JPH047653U - - Google Patents

Info

Publication number
JPH047653U
JPH047653U JP4633890U JP4633890U JPH047653U JP H047653 U JPH047653 U JP H047653U JP 4633890 U JP4633890 U JP 4633890U JP 4633890 U JP4633890 U JP 4633890U JP H047653 U JPH047653 U JP H047653U
Authority
JP
Japan
Prior art keywords
liner
target chamber
covers
faraday cage
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4633890U
Other languages
English (en)
Japanese (ja)
Other versions
JP2527666Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990046338U priority Critical patent/JP2527666Y2/ja
Publication of JPH047653U publication Critical patent/JPH047653U/ja
Application granted granted Critical
Publication of JP2527666Y2 publication Critical patent/JP2527666Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP1990046338U 1990-04-27 1990-04-27 イオン注入装置 Expired - Lifetime JP2527666Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990046338U JP2527666Y2 (ja) 1990-04-27 1990-04-27 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990046338U JP2527666Y2 (ja) 1990-04-27 1990-04-27 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH047653U true JPH047653U (ko) 1992-01-23
JP2527666Y2 JP2527666Y2 (ja) 1997-03-05

Family

ID=31561335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990046338U Expired - Lifetime JP2527666Y2 (ja) 1990-04-27 1990-04-27 イオン注入装置

Country Status (1)

Country Link
JP (1) JP2527666Y2 (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55158890A (en) * 1979-05-28 1980-12-10 Daihen Corp Electric-charged particle beam processing device
JPS5826441A (ja) * 1981-08-10 1983-02-16 Nippon Telegr & Teleph Corp <Ntt> イオン注入装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55158890A (en) * 1979-05-28 1980-12-10 Daihen Corp Electric-charged particle beam processing device
JPS5826441A (ja) * 1981-08-10 1983-02-16 Nippon Telegr & Teleph Corp <Ntt> イオン注入装置

Also Published As

Publication number Publication date
JP2527666Y2 (ja) 1997-03-05

Similar Documents

Publication Publication Date Title
JPH047653U (ko)
JPH047652U (ko)
JPH0340158U (ko)
JPH01168465U (ko)
JPS6151816U (ko)
JPS6284149U (ko)
JPS62204297U (ko)
JPH0349441U (ko)
JPH0388256U (ko)
JPH0389341U (ko)
JPH02148655U (ko)
JPS62166784U (ko)
JPS6159201U (ko)
JPS63127644U (ko)
JPS6245682U (ko)
JPH0393568U (ko)
JPS6455316U (ko)
JPS62155687U (ko)
JPS61134964U (ko)
JPS63127636U (ko)
JPH0411386U (ko)
JPH02123240U (ko)
JPS63132179U (ko)
JPS6162194U (ko)
JPS6163985U (ko)