JPH0476032U - - Google Patents

Info

Publication number
JPH0476032U
JPH0476032U JP11993690U JP11993690U JPH0476032U JP H0476032 U JPH0476032 U JP H0476032U JP 11993690 U JP11993690 U JP 11993690U JP 11993690 U JP11993690 U JP 11993690U JP H0476032 U JPH0476032 U JP H0476032U
Authority
JP
Japan
Prior art keywords
heat
storage space
wafer support
cylinder
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11993690U
Other languages
English (en)
Japanese (ja)
Other versions
JP2502929Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11993690U priority Critical patent/JP2502929Y2/ja
Publication of JPH0476032U publication Critical patent/JPH0476032U/ja
Application granted granted Critical
Publication of JP2502929Y2 publication Critical patent/JP2502929Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11993690U 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置 Expired - Lifetime JP2502929Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11993690U JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11993690U JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Publications (2)

Publication Number Publication Date
JPH0476032U true JPH0476032U (cs) 1992-07-02
JP2502929Y2 JP2502929Y2 (ja) 1996-06-26

Family

ID=31867866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11993690U Expired - Lifetime JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Country Status (1)

Country Link
JP (1) JP2502929Y2 (cs)

Also Published As

Publication number Publication date
JP2502929Y2 (ja) 1996-06-26

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