of JPS6082548A publication Critical patent/JPS6082548A/en
Publication of JPH0476894B2 publication Critical patent/JPH0476894B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00Feeding articles separated from piles; Feeding articles to machines
    • B65H5/008Feeding articles separated from piles; Feeding articles to machines using vibrations

Description

【発明の詳細な説明】 本発明は複写機、フアクシミリ送受信機、印刷
機、ラインプリンタなどの原稿や記録紙等のシー
トを搬送する装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for conveying sheets such as original documents and recording paper, such as copying machines, facsimile transceivers, printing machines, and line printers.

従来の、この種の装置としてフアクシミリ送信
機の原稿シートを搬送する装置の例を第1図に示
し説明する。
An example of a conventional device of this type for conveying a document sheet of a facsimile transmitter is shown in FIG. 1 and will be described.

オペレータは原稿シート1を原稿台2の上に置
き、そのシート1が取り込み用のローラ3によつ
て原稿台2に圧接されるまで押し出す。不図示の
モータによつて駆動されたローラ3の圧接回転に
よりシート1は取り込まれ、搬送ローラ4及び5
のニツプに挾まれ読み取り部14に送られる。送
られてきた原稿シートは蛍光灯6によつて照射さ
れ、その反射光がミラー10及び結像レンズ系1
1によつて光電変換素子のチヤージカツプルデバ
イス(C.C.D.)12に結像され読取られる。読取
られた原稿シートの光信号はC.C.D.12によつ
て、走査電気信号に変換され、増幅などの必要な
処理がなされてから常法に従い送信される。シー
ト1はこのように読取られつつ、排出トレイ7の
上をローラ4及び5により搬送され、排出用のロ
ーラ8及び9によつて排出される。
An operator places a document sheet 1 on a document table 2, and pushes the sheet 1 out until it is pressed against the document table 2 by a take-in roller 3. The sheet 1 is taken in by the pressure rotation of the roller 3 driven by a motor (not shown), and the sheet 1 is taken in by the conveying rollers 4 and 5.
is nipped and sent to the reading section 14. The sent original sheet is illuminated by a fluorescent lamp 6, and the reflected light is reflected by a mirror 10 and an imaging lens system 1.
1, the image is formed on a charge couple device (CCD) 12 of a photoelectric conversion element and read. The optical signal of the read original sheet is converted into a scanning electric signal by the CCD 12, and after being subjected to necessary processing such as amplification, it is transmitted according to a conventional method. While being read in this manner, the sheet 1 is conveyed over the discharge tray 7 by rollers 4 and 5, and is discharged by discharge rollers 8 and 9.

斯る装置でオペレータは原稿シートを、取り込
み用のローラ3に圧接されるまで押し出すことを
うつかり忘れて、原稿シートが原稿台2上に置か
れたままとなつて、装置の故障と誤認することが
ある。また忘れないまでも、原稿シートを押し出
す動作自体が面倒なものである。
In such a device, the operator forgets to push the document sheet out until it comes into contact with the take-in roller 3, and the document sheet remains on the document table 2, which is mistaken as a malfunction in the device. Sometimes. Also, it should be remembered that the operation of pushing out the original sheet itself is troublesome.

このような不便を避けるために、原稿台2を鎖
線示のように傾け原稿シートを自重によつて摺動
させて、取込み用ローラ3に取込ませる構成のも
のがある。しかし原稿台が傾斜していると、オペ
レータの操作性が悪くなる。またシートと原稿台
との摩擦力、シートの紙厚や腰の強さによつて取
り込動作が左右されトラブルの原因となつてい
る。
In order to avoid such inconvenience, there is a structure in which the original platen 2 is tilted as shown by the chain line and the original sheet is slid by its own weight and taken into the taking-in roller 3. However, if the document table is tilted, operability for the operator will be poor. In addition, the loading operation is affected by the frictional force between the sheet and the document table, the thickness of the sheet, and the stiffness of the sheet, causing trouble.

この他にもシートを搬送する装置として種々の
ものが提案され、製品化されている。そのいずれ
もがモータによつて回転駆動されたローラやベル
トなどの摩擦搬送力でシートを搬送するものであ
る。モータからローラやベルトに回転力を伝達す
るギヤなどの伝達系を必要としている。
In addition to this, various other devices for conveying sheets have been proposed and commercialized. In all of these, the sheet is conveyed by the frictional conveying force of rollers or belts rotationally driven by a motor. A transmission system such as gears is required to transmit rotational force from the motor to the rollers and belts.

そのため、伝達系から発生する音が静かなオフ
イスでは騒音となつたり、伝達系に異物が引つか
かつて故障したりする。また、装置の製造時に
は、各製品毎に伝達系の微調整やローラの圧接量
の微調整が必要となつて、手間がかかり装置が高
価なものとなつてしまう。
As a result, the sound generated by the transmission system can become a noise in quiet offices, and foreign objects can get stuck in the transmission system, causing it to malfunction. Furthermore, when manufacturing the device, it is necessary to fine-tune the transmission system and the amount of pressure applied by the rollers for each product, which makes the device expensive and time-consuming.

本発明は従来のシート搬送装置の上記欠点を除
去することを目的としてなされたものである。
The present invention has been made for the purpose of eliminating the above-mentioned drawbacks of conventional sheet conveying devices.

以下本発明の実施例を詳細に説明し、本発明の
構成を明らかにする。
Embodiments of the present invention will be described in detail below to clarify the structure of the present invention.

第2図は本発明の理解を容易とするのシート搬
送装置の実施例の斜視図である。
FIG. 2 is a perspective view of an embodiment of a sheet conveying device to facilitate understanding of the present invention.

同図で原稿シート台17に置かれたシート1は
シート台17に取付けた光電スイツチ25を入れ
る。それによりシート台17の切り欠き面から僅
かに突出した振動体18の裏面に接触配置された
電歪素子19(本図に於て省略)に通電される。
電歪素子19は振動体18を励起して進行性表面
振動波を発生させる。シート1はその進行性表面
振動波によつて読取部14の方向(矢示X方向)
へ搬送される。搬送された原稿シートは、従来の
機器と同じように蛍光灯6で照明され、ミラー1
0・レンズ11でC.C.D.12に入射して読取られ
る。読取られた原稿シートはローラ5によつて排
出トレイ7上に排出搬送される。
In the figure, a photoelectric switch 25 attached to the sheet table 17 is turned on for the sheet 1 placed on the original sheet table 17. As a result, an electrostrictive element 19 (not shown in the figure) placed in contact with the back surface of the vibrating body 18 slightly protruding from the cutout surface of the seat base 17 is energized.
The electrostrictive element 19 excites the vibrating body 18 to generate progressive surface vibration waves. The sheet 1 moves in the direction of the reading section 14 (arrow X direction) due to its progressive surface vibration waves.
transported to. The conveyed original sheet is illuminated with a fluorescent lamp 6 as in conventional equipment, and is illuminated with a mirror 1.
0. The light enters the CCD 12 through the lens 11 and is read. The read original sheet is discharged onto a discharge tray 7 by rollers 5 and conveyed.

第3図には、進行性表面振動波を発生させる振
動体18と電歪素子19の斜め下方から視た部分
詳細が示してある。同図に於て、電歪素子19は
例えばPZT(チタン酸ジルコン鉛)である。振動
体18は弾性物質のアルミ、黄銅又は鋼板からな
り、電歪素子19を接着してあり、その手前端と
奥端はゴム等の振動吸収体(不図示)で保持され
ている。電歪素子19は複数の極性に分極処理さ
れている。図中+・−は極性を示してある。電歪
素子19の一群の分極群19Aともう一方の分極
群19Bは、夫々の群内で振動体の波長λの1/2
波長の整数倍ピツチでnλ/2で分極される。(n
=1.2.3…図はλ/2ピツチの場合)。また、一方
の群19Aに対し他の群19Bは(n0+1/4)λ
ずれたピツチで分極される(n0=0.1.2.3.…図は
λ/4の場合)。電歪素子19の表面には、分極
群19Aの各分極ピツチの一つおきにクシ歯を持
つた電極20Aと21Aとが、分極群19Bの各
分極にも同じような電極20Bと21Bとが、設
けられる。交流電源23には光電スイツチ25を
介してクシ歯電極20Aと21A及び90゜移相器
24に連結され、90゜移相器24の出力はクシ歯
電極20Bと21Bに連結される。
FIG. 3 shows details of a portion of the vibrating body 18 and the electrostrictive element 19, which generate progressive surface vibration waves, as viewed obliquely from below. In the figure, the electrostrictive element 19 is, for example, PZT (lead zirconium titanate). The vibrating body 18 is made of an elastic material such as aluminum, brass, or steel plate, and has an electrostrictive element 19 bonded thereto, and its front and rear ends are held by vibration absorbers (not shown) such as rubber. The electrostrictive element 19 is polarized into a plurality of polarities. In the figure, + and - indicate polarity. One polarization group 19A of the electrostrictive element 19 and the other polarization group 19B have a wavelength λ of 1/2 of the vibrating body within each group.
It is polarized at a pitch of nλ/2, which is an integer multiple of the wavelength. (n
= 1.2.3...The figure is for λ/2 pitch). Also, for one group 19A, for the other group 19B, (n 0 +1/4)λ
It is polarized at a shifted pitch (n 0 =0.1.2.3...The figure shows the case of λ/4). On the surface of the electrostrictive element 19, electrodes 20A and 21A having comb teeth are provided at every other polarization pitch in the polarization group 19A, and similar electrodes 20B and 21B are provided in each polarization pitch in the polarization group 19B. , provided. The AC power supply 23 is connected to the comb tooth electrodes 20A and 21A and a 90° phase shifter 24 through a photoelectric switch 25, and the output of the 90° phase shifter 24 is connected to the comb tooth electrodes 20B and 21B.

このようなシート搬送装置で、光電スイツチ2
5が閉となると、電歪素子19の一つの分極群1
9Aに交流電源23からVoSinωTの交流電圧が
印加され、もう一方の群19Bには90゜移相器2
4を経て、VoCosωTの交流電圧が印加される。
従つて、分極群19Aで相隣り合う分極一つおき
に順方向の電界が加わり、残りの分極一つおきに
は逆方向の電界が加わる。分極群19Bでも相隣
り合う分極一つおきに順方向の電界が加わり、残
りの分極一つおきには逆方向の電界が加わる。二
つの群19Aと19Bの間では90゜位相のずれた
交流電界が印加される。
In such a sheet conveying device, the photoelectric switch 2
5 is closed, one polarization group 1 of the electrostrictive element 19
An AC voltage of VoSinωT is applied to 9A from an AC power supply 23, and a 90° phase shifter 2 is applied to the other group 19B.
4, an AC voltage of VoCosωT is applied.
Therefore, a forward electric field is applied to every other adjacent polarization in the polarization group 19A, and an opposite electric field is applied to every other remaining polarization. In the polarization group 19B, a forward electric field is applied to every other adjacent polarization, and an opposite electric field is applied to every other remaining polarization. AC electric fields with a phase shift of 90° are applied between the two groups 19A and 19B.

電歪素子は、分極方向と順方向の電界が加わる
と分極方向に伸び、逆方向の電界が加わると縮
む。上記交流電界下では、一つおきの分極位置で
伸びると、他の一つおきの分極位置で縮み、さら
に90゜位相のずれた一つおきの分極位置で伸びる
と、他の一つおきの分極位置で縮む。
The electrostrictive element expands in the polarization direction when an electric field is applied in the forward direction of the polarization direction, and contracts when an electric field is applied in the opposite direction. Under the above AC electric field, if it expands at every other polarization position, it will contract at every other polarization position, and if it expands at every other polarization position with a 90° phase shift, it will contract at every other polarization position. Shrinks at the polarization position.

第4図はこの伸縮が振動体に伝えられて、進行
性表面振動波が発生する状態を示している。同図
で、電歪素子19の各分極群19A及び19B
は、説明の便宜上隣接して現わされているが、上
記のλ/4の位相ずれの条件を満足しているた
め、第3図に示す電歪素子19の分極群19A及
び19Bの配列と実質的に等価なものである。い
ま、分極群19Aだけが電圧VoSinωTにより伸
縮した場合は、同図aに示すような定在波による
表面振動が起る(実線は順方向電界、点線は逆方
向電界が加わつているとき)。分極群19Bだけ
が電圧VocosωTにより振動した場合はbに示す
ような定在波による振動が起る。二つの定在波振
動が次々に起ると、振動波は合成されて、振動体
18の表面を進行する。(イ)は時間T=2nπ/ω、
(ロ)はT=π/2ω+2nπ/ω、(ハ)はT=π/ω+
2bπ/ω、(ニ)はT=3π/2ω+2nπ/ωの時の振動
波の状態を示している。表面振動波の波面は振動
体18の下面をx方向に進行する。振動体18の
極を回り込むと上面を−x方向に進行する(第3
図参照)。上面の−x方向の先端まで進行すると、
再度下面をx方向に進行し、次に励起された波と
合体する。
FIG. 4 shows a state in which this expansion and contraction is transmitted to the vibrating body and progressive surface vibration waves are generated. In the figure, each polarization group 19A and 19B of the electrostrictive element 19
are shown adjacent to each other for convenience of explanation, but since they satisfy the above-mentioned phase shift condition of λ/4, they are similar to the arrangement of the polarization groups 19A and 19B of the electrostrictive element 19 shown in FIG. They are substantially equivalent. Now, if only the polarization group 19A is expanded or contracted by the voltage VoSinωT, surface vibrations due to standing waves as shown in FIG. When only the polarization group 19B oscillates due to the voltage VocosωT, oscillations due to standing waves as shown in b occur. When two standing wave vibrations occur one after another, the vibration waves are combined and travel on the surface of the vibrating body 18. (a) is time T = 2nπ/ω,
(b) is T=π/2ω+2nπ/ω, (c) is T=π/ω+
2bπ/ω, (d) indicates the state of the vibration wave when T=3π/2ω+2nπ/ω. The wavefront of the surface vibration wave travels along the lower surface of the vibrating body 18 in the x direction. When it goes around the pole of the vibrating body 18, it moves along the upper surface in the -x direction (the third
(see figure). As you progress to the tip of the top surface in the -x direction,
It travels again along the lower surface in the x direction and then merges with the excited wave.

このような進行性表面振動波は縦波と横波を伴
なつており、第5図に示すように振動体18の上
表面の質点A1・A2・A3…について着目すると、
縦振幅uと横振幅wで反時計方向の回転楕円運動
をしている。振動体18の表面にはシート1が接
触している。表面に於ける質点A1・A2・A3…の
楕円運動の縦振幅uの成分に摩擦駆動され、シー
ト1は矢示X方向に搬送される。
Such progressive surface vibration waves are accompanied by longitudinal waves and transverse waves, and if we focus on the mass points A 1 , A 2 , A 3 . . . on the upper surface of the vibrating body 18 as shown in FIG.
It is moving in a counterclockwise rotational ellipse with a vertical amplitude u and a horizontal amplitude w. The sheet 1 is in contact with the surface of the vibrating body 18. The sheet 1 is conveyed in the direction of the arrow X by being frictionally driven by the longitudinal amplitude u component of the elliptical motion of the mass points A 1 , A 2 , A 3 . . . on the surface.

このように、このシート搬送装置では駆動モー
タ・伝達系・回転ローラを使用していないため、
回転の騒音がしない。ローラの圧接量の調整はじ
め各回転部分の調整が不要となる。
In this way, this sheet conveying device does not use a drive motor, transmission system, or rotating roller, so
There is no rotation noise. There is no need to adjust the pressure contact amount of the roller or any other rotating parts.

第6図は本発明の実施例を示すものである。こ
の実施例では、シートがX方向,Y方向に送られ
る。尚第6図示例は第2〜第5図示例と原理的に
は同一であるので、同一機素に同一符号を付し
て、主として両者の差についてのみ説明する。シ
ー台17のY方向の端にはシートガイドとしての
折り返し部17aがあり、X方向の先には前例と
同じように読取部14がある。シート台17に
は、シートをX方向に搬送するための振動体31
と32及びY方向に搬送するための振動体33と
34が配置される。その各々の振動体31,3
2,33,34には前例と同じように電歪素子が
配置される。
FIG. 6 shows an embodiment of the invention. In this embodiment, sheets are fed in the X and Y directions. Since the sixth illustrated example is the same in principle as the second to fifth illustrated examples, the same elements are given the same reference numerals, and only the differences between the two will be mainly explained. At the end of the sheet table 17 in the Y direction, there is a folded part 17a as a sheet guide, and at the end in the X direction, there is a reading part 14 as in the previous example. The sheet stand 17 has a vibrating body 31 for conveying the sheet in the X direction.
and 32, and vibrating bodies 33 and 34 for conveying in the Y direction are arranged. Each vibrating body 31, 3
Electrostrictive elements are arranged at 2, 33, and 34 as in the previous example.

シートがシート台17に置かれ、各電歪素子に
よつて振動体31,32,33,34が振動する
と、シートはX方向・Y方向に進む。シートが折
り返し部17aに当接すると、それ以上Y方向に
は進まず、折り返し部17aに添つてX方向に進
む。従つてシートを置く位置が若干ずれていたり
まがつていても、装置が自動的に進行方向を修正
することになる。
When a sheet is placed on the seat base 17 and the vibrating bodies 31, 32, 33, and 34 are vibrated by each electrostrictive element, the sheet moves in the X direction and the Y direction. When the sheet comes into contact with the folded portion 17a, the sheet no longer moves in the Y direction, but advances in the X direction along with the folded portion 17a. Therefore, even if the position where the sheet is placed is slightly shifted or twisted, the device will automatically correct the direction of travel.

第7図は別な実施例を示すもので、シート台1
7上のシート1を挾むようにシート抑え板35を
設け、ばね36で下方に付勢される。シート台1
7には電歪素子39を接着した振動体37、抑え
板35には電歪素子40を接着した振動体38が
配置してある。シート1はシート台17と抑え板
35の両方から搬送力を受ける。抑え板35はシ
ートを受け入れやすいように折り返し部35aを
設けても良い。
FIG. 7 shows another embodiment, in which the seat base 1
A sheet restraining plate 35 is provided so as to sandwich the sheet 1 on top of the sheet 7, and is urged downward by a spring 36. Seat stand 1
A vibrating body 37 to which an electrostrictive element 39 is bonded is disposed at 7, and a vibrating body 38 to which an electrostrictive element 40 is bonded to the holding plate 35 is disposed. The sheet 1 receives a conveying force from both the sheet table 17 and the holding plate 35. The holding plate 35 may be provided with a folded portion 35a so as to easily receive the sheet.

以上説明したように本発明の装置を使用すれ
ば、ローラ等の機械的摺動部が無いことから騒音
がなく、オフイス等で使用される事務機に最適で
ある。また、シートと屈曲振動するシート台とが
面或いは多点で接触し、その摩擦で原稿が搬送さ
れるので、従来のローラ等の方式に比べて、種々
の厚みや腰の強さのシートが搬送に使用可能であ
る。更に、シートの斜行を防止できるばかりでな
く、シート台と振動体とが別部材であるので、シ
ート台の形状が制限されることがない。
As explained above, when the device of the present invention is used, there is no noise because there are no mechanical sliding parts such as rollers, and the device is ideal for office machines used in offices and the like. In addition, the sheet and the sheet base that bends and vibrates come into contact with each other on the surface or at multiple points, and the document is transported by the friction, so sheets of various thicknesses and stiffness can be handled more easily than with conventional methods such as rollers. Can be used for transportation. Furthermore, not only can skewing of the sheet be prevented, but also the seat base and the vibrating body are separate members, so there are no restrictions on the shape of the seat base.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のシート搬送装置の側面図、第2
図は本発明の理解を容易とする為のシート搬送装
置の実施例の斜視図、第3図はその要部拡大斜視
図、第4図、第5図は進行性表面振動波を説明す
る図、第6図は本発明の実施例の要部斜視図、第
7図は別な実施例の要部側面図である。 1はシート、17はシート台、18は振動体、
19は電歪素子、23は交流電源、24は90゜移
相器である。
Figure 1 is a side view of a conventional sheet conveying device;
The figure is a perspective view of an embodiment of the sheet conveying device to facilitate understanding of the present invention, FIG. 3 is an enlarged perspective view of the main part thereof, and FIGS. 4 and 5 are diagrams explaining progressive surface vibration waves. , FIG. 6 is a perspective view of a main part of an embodiment of the present invention, and FIG. 7 is a side view of a main part of another embodiment. 1 is a seat, 17 is a seat base, 18 is a vibrating body,
19 is an electrostrictive element, 23 is an AC power supply, and 24 is a 90° phase shifter.

Claims (1)

【特許請求の範囲】[Claims] 1 送るべきシートが圧接されるシート台と、該
シート台に設けられ、シート搬送方向に沿つた方
向に進む進行性振動波を発生する第1の振動体
と、前記シート台に設けられ、第1振動体に発生
する振動波の方向と所定の角度を持つた進行方向
の進行性振動波を発生する第2振動体と、所定位
置に設けられたシートガイドとを有することを特
徴とするシート搬送装置。
1. A sheet stand on which a sheet to be fed is pressed, a first vibrating body provided on the sheet stand and generating a progressive vibration wave that propagates in a direction along the sheet conveyance direction, and a A seat characterized by having a second vibrating body that generates progressive vibration waves in a traveling direction having a predetermined angle with the direction of the vibration waves generated in the first vibrating body, and a sheet guide provided at a predetermined position. Conveyance device.
JP58188757A 1983-10-07 1983-10-07 Sheet transport device Granted JPS6082548A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58188757A JPS6082548A (en) 1983-10-07 1983-10-07 Sheet transport device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58188757A JPS6082548A (en) 1983-10-07 1983-10-07 Sheet transport device

Publications (2)

Publication Number Publication Date
JPS6082548A JPS6082548A (en) 1985-05-10
JPH0476894B2 true JPH0476894B2 (en) 1992-12-04

Family

ID=16229234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58188757A Granted JPS6082548A (en) 1983-10-07 1983-10-07 Sheet transport device

Country Status (1)

Country Link
JP (1) JPS6082548A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60126447U (en) * 1984-02-04 1985-08-26 株式会社トーキン tape feeder
JPS60126446U (en) * 1984-02-04 1985-08-26 株式会社トーキン tape feeder
JPS63290176A (en) * 1987-05-22 1988-11-28 Nec Corp Driving method for supersonic motor
JPS63294270A (en) * 1987-05-22 1988-11-30 Nec Corp Driving method for ultrasonic wave motor
JPS63294269A (en) * 1987-05-22 1988-11-30 Nec Corp Driving method for ultrasonic wave motor
JPS63294272A (en) * 1987-05-22 1988-11-30 Nec Corp Driving method for ultrasonic wave motor
JPH0610043B2 (en) * 1987-11-26 1994-02-09 東京エレクトロン株式会社 Semiconductor substrate carrier
JPH01106453U (en) * 1988-01-06 1989-07-18
JPH01186178A (en) * 1988-01-19 1989-07-25 Toshiba Corp Electrostatic actuator
JPH0784270B2 (en) * 1988-06-10 1995-09-13 日本電気株式会社 Image information reader
JP2725873B2 (en) * 1990-03-05 1998-03-11 キヤノン株式会社 Sheet feeder
JP6871515B2 (en) * 2017-07-13 2021-05-12 シンフォニアテクノロジー株式会社 Work transfer device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59214679A (en) * 1983-05-23 1984-12-04 Fujitsu Ltd Paper feed mechanism by vibration

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59214679A (en) * 1983-05-23 1984-12-04 Fujitsu Ltd Paper feed mechanism by vibration

Also Published As

Publication number Publication date
JPS6082548A (en) 1985-05-10

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