JPH0475866B2 - - Google Patents
Info
- Publication number
- JPH0475866B2 JPH0475866B2 JP62003062A JP306287A JPH0475866B2 JP H0475866 B2 JPH0475866 B2 JP H0475866B2 JP 62003062 A JP62003062 A JP 62003062A JP 306287 A JP306287 A JP 306287A JP H0475866 B2 JPH0475866 B2 JP H0475866B2
- Authority
- JP
- Japan
- Prior art keywords
- zro
- powder
- oxide
- sintered body
- tic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000843 powder Substances 0.000 claims description 15
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 11
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 7
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 4
- 239000003381 stabilizer Substances 0.000 claims description 4
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 4
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 3
- 239000000292 calcium oxide Substances 0.000 claims description 3
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 3
- 239000000395 magnesium oxide Substances 0.000 claims description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 13
- 239000010409 thin film Substances 0.000 description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003966 growth inhibitor Substances 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Ceramic Products (AREA)
Description
〔産業上の利用分野〕
本発明は、薄膜磁気ヘツド等の基板として有用
なAl2O3−ZrO2−TiC系焼結体の製造方法に関す
る。
〔従来の技術〕
磁気記録分野において、磁気テープや磁気デイ
スクへの記録密度の向上はめざましく、特に薄膜
磁気ヘツドの実用化によつて記録密度は飛躍的に
向上した。
薄膜磁気ヘツドは非磁性体の薄い基板上に薄膜
磁気回路を形成したものであるが、使用する基板
材料の選定は得られる磁気ヘツドの特性及び製造
コストの点等から極めて重要な問題である。
現在、薄膜磁気ヘツド基板として主に用いられ
ているのは、非磁性フエライト又はアルミナ−炭
化チタン（Al2O3−TiC）焼結体である。
しかし、非磁性フエライトは機械的強度が低
く、耐摩耗性に乏しい欠点があつた。これに対し
て、Al2O3−TiC焼結体は非磁性フエライトより
も機械的強度及び耐摩耗性に優れるものの、被加
工性が悪いために、ダイシング工程でチツピング
が発生し易く加工歩留が低い、及び加工速度が小
さい等の欠点があつた。
〔発明が解決しようとする問題点〕
本発明は、かゝる従来の事情に鑑み、機械的特
性なかでも強度に優れると共に、被加工性にも優
れ、薄膜磁気ヘツド用基板等に好適な高強度の焼
結体を提供することを目的とするものである。
〔問題点を解決するための手段〕
本発明のAl2O3−ZrO2−TiC系焼結体の製造方
法は、平均粒径2μｍ以下の炭化チタン粉末10〜
50重量％と、酸化アルミニウム粉末及び安定化剤
として２〜20モル％のａ族元素酸化物、酸化マ
グネシウム及び酸化カルシウムの少なくとも１種
を含有する酸化ジルコニウム粉末（両者の比率は
共に10〜90重量％の範囲である）90〜50重量％と
を混合し、この混合粉末の成形体を非酸化性雰囲
気中において1350℃〜1750℃で焼結することを特
徴とする。
原料粉末の酸化アルミニウム（Al2O3）粉末、
酸化ジルコニウム（ZrO2）粉末及び炭化チタン
（TiC）粉末はボールミル、超音波応用混合等の
通常の方法により均一に分散させることが大切で
ある。均一分散させた混合粉末の成形及び焼結も
通常の方法によるが、空孔をできるだけ減らす為
にホツトプレス又は熱間静水圧プレス（HIP）等
の焼結法によるのが好ましい。
〔作用〕
本発明の焼結体において、Al2O3及びZrO2は骨
格を構成する主成分である。焼結体中に含まれる
ZrO2の結晶形は主として正方晶からなつている。
ZrO2を焼結体中に主として正方晶として存在さ
せるために必要な量の安定化剤をZrO2粉末に添
加するが、一般に安定化剤として２〜20モル％の
ａ族元素酸化物、酸化マグネシウム及び酸化カ
ルシウムの少なくとも１種を含有せしめる。
ZrO2の結晶形として単斜晶又は正方晶が主にな
ると、基板強度の低下が著しく、基板の被加工性
も低下するからである。又、Al2O3とZrO2の比率
は10〜90重量％の範囲であり、ZrO2が90重量％
を超えるとZrO2の粒成長のため焼結体の特性が
低下し、逆いZrO2が10重量％より少ないと焼結
体の靭性が低下して切断加工時にチツピングの発
生が著しい。
TiCは主たる分散相をなしており、TiCの添加
量が10重量％未満では基板強度が低く、切断抵抗
が高いなど被加工性が低下し、逆に50重量％を超
えると焼結性が低下し焼結体に欠陥が増加すると
共に、強度が低下する。更に、TiC粉末の平均粒
度を2μｍ以下とする理由は、平均粒度が2μｍを
超えると焼結体強度が非常に低くなると共に、焼
結体の加工時にチツピングが発生し易くなるため
である。
尚、上記のAl2O3、ZrO2及びTiC以外にも、当
分野において粒成長抑制剤や焼結防剤などの公知
の添加物を10重量％以下の量で添加することもで
きる。
〔実施例〕
Al2O3粉末（平均粒径0.4μｍ）に、ZrO2粉末
（平均粒径0.1μｍ）及びTiC粉末（平均粒径0.8μ
ｍ）を下記第１表に示す割合で配合し、成形して
焼結した。表中、ZrO2欄の（ ）内は含有する
安定化剤とそのモル％を表している。
[Industrial Application Field] The present invention relates to a method for producing an Al 2 O 3 --ZrO 2 --TiC-based sintered body useful as a substrate for thin-film magnetic heads and the like. [Prior Art] In the field of magnetic recording, the recording density of magnetic tapes and magnetic disks has improved markedly, and in particular, the practical use of thin film magnetic heads has dramatically improved the recording density. A thin film magnetic head has a thin film magnetic circuit formed on a thin non-magnetic substrate, and the selection of the substrate material to be used is an extremely important issue from the viewpoint of the characteristics of the resulting magnetic head and the manufacturing cost. Currently, non-magnetic ferrite or alumina-titanium carbide (Al 2 O 3 -TiC) sintered bodies are mainly used as thin film magnetic head substrates. However, non-magnetic ferrite has the drawbacks of low mechanical strength and poor wear resistance. On the other hand, although the Al 2 O 3 -TiC sintered body has superior mechanical strength and wear resistance than non-magnetic ferrite, it has poor processability and is prone to chipping during the dicing process, reducing processing yield. There were disadvantages such as low processing speed and low processing speed. [Problems to be Solved by the Invention] In view of the above-mentioned conventional circumstances, the present invention has been made to provide a high-temperature substrate that has excellent strength among mechanical properties, excellent workability, and is suitable for substrates for thin-film magnetic heads. The purpose is to provide a strong sintered body. [Means for Solving the Problems] The method for producing an Al 2 O 3 -ZrO 2 -TiC-based sintered body of the present invention uses titanium carbide powder with an average particle size of 2 μm or less.
50% by weight and zirconium oxide powder containing aluminum oxide powder and at least 2 to 20 mol% of a group A element oxide, magnesium oxide, and calcium oxide as a stabilizer (both ratios are 10 to 90% by weight) %) and 90 to 50% by weight, and a compact of this mixed powder is sintered at 1350°C to 1750°C in a non-oxidizing atmosphere. Aluminum oxide (Al 2 O 3 ) powder as raw material powder,
It is important to uniformly disperse the zirconium oxide (ZrO 2 ) powder and titanium carbide (TiC) powder by a conventional method such as ball milling or ultrasonic mixing. Molding and sintering of the uniformly dispersed mixed powder can also be done by conventional methods, but in order to reduce the number of pores as much as possible, it is preferable to use a sintering method such as hot pressing or hot isostatic pressing (HIP). [Function] In the sintered body of the present invention, Al 2 O 3 and ZrO 2 are the main components constituting the skeleton. Contained in sintered body
The crystal form of ZrO 2 is mainly tetragonal.
A necessary amount of stabilizer is added to the ZrO 2 powder to make ZrO 2 exist mainly as a tetragonal crystal in the sintered body, but generally 2 to 20 mol% of group A element oxide, oxide, etc. Contains at least one of magnesium and calcium oxide.
This is because if the crystal form of ZrO 2 is mainly monoclinic or tetragonal, the substrate strength will be significantly reduced and the workability of the substrate will also be reduced. Also, the ratio of Al2O3 and ZrO2 is in the range of 10 to 90% by weight, with ZrO2 being 90% by weight .
If the ZrO 2 content exceeds 10% by weight, the properties of the sintered body deteriorate due to the grain growth of ZrO 2 , and conversely, if the ZrO 2 content is less than 10% by weight, the toughness of the sintered body decreases and chipping occurs significantly during cutting. TiC forms the main dispersed phase, and if the amount of TiC added is less than 10% by weight, the substrate strength will be low and the workability will be reduced, such as high cutting resistance.On the other hand, if it exceeds 50% by weight, sinterability will be reduced. As defects increase in the sintered body, the strength decreases. Furthermore, the reason why the average particle size of the TiC powder is set to 2 μm or less is that if the average particle size exceeds 2 μm, the strength of the sintered body becomes extremely low and chipping is likely to occur during processing of the sintered body. In addition to the above-mentioned Al 2 O 3 , ZrO 2 and TiC, additives known in the art such as grain growth inhibitors and sintering inhibitors can also be added in an amount of 10% by weight or less. [Example] Al 2 O 3 powder (average particle size 0.4 μm), ZrO 2 powder (average particle size 0.1 μm) and TiC powder (average particle size 0.8 μm)
m) were blended in the proportions shown in Table 1 below, molded and sintered. In the table, the numbers in parentheses in the ZrO 2 column represent the stabilizer contained and its mol%.
【表】【table】
【表】【table】
【表】【table】
本発明によれば、優れた機械的特性を有すると
同時に被加工性に優れた高強度のAl2O3−ZrO2−
TiC系焼結体を提供することができるので、基板
等への加工歩留を飛躍的に向上させ、しかも加工
速度も早いので加工能率を高めることができる。
本発明のAl2O3−ZrO2−TiC系焼結体は、薄膜
磁気ヘツド用基板として好適であるが、その他に
も例えばサーマルプリンターヘツド等の基板、セ
ラミツクミラー用基板、更には一般構造材等とし
て広い用途を有するものである。
According to the present invention, high-strength Al 2 O 3 −ZrO 2 − has excellent mechanical properties and excellent workability.
Since a TiC-based sintered body can be provided, the processing yield for substrates etc. can be dramatically improved, and the processing speed is also fast, so processing efficiency can be increased. The Al 2 O 3 --ZrO 2 --TiC-based sintered body of the present invention is suitable as a substrate for a thin film magnetic head, but it can also be used as a substrate for a thermal printer head, a substrate for a ceramic mirror, and even a general structural material. It has a wide range of uses such as.
Claims (1)
重量％と、酸化アルミニウム粉末及び安定化剤と
して２〜20モル％のａ族元素酸化物、酸化マグ
ネシウム及び酸化カルシウムの少なくとも１種を
含有する酸化ジルコニウム粉末（両者の比率は共
に10〜90重量％の範囲である）90〜50重量％とを
混合し、この混合粉末の成形体を非酸化性雰囲気
中において1350℃〜1750℃で焼結することを特徴
とする、正方晶酸化ジルコニウムを含有する
Al2O3−ZrO2−TiC系焼結体の製造方法。1 Titanium carbide powder with an average particle size of 2 μm or less 10 to 50
% by weight, and zirconium oxide powder containing aluminum oxide powder and at least 2 to 20 mol % of a group A element oxide, magnesium oxide, and calcium oxide as a stabilizer (both ratios are 10 to 90 mol %) containing tetragonal zirconium oxide, characterized by mixing 90 to 50% by weight (in the range of
A method for producing an Al 2 O 3 −ZrO 2 −TiC-based sintered body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62003062A JPS63170258A (en) | 1987-01-09 | 1987-01-09 | Manufacture of al203-zr02-tic base sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62003062A JPS63170258A (en) | 1987-01-09 | 1987-01-09 | Manufacture of al203-zr02-tic base sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170258A JPS63170258A (en) | 1988-07-14 |
| JPH0475866B2 true JPH0475866B2 (en) | 1992-12-02 |
Family
ID=11546838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62003062A Granted JPS63170258A (en) | 1987-01-09 | 1987-01-09 | Manufacture of al203-zr02-tic base sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170258A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS581854A (en) * | 1981-06-26 | 1983-01-07 | Sumitomo Special Metals Co Ltd | Composite material for magnetic head slider and its production |
| JPS6054266A (en) * | 1983-09-06 | 1985-03-28 | Komatsu Ltd | Method for investigating cause for casting defect |
| JPS61227964A (en) * | 1985-03-29 | 1986-10-11 | 京セラ株式会社 | Ceramic substrate and manufacture |
-
1987
- 1987-01-09 JP JP62003062A patent/JPS63170258A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS581854A (en) * | 1981-06-26 | 1983-01-07 | Sumitomo Special Metals Co Ltd | Composite material for magnetic head slider and its production |
| JPS6054266A (en) * | 1983-09-06 | 1985-03-28 | Komatsu Ltd | Method for investigating cause for casting defect |
| JPS61227964A (en) * | 1985-03-29 | 1986-10-11 | 京セラ株式会社 | Ceramic substrate and manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63170258A (en) | 1988-07-14 |
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