JPH0475318B2 - - Google Patents
Info
- Publication number
- JPH0475318B2 JPH0475318B2 JP9893485A JP9893485A JPH0475318B2 JP H0475318 B2 JPH0475318 B2 JP H0475318B2 JP 9893485 A JP9893485 A JP 9893485A JP 9893485 A JP9893485 A JP 9893485A JP H0475318 B2 JPH0475318 B2 JP H0475318B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- plated
- pickling
- rolling
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 33
- 239000002184 metal Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 20
- 238000005554 pickling Methods 0.000 claims description 20
- 238000005096 rolling process Methods 0.000 claims description 16
- 150000001875 compounds Chemical class 0.000 claims description 11
- 238000005498 polishing Methods 0.000 claims description 10
- 238000000137 annealing Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 7
- 238000005097 cold rolling Methods 0.000 claims description 6
- 238000005238 degreasing Methods 0.000 claims description 5
- 239000003921 oil Substances 0.000 description 16
- 238000007796 conventional method Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000010731 rolling oil Substances 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/34—Pretreatment of metallic surfaces to be electroplated
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Metal Rolling (AREA)
- Chemically Coating (AREA)
- Electroplating Methods And Accessories (AREA)
- Coating With Molten Metal (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
〔産業上の利用分野〕
この発明は、金属めつき面にふくれの発生が全
くない金属めつき板材および形材の製造法に関す
るものである。
〔従来の技術〕
従来、一般に、金属めつき板材および条材(以
下これらを総称して金属めつき板材といい、板材
を対象として説明する)は、まず所定寸法の金属
鋳塊に熱間圧延を施して所定板厚の板材素材と
し、ついでこれに面削を施した後、焼鈍−酸洗−
油付圧延を1サイクルとする工程を、最終板材に
要求される硬さに応じて、1回以上施すことから
なる冷間圧延によつて所定板厚の板材を成形し、
引続いて、連続して、あるいは所定期間経過した
後に、前記油付圧延に際して板材の表面に付着し
た油を脱脂処理により除去し、ついでエツチング
処理し、最終的に金属めつきを施すことによつて
製造されている。
〔発明が解決しようとする問題点〕
しかし、この従来製造法によつて製造された金
属めつき板材においては、これが、例えば半導体
装置の製造工程においてワイヤーボンデイングや
ダイボンデイングのために加熱された場合、金属
めつき面にふくれの発生が著しく、その改善が強
く望まれていた。
〔問題点を解決するための手段〕
そこで、本発明者は、上述のような観点から、
金属めつき面にふくれ発生の全くない金属めつき
板材を得べく研究を行なつた結果、
(a) 金属めつき板材におけるふくれ発生の原因
は、焼鈍によつて素材表面に形成された金属酸
化物皮膜を除去するために酸洗が施されるが、
この場合、酸洗液と金属酸化物および素材金属
との化学的反応によつて、酸洗後の素材表面に
は化合物(以下これを酸洗化合物という)が形
成され、この酸洗化合物の存在にあること。
すなわち、このように素材表面に酸洗化合物
が存在した状態で油付圧延を行なうと、油付圧
延後の素材表面には油を含んだ酸洗化合物が強
固に付着するようになり、この油を含んだ酸洗
化合物は、金属めつき処理の前工程として施さ
れる通常の脱脂処理およびエツチング処理では
完全に除去することができず、したがつて、こ
れら酸洗化合物が残留した状態で金属めつきが
施されることになるため、前記酸洗化合物が原
因でふくれが発生すること。
一方、前記油を含んだ酸洗化合物を完全に除
去するために強いエツチング処理を施すことも
考えられるが、このように強いエツチング処理
を施すと、板材の表面が著しく荒れるようにな
り、平滑な金属めつき面が得られないことから
好ましくないこと。
(b) したがつて、冷間圧延工程における焼鈍−酸
洗後の素材表面に対して、通常の回転ブラシに
よる研磨、フライス面削、旋盤研削、およびセ
ーパ面削などの機械研磨を施して、酸洗によつ
て形成した酸洗化合物を完全に除去してやれ
ば、金属めつき板材にはふくれが発生しないこ
とになるが、実際には、機械研磨に際して発生
した微小の金属粉が原因で金属めつき板材には
ふくれが発生するようになること。
すなわち、この金属粉は素材表面に付着しや
すく、このように素材表面に金属粉が付着した
状態で油付圧延を行なうと、油付圧延後の板材
表面には油によつてコーテイングされた金属粉
が付着し、この油コーテイングの金属粉は通常
の脱脂処理およびエツチング処理では完全に除
去できず、したがつて板材表面に残留した状態
で金属めつきされることになるため、前期残留
した油コーテイングの金属粉が原因で金属めつ
き板材にはふくれが発生するようになること。
(c) しかしながら、上記機械研磨後の素材に対し
て、圧延油を使用しない圧延、すなわち乾式圧
延を施して、機械研磨に際して発生した表面付
着の微小な金属粉を素材表面に一体的に圧着結
合した状態とし、この状態の板材に油付圧延、
脱脂処理、およびエツチング処理を施した後、
金属めつきしても、また前記乾式圧延によつて
所定の硬さが得られる場合には、引続いて軽い
脱脂処理およびエツチング処理を施した後、金
属めつきしても、この結果得られた金属めつき
板材にはふくれの発生は皆無となること。
(d) 上記(a)〜(c)項に示されることは、板材に限ら
ず、断面形状が、円形、正方形、長方形、ある
いは異形の形材、棒材、または線材(これらを
総称して形材という)にも同様にあてはまるこ
と。
以上(a)〜(d)項に示される知見を得たのである。
この発明は、上記知見にもとづいてなされたも
のであつて、通常の圧延工程によつて板材または
形材を成形し、ついでこれに通常の金属めつきを
施すことからなる金属めつき板材および形材の製
造法において、
冷間圧延工程における少なくとも最終工程を、
焼鈍−酸洗−機械研磨−乾式圧延−油付圧延から
なる工程とするか、
あるいは乾式圧延によつて所定の硬さが得られ
る場合には、油付圧延を行なうことなく、焼鈍−
酸洗−機械研磨−乾式圧延からなる工程とする
か、することによつて金属めつき板材または形材
における金属めつき面にふくれが発生するのを皆
無とした点に特徴を有するものである。
〔実施例〕
つぎに、この発明の方法を実施例により具体的
に説明する。
まず、それぞれ第1表に示される材質にして、
厚さ:160mm×幅:370mm×厚さ:1400mmの寸法を
もつた鋳塊に、通常の熱間圧延および冷間圧延を
施して板厚:1mm×幅:370mmをもつた板状素材
を成形し、この板状素材に施される冷間圧延工程
における最終工程条件を、同じく第1表に示され
る条件とすることによつて本発明法1〜6および
従来法1〜6をそれぞれ実施した。
なお、第1表の焼鈍工程において、1時間以上
の焼鈍時間はバツチ式光輝焼鈍炉を用いた場合を
[Industrial Field of Application] The present invention relates to a method for manufacturing metal-plated plates and shapes in which no blistering occurs on the metal-plated surfaces. [Prior Art] Conventionally, metal-plated plates and strips (hereinafter these are collectively referred to as metal-plated plates and will be explained with reference to plates) are first hot-rolled into metal ingots of predetermined dimensions. This process is applied to obtain a plate material of a predetermined thickness, which is then subjected to surface cutting, followed by annealing and pickling.
Forming a plate material of a predetermined thickness by cold rolling, which consists of performing one cycle of oil rolling one or more times depending on the hardness required for the final plate material,
Subsequently, either continuously or after a predetermined period of time has elapsed, the oil adhering to the surface of the plate material during the oil rolling is removed by degreasing treatment, then etching treatment is performed, and finally metal plating is applied. It is manufactured by [Problems to be solved by the invention] However, in the metal-plated plate material manufactured by this conventional manufacturing method, when it is heated for wire bonding or die bonding in the manufacturing process of semiconductor devices, for example, , the occurrence of blistering on the metal plated surface was significant, and there was a strong desire to improve this problem. [Means for Solving the Problems] Therefore, from the above-mentioned viewpoint, the present inventors have solved the problem.
As a result of conducting research to obtain a metal-plated sheet material with no blistering on the metal-plated surface, we found that (a) the cause of blistering in metal-plated sheets is metal oxidation formed on the surface of the material during annealing. Pickling is performed to remove the material film, but
In this case, a compound (hereinafter referred to as a pickling compound) is formed on the surface of the material after pickling due to the chemical reaction between the pickling solution, the metal oxide, and the material metal, and the presence of this pickling compound What's in it. In other words, if oil rolling is performed with the pickling compound present on the material surface, the oil-containing pickling compound will firmly adhere to the material surface after oil rolling, and this oil-containing pickling compound will adhere firmly to the material surface after oil rolling. Pickling compounds containing Since plating will be applied, blistering will occur due to the pickling compound. On the other hand, it may be possible to perform a strong etching treatment to completely remove the oil-containing pickling compound, but if such a strong etching treatment is applied, the surface of the board will become extremely rough, and it will not be smooth. This is undesirable because a metal-plated surface cannot be obtained. (b) Therefore, the surface of the material after annealing and pickling in the cold rolling process is subjected to mechanical polishing such as polishing with a normal rotating brush, milling, lathe grinding, and saper polishing, If the pickling compounds formed by pickling were completely removed, metal-plated plates would not develop blisters, but in reality, metal blisters are caused by minute metal powder generated during mechanical polishing. Blisters begin to appear on the board. In other words, this metal powder tends to adhere to the surface of the material, and if oil rolling is performed with metal powder attached to the surface of the material, metal coated with oil will appear on the surface of the sheet material after oil rolling. The metal powder from the oil coating cannot be completely removed by normal degreasing and etching processes, so the metal plating remains on the surface of the plate, so the remaining oil from the previous stage is removed. Blistering occurs in metal-plated plate materials due to metal powder in the coating. (c) However, the material after mechanical polishing is subjected to rolling without the use of rolling oil, that is, dry rolling, to integrally press and bond the fine metal powder adhering to the surface generated during mechanical polishing to the surface of the material. The plate material in this state is rolled with oil,
After degreasing and etching,
This result can be obtained by metal plating or, if the desired hardness is obtained by the dry rolling, by subsequent light degreasing and etching treatment, and by metal plating. There shall be no blistering on the plated metal plate materials. (d) Items (a) to (c) above apply not only to plates but also to shapes, bars, or wires with circular, square, rectangular, or irregular cross-sectional shapes (these are collectively referred to as The same applies to shapes (referred to as shapes). The findings shown in sections (a) to (d) above were obtained. The present invention has been made based on the above knowledge, and consists of forming a plate or shape by a normal rolling process and then applying a normal metal plating to the metal-plated plate and shape. In the manufacturing method of the material, at least the final step in the cold rolling process,
Either the process consists of annealing - pickling - mechanical polishing - dry rolling - oil rolling, or if the specified hardness can be obtained by dry rolling, annealing - without oil rolling.
The process consists of pickling, mechanical polishing, and dry rolling, thereby eliminating the occurrence of any blistering on the metal-plated surface of metal-plated plates or shapes. . [Example] Next, the method of the present invention will be specifically explained with reference to Examples. First, each material is shown in Table 1,
An ingot with dimensions of thickness: 160 mm x width: 370 mm x thickness: 1400 mm is subjected to normal hot rolling and cold rolling to form a plate material with plate thickness: 1 mm x width: 370 mm. Methods 1 to 6 of the present invention and conventional methods 1 to 6 were carried out by setting the final process conditions in the cold rolling process applied to this plate material to the conditions shown in Table 1. . In addition, in the annealing process in Table 1, the annealing time of 1 hour or more is when a batch type bright annealing furnace is used.
上記の本発明法1〜6および従来法1〜6によ
つて製造された板厚:0.5mmの板材に、それぞれ
第1表に示される層厚:2μmの金属めつきを施
し、この結果の金属めつき板材に、同じく第1表
に示される条件で加熱を加え、加熱後の板材にお
けるふくれ発生状況を観察したところ、本発明法
1〜6による金属めつき板材には全くふくれの発
生が見られないのに対して、従来法1〜6による
金属めつき板材には多数のふくれが発生し、使用
に供することができなかつた。
上述のように、この発明の方法によれば、簡単
な操作で、かつコスト安く、ふくれの発生が皆無
の金属めつき板材および形材を製造することがで
き、したがつて、これを例えば半導体デバイスな
どのエレクトロニクス用電子部材の製造に用いた
場合にはすぐれた性能を発揮するものである。
The plate materials with a thickness of 0.5 mm manufactured by the above-mentioned methods 1 to 6 of the present invention and conventional methods 1 to 6 were plated with metal to a layer thickness of 2 μm as shown in Table 1, and the resulting When the metal-plated plate materials were heated under the conditions shown in Table 1 and the occurrence of blisters in the plate materials after heating was observed, no blisters occurred in the metal-plated plate materials prepared by methods 1 to 6 of the present invention. On the other hand, many blisters occurred in the metal-plated plates prepared by conventional methods 1 to 6, and they could not be used. As described above, according to the method of the present invention, metal-plated plates and shapes can be produced with simple operations and at low cost, and are completely free from blistering. It exhibits excellent performance when used in the manufacture of electronic components for electronics such as devices.
Claims (1)
て板材または形材とし、ついで前記板材または形
材に脱脂処理およびエツチング処理を施した後、
最終的に金属めつきを施すことからなる基本的工
程によつて金属めつき板材または形状を製造する
方法において、 前記冷間圧延工程の少なくとも最終工程におけ
る焼鈍−酸洗後に、前記酸洗によつて素材表面に
形成された酸洗化合物を完全に除去するための機
械研磨と、 前記機械研磨によつて発生した表面付着の金属
粉を、素材表面に一体的に圧着結合するための乾
式圧延と、 からなる工程を施すことによつて、金属めつき板
材または形材における金属めつき面のふくれ発生
を皆無としたことを特徴とする金属めつき板材お
よび形材の製造法。[Claims] 1. A metal ingot is hot-rolled and cold-rolled into a plate or a shape, and then the plate or shape is subjected to degreasing and etching treatment,
In a method for manufacturing a metal-plated plate material or shape by a basic process consisting of finally applying metal plating, the pickling process is performed after annealing and pickling in at least the final step of the cold rolling process. mechanical polishing to completely remove the pickling compound formed on the surface of the material; and dry rolling to integrally bond the metal powder adhering to the surface generated by the mechanical polishing to the surface of the material. A method for manufacturing metal-plated plates and shapes, characterized in that the occurrence of blistering on the metal-plated surface of the metal-plated plates or shapes is completely eliminated by performing the following steps.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9893485A JPS61257488A (en) | 1985-05-10 | 1985-05-10 | Manufacture of metal-plated plate and shape |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9893485A JPS61257488A (en) | 1985-05-10 | 1985-05-10 | Manufacture of metal-plated plate and shape |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61257488A JPS61257488A (en) | 1986-11-14 |
JPH0475318B2 true JPH0475318B2 (en) | 1992-11-30 |
Family
ID=14232952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9893485A Granted JPS61257488A (en) | 1985-05-10 | 1985-05-10 | Manufacture of metal-plated plate and shape |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61257488A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4595647B2 (en) * | 2005-04-20 | 2010-12-08 | 株式会社日立製作所 | Translator |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2687149B2 (en) * | 1988-10-15 | 1997-12-08 | 三共化成株式会社 | Method of connecting metal film, insulator and insert member |
JP4635639B2 (en) * | 2005-02-21 | 2011-02-23 | 三菱マテリアル株式会社 | Method for producing anode copper balls for plating |
JP5706837B2 (en) * | 2012-02-01 | 2015-04-22 | 株式会社Shカッパープロダクツ | Cleaning method and apparatus |
-
1985
- 1985-05-10 JP JP9893485A patent/JPS61257488A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4595647B2 (en) * | 2005-04-20 | 2010-12-08 | 株式会社日立製作所 | Translator |
Also Published As
Publication number | Publication date |
---|---|
JPS61257488A (en) | 1986-11-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |