JPH047655U - - Google Patents

Info

Publication number
JPH047655U
JPH047655U JP4681090U JP4681090U JPH047655U JP H047655 U JPH047655 U JP H047655U JP 4681090 U JP4681090 U JP 4681090U JP 4681090 U JP4681090 U JP 4681090U JP H047655 U JPH047655 U JP H047655U
Authority
JP
Japan
Prior art keywords
tank
temperature sensor
temperature
display unit
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4681090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4681090U priority Critical patent/JPH047655U/ja
Publication of JPH047655U publication Critical patent/JPH047655U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP4681090U 1990-05-01 1990-05-01 Pending JPH047655U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4681090U JPH047655U (zh) 1990-05-01 1990-05-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4681090U JPH047655U (zh) 1990-05-01 1990-05-01

Publications (1)

Publication Number Publication Date
JPH047655U true JPH047655U (zh) 1992-01-23

Family

ID=31562207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4681090U Pending JPH047655U (zh) 1990-05-01 1990-05-01

Country Status (1)

Country Link
JP (1) JPH047655U (zh)

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