JPH0476560B2 - - Google Patents

Info

Publication number
JPH0476560B2
JPH0476560B2 JP61127335A JP12733586A JPH0476560B2 JP H0476560 B2 JPH0476560 B2 JP H0476560B2 JP 61127335 A JP61127335 A JP 61127335A JP 12733586 A JP12733586 A JP 12733586A JP H0476560 B2 JPH0476560 B2 JP H0476560B2
Authority
JP
Japan
Prior art keywords
electrode
vibrating body
ultrasonic
ultrasonic transducer
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61127335A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62284600A (ja
Inventor
Kenichiro Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP12733586A priority Critical patent/JPS62284600A/ja
Publication of JPS62284600A publication Critical patent/JPS62284600A/ja
Publication of JPH0476560B2 publication Critical patent/JPH0476560B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transducers For Ultrasonic Waves (AREA)
JP12733586A 1986-06-03 1986-06-03 超音波トランスジューサの製造方法 Granted JPS62284600A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12733586A JPS62284600A (ja) 1986-06-03 1986-06-03 超音波トランスジューサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12733586A JPS62284600A (ja) 1986-06-03 1986-06-03 超音波トランスジューサの製造方法

Publications (2)

Publication Number Publication Date
JPS62284600A JPS62284600A (ja) 1987-12-10
JPH0476560B2 true JPH0476560B2 (enrdf_load_stackoverflow) 1992-12-03

Family

ID=14957376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12733586A Granted JPS62284600A (ja) 1986-06-03 1986-06-03 超音波トランスジューサの製造方法

Country Status (1)

Country Link
JP (1) JPS62284600A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9815992D0 (en) * 1998-07-23 1998-09-23 Secr Defence Improvements in and relating to microchemical devices
JP2006105887A (ja) * 2004-10-08 2006-04-20 Synthesis Corp 立体視装置およびそれを備えた立体画像表示システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220599A (ja) * 1985-03-26 1986-09-30 Nec Corp 超音波センサ

Also Published As

Publication number Publication date
JPS62284600A (ja) 1987-12-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term